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GB1322670A - Apparatus for metal evaporation coating - Google Patents

Apparatus for metal evaporation coating

Info

Publication number
GB1322670A
GB1322670A GB3537971A GB1322670DA GB1322670A GB 1322670 A GB1322670 A GB 1322670A GB 3537971 A GB3537971 A GB 3537971A GB 1322670D A GB1322670D A GB 1322670DA GB 1322670 A GB1322670 A GB 1322670A
Authority
GB
United Kingdom
Prior art keywords
cathode
anode
evaporation surface
cooling
evaporated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3537971A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OTHERS
Original Assignee
OTHERS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OTHERS filed Critical OTHERS
Publication of GB1322670A publication Critical patent/GB1322670A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)

Abstract

1322670 Arc evaporation apparatus L P SABLEV N P ATAMANSKY V N GORBUNOV J I DOLOTOV V N LUTSENKO V M LUNEV and V V USOV 28 July 1971 35379/71 Heading C7F [Also in Division H1] Vacuum vapour deposition apparatus comprises an anode 26, a cathode 9 of the metal to be evaporated, arranged on cooling bed 8 and facing the anode, means 6 for maintaining a vacuum, an arc current source 40 connectable between anode 26 and cathode 9, a trigger electrode 29 arranged to generate an electric arc cathode spot on the evaporation surface of the cathode, and means, such as shield 21, for extinguishing the cathode spot when it displaces from the evaporation surface to a non-evaporation surface of the cathode. The anode may be a cylindrical or spherical envelope within chamber 2, or may be the chamber itself, Fig.9 (not shown) or the substrates may constitute the anode, Figs.6, 7, and 8 (not shown). The substrate(s) 13 may be individual plates, or a moving metal band, Fig.4 (not shown); the cathode evaporation surface may be a flat disc or ring, or the inside or outside of a cylinder (for coating the outside or inside respectively of a tube); cooling is by circulation of a cooling liquid via nipples 19 and space 17 or by provision of an external heat sink, Fig. 3 (not shown), and automatic control of trigger electrode 29 is achieved using various described circuits. Metals which may be evaporated are Pb, Sn, Zn, Cr, Cd, Nb, Mo, Ta, Ti and W.
GB3537971A 1971-07-19 1971-07-28 Apparatus for metal evaporation coating Expired GB1322670A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US16375771A 1971-07-19 1971-07-19

Publications (1)

Publication Number Publication Date
GB1322670A true GB1322670A (en) 1973-07-11

Family

ID=22591432

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3537971A Expired GB1322670A (en) 1971-07-19 1971-07-28 Apparatus for metal evaporation coating

Country Status (4)

Country Link
US (1) US3793179A (en)
DE (1) DE2136532C3 (en)
FR (1) FR2147880B1 (en)
GB (1) GB1322670A (en)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4309315A (en) 1978-12-27 1982-01-05 Nissan Motor Company, Ltd. Surface-activated functional materials and a method of producing the same
GB2139648A (en) * 1983-05-13 1984-11-14 Wedtech Corp Method of and apparatus for the coating of a substrate with material electrically transformed into a vapour phase
GB2140040A (en) * 1983-05-09 1984-11-21 Vac Tec Syst Evaporation arc stabilization
GB2148329A (en) * 1983-09-12 1985-05-30 Vac Tec Syst Improved method and apparatus for evaporation arc stabilization including initial target cleaning
GB2150947A (en) * 1983-12-07 1985-07-10 Vac Tec Syst Evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
US4537794A (en) * 1981-02-24 1985-08-27 Wedtech Corp. Method of coating ceramics
GB2156384A (en) * 1981-02-24 1985-10-09 Wedtech Corp Apparatus for vapour deposition by arc discharge
GB2159540A (en) * 1984-05-25 1985-12-04 Wedtech Corp Apparatus and methods for coating substrates
US4596719A (en) * 1981-02-24 1986-06-24 Wedtech Corp. Multilayer coating method and apparatus
DE3529813A1 (en) * 1984-12-20 1986-07-03 Vladimir Petrovic Petrakov Ion plasma vapour deposition process and system for carrying out this process
DE3707545A1 (en) * 1987-02-03 1988-08-11 Balzers Hochvakuum ARRANGEMENT FOR STABILIZING AN ARC BETWEEN AN ANODE AND A CATHODE
US5096558A (en) * 1984-04-12 1992-03-17 Plasco Dr. Ehrich Plasma - Coating Gmbh Method and apparatus for evaporating material in vacuum
DE9207046U1 (en) * 1992-05-25 1992-07-23 VTD-Vakuumtechnik Dresden GmbH, O-8017 Dresden Ignition device for a vacuum arc discharge evaporator
RU2214476C2 (en) * 2001-07-18 2003-10-20 Дочернее государственное предприятие "Институт ядерной физики" Национального ядерного центра Республики Казахстан Method of forming coat from precious metals and their alloys
RU2214477C2 (en) * 2001-07-18 2003-10-20 Дочернее государственное предприятие "Институт ядерной физики" Национального ядерного центра Республики Казахстан Installation for coating deposition

