GB1379011A - Method of manufacturing semiconductor devices - Google Patents
Method of manufacturing semiconductor devicesInfo
- Publication number
- GB1379011A GB1379011A GB2009073A GB2009073A GB1379011A GB 1379011 A GB1379011 A GB 1379011A GB 2009073 A GB2009073 A GB 2009073A GB 2009073 A GB2009073 A GB 2009073A GB 1379011 A GB1379011 A GB 1379011A
- Authority
- GB
- United Kingdom
- Prior art keywords
- platinum
- wafer
- diffused
- nickel
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P14/46—
-
- H10P32/171—
-
- H10P32/18—
-
- H10P95/00—
Landscapes
- Electrodes Of Semiconductors (AREA)
- Chemically Coating (AREA)
Abstract
1379011 Semi-conductor devices MATSUSHITA ELECTRONICS CORP 27 April 1973 [2 May 1972] 20090/73 Heading H1K The manufacture of a semi-conductor device comprises coating one surface of a silicon body containing at least one PN junction with platinum, heating to adhere it to the silicon, plating nickel on the platinum and then heating to diffuse the platinum into the body. As described phosphorus is first diffused into opposed faces of an N type silicon wafer, residual oxide removed, the diffused layer lapped from one face and boron diffused into the opposite face to form a junction. After clearing away oxide the wafer is dipped in an aqueous solution of chloroplatinic acid and hydrofluoric acid to deposit the platinum and then heated at 700 C. for 5 to 10 minutes in an inert atmosphere. Electroless nickel is then deposited and the wafer reheated for 10-60 minutes at 800- 900 C. in inert gas. This improves the adhesion of the nickel which constitutes the ohmic contacts to the wafer and by reducing the carrier lifetime improves the switching characteristics of the device.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47044141A JPS5745061B2 (en) | 1972-05-02 | 1972-05-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1379011A true GB1379011A (en) | 1975-01-02 |
Family
ID=12683347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2009073A Expired GB1379011A (en) | 1972-05-02 | 1973-04-27 | Method of manufacturing semiconductor devices |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5745061B2 (en) |