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SU1040631A1 (en) * 1980-06-25 1983-09-07 Предприятие П/Я В-8851 Vacuum arc apparatus
US4512867A (en) * 1981-11-24 1985-04-23 Andreev Anatoly A Method and apparatus for controlling plasma generation in vapor deposition
AT376460B (en) * 1982-09-17 1984-11-26 Kljuchko Gennady V PLASMA ARC DEVICE FOR APPLYING COVERS
US4448799A (en) * 1983-04-21 1984-05-15 Multi-Arc Vacuum Systems Inc. Arc-initiating trigger apparatus and method for electric arc vapor deposition coating systems
US4430184A (en) 1983-05-09 1984-02-07 Vac-Tec Systems, Inc. Evaporation arc stabilization
US4559121A (en) * 1983-09-12 1985-12-17 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization for permeable targets
US4622452A (en) * 1983-07-21 1986-11-11 Multi-Arc Vacuum Systems, Inc. Electric arc vapor deposition electrode apparatus
US4559125A (en) * 1983-09-12 1985-12-17 Vac-Tec Systems, Inc. Apparatus for evaporation arc stabilization during the initial clean-up of an arc target
US4600489A (en) * 1984-01-19 1986-07-15 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
US4895765A (en) * 1985-09-30 1990-01-23 Union Carbide Corporation Titanium nitride and zirconium nitride coating compositions, coated articles and methods of manufacture
US4839245A (en) * 1985-09-30 1989-06-13 Union Carbide Corporation Zirconium nitride coated article and method for making same
US4929322A (en) * 1985-09-30 1990-05-29 Union Carbide Corporation Apparatus and process for arc vapor depositing a coating in an evacuated chamber
US4620913A (en) * 1985-11-15 1986-11-04 Multi-Arc Vacuum Systems, Inc. Electric arc vapor deposition method and apparatus
CH671238A5 (en) * 1986-11-06 1989-08-15 Vni Instrument Inst
US5215640A (en) * 1987-02-03 1993-06-01 Balzers Ag Method and arrangement for stabilizing an arc between an anode and a cathode particularly for vacuum coating devices
FR2612204A1 (en) * 1987-03-12 1988-09-16 Vac Tec Syst METHOD AND APPARATUS FOR VACUUM ELECTRIC ARC PLASMA DEPOSITION OF DECORATIVE COATINGS AND WEAR RESISTANT COATINGS
EP0298157B1 (en) * 1987-06-29 1992-09-02 Hauzer Holding B.V. Method and device for coating cavities of objects
US4943325A (en) * 1988-10-19 1990-07-24 Black & Veatch, Engineers-Architects Reflector assembly
JP2718731B2 (en) * 1988-12-21 1998-02-25 株式会社神戸製鋼所 Vacuum arc deposition apparatus and vacuum arc deposition method
US4936960A (en) * 1989-01-03 1990-06-26 Advanced Energy Industries, Inc. Method and apparatus for recovery from low impedance condition during cathodic arc processes
US5238546A (en) * 1990-03-01 1993-08-24 Balzers Aktiengesellschaft Method and apparatus for vaporizing materials by plasma arc discharge
DE4006456C1 (en) * 1990-03-01 1991-05-29 Balzers Ag, Balzers, Li Appts. for vaporising material in vacuum - has electron beam gun or laser guided by electromagnet to form cloud or pre-melted spot on the target surface
US5037522B1 (en) * 1990-07-24 1996-07-02 Vergason Technology Inc Electric arc vapor deposition device
US5858456A (en) * 1991-02-06 1999-01-12 Applied Vacuum Technologies 1 Ab Method for metal coating discrete objects by vapor deposition
CA2065581C (en) 1991-04-22 2002-03-12 Andal Corp. Plasma enhancement apparatus and method for physical vapor deposition
WO1992019789A1 (en) * 1991-04-29 1992-11-12 Nauchno-Proizvodstvennoe Predpriyatie 'novatekh' Electric arc evaporator of metals
DE4125365C1 (en) 1991-07-31 1992-05-21 Multi-Arc Oberflaechentechnik Gmbh, 5060 Bergisch Gladbach, De
IT1253065B (en) * 1991-12-13 1995-07-10 Unicoat Srl VOLTAIC ARC VAPORIZER
US5282944A (en) * 1992-07-30 1994-02-01 The United States Of America As Represented By The United States Department Of Energy Ion source based on the cathodic arc
US5380421A (en) * 1992-11-04 1995-01-10 Gorokhovsky; Vladimir I. Vacuum-arc plasma source
DE69225002T2 (en) * 1992-12-30 1998-09-03 N Proizv Predprijatie Novatech PLANT FOR VACUUM-PLASMA TREATMENT OF WORKPIECES
EP0658634B1 (en) * 1993-12-17 1999-03-10 KABUSHIKI KAISHA KOBE SEIKO SHO also known as Kobe Steel Ltd. Vacuum arc deposition apparatus
US5480527A (en) * 1994-04-25 1996-01-02 Vapor Technologies, Inc. Rectangular vacuum-arc plasma source
DE4441117C1 (en) * 1994-11-18 1995-10-26 Plasma Applikation Mbh Ges Process for coating substrates and device for carrying out the process
JP3287163B2 (en) * 1995-01-23 2002-05-27 日新電機株式会社 Arc evaporation source
US5518597A (en) * 1995-03-28 1996-05-21 Minnesota Mining And Manufacturing Company Cathodic arc coating apparatus and method
WO1996031899A1 (en) 1995-04-07 1996-10-10 Advanced Energy Industries, Inc. Adjustable energy quantum thin film plasma processing system
CH689558A5 (en) 1995-07-11 1999-06-15 Erich Bergmann Vaporization and evaporator unit.
US5656091A (en) * 1995-11-02 1997-08-12 Vacuum Plating Technology Corporation Electric arc vapor deposition apparatus and method
EP0832309A4 (en) * 1996-04-08 2001-06-20 Ronald Christy Cathodic arc cathode
DE19652633A1 (en) * 1996-09-13 1998-03-19 Euromat Gmbh Method and device for internally coating metallic components
DE19654336C2 (en) * 1996-12-24 2002-12-12 Bekaert Cmtm Gmbh Surface treatment of metallic strips using a magnetically moving arc
US5932078A (en) * 1997-08-30 1999-08-03 United Technologies Corporation Cathodic arc vapor deposition apparatus
US6036828A (en) * 1997-08-30 2000-03-14 United Technologies Corporation Apparatus for steering the arc in a cathodic arc coater
US6009829A (en) * 1997-08-30 2000-01-04 United Technologies Corporation Apparatus for driving the arc in a cathodic arc coater
US5972185A (en) * 1997-08-30 1999-10-26 United Technologies Corporation Cathodic arc vapor deposition apparatus (annular cathode)
DE19853943B4 (en) 1997-11-26 2006-04-20 Vapor Technologies, Inc. (Delaware Corporation), Longmont Cathode for sputtering or arc vapor deposition as well as apparatus for coating or ion implantation with such a cathode
US6103074A (en) * 1998-02-14 2000-08-15 Phygen, Inc. Cathode arc vapor deposition method and apparatus
US5976636A (en) * 1998-03-19 1999-11-02 Industrial Technology Research Institute Magnetic apparatus for arc ion plating
WO1999055929A1 (en) * 1998-04-29 1999-11-04 Unaxis Trading Ag Tool or machine component and method for increasing the resistance to wear of said component
CA2268659C (en) * 1999-04-12 2008-12-30 Vladimir I. Gorokhovsky Rectangular cathodic arc source and method of steering an arc spot
US6929727B2 (en) * 1999-04-12 2005-08-16 G & H Technologies, Llc Rectangular cathodic arc source and method of steering an arc spot
US5997705A (en) * 1999-04-14 1999-12-07 Vapor Technologies, Inc. Rectangular filtered arc plasma source
CA2305938C (en) 2000-04-10 2007-07-03 Vladimir I. Gorokhovsky Filtered cathodic arc deposition method and apparatus
US7300559B2 (en) * 2000-04-10 2007-11-27 G & H Technologies Llc Filtered cathodic arc deposition method and apparatus
US6402901B1 (en) * 2001-03-16 2002-06-11 4 Wave, Inc. System and method for performing sputter deposition using a spherical geometry
US6436254B1 (en) * 2001-04-03 2002-08-20 General Electric Company Cathode mounting system for cathodic arc cathodes
US6936145B2 (en) * 2002-02-28 2005-08-30 Ionedge Corporation Coating method and apparatus
DE10224991A1 (en) * 2002-06-05 2004-01-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and device for reducing the ignition voltage of plasmas
US6770178B2 (en) * 2002-08-09 2004-08-03 United Technologies Corporation Cathodic arc disposable sting shielding
US20050176251A1 (en) * 2004-02-05 2005-08-11 Duong Chau H. Polishing pad with releasable slick particles
US9997338B2 (en) * 2005-03-24 2018-06-12 Oerlikon Surface Solutions Ag, Pfäffikon Method for operating a pulsed arc source
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KR200487382Y1 (en) * 2014-08-04 2018-09-07 수라사크 수린퐁 Filter apparatus for arc ion evaporator used in cathodic arc plasma deposition system
RU2710809C1 (en) * 2019-08-05 2020-01-14 Общество с ограниченной ответственностью "НПП "Уралавиаспецтехнология" Apparatus for applying ion-plasma coatings
CN113957389B (en) * 2020-07-21 2023-08-11 宝山钢铁股份有限公司 Vacuum coating device with porous noise reduction and uniform distribution of metal vapor
CN118756099B (en) * 2024-09-09 2024-12-17 湘潭宏大真空技术股份有限公司 Evaporation coating device for AF film

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US2972695A (en) * 1957-05-24 1961-02-21 Vickers Electrical Co Ltd Stabilisation of low pressure d.c. arc discharges
US3625848A (en) * 1968-12-26 1971-12-07 Alvin A Snaper Arc deposition process and apparatus
DE1953659C3 (en) * 1969-10-21 1979-01-25 N.V. Philips' Gloeilampenfabrieken, Eindhoven (Niederlande) Ion source for atomization with slow ions
US3661758A (en) * 1970-06-26 1972-05-09 Hewlett Packard Co Rf sputtering system with the anode enclosing the target

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4309315A (en) 1978-12-27 1982-01-05 Nissan Motor Company, Ltd. Surface-activated functional materials and a method of producing the same
US4609564A (en) * 1981-02-24 1986-09-02 Wedtech Corp. Method of and apparatus for the coating of a substrate with material electrically transformed into a vapor phase
US4537794A (en) * 1981-02-24 1985-08-27 Wedtech Corp. Method of coating ceramics
GB2156384A (en) * 1981-02-24 1985-10-09 Wedtech Corp Apparatus for vapour deposition by arc discharge
US4596719A (en) * 1981-02-24 1986-06-24 Wedtech Corp. Multilayer coating method and apparatus
GB2140040A (en) * 1983-05-09 1984-11-21 Vac Tec Syst Evaporation arc stabilization
GB2139648A (en) * 1983-05-13 1984-11-14 Wedtech Corp Method of and apparatus for the coating of a substrate with material electrically transformed into a vapour phase
US4505948A (en) * 1983-05-13 1985-03-19 Wedtech Corp. Method of coating ceramics and quartz crucibles with material electrically transformed into a vapor phase
GB2148329A (en) * 1983-09-12 1985-05-30 Vac Tec Syst Improved method and apparatus for evaporation arc stabilization including initial target cleaning
GB2150947A (en) * 1983-12-07 1985-07-10 Vac Tec Syst Evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
US5096558A (en) * 1984-04-12 1992-03-17 Plasco Dr. Ehrich Plasma - Coating Gmbh Method and apparatus for evaporating material in vacuum
GB2159540A (en) * 1984-05-25 1985-12-04 Wedtech Corp Apparatus and methods for coating substrates
DE3529813A1 (en) * 1984-12-20 1986-07-03 Vladimir Petrovic Petrakov Ion plasma vapour deposition process and system for carrying out this process
DE3707545A1 (en) * 1987-02-03 1988-08-11 Balzers Hochvakuum ARRANGEMENT FOR STABILIZING AN ARC BETWEEN AN ANODE AND A CATHODE
DE9207046U1 (en) * 1992-05-25 1992-07-23 VTD-Vakuumtechnik Dresden GmbH, O-8017 Dresden Ignition device for a vacuum arc discharge evaporator
RU2214476C2 (en) * 2001-07-18 2003-10-20 Дочернее государственное предприятие "Институт ядерной физики" Национального ядерного центра Республики Казахстан Method of forming coat from precious metals and their alloys
RU2214477C2 (en) * 2001-07-18 2003-10-20 Дочернее государственное предприятие "Институт ядерной физики" Национального ядерного центра Республики Казахстан Installation for coating deposition

Also Published As

Publication number Publication date
FR2147880B1 (en) 1976-03-26
DE2136532C3 (en) 1979-03-22
FR2147880A1 (en) 1973-03-11
DE2136532B2 (en) 1978-07-20
US3793179A (en) 1974-02-19
DE2136532A1 (en) 1973-02-08

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PE20 Patent expired after termination of 20 years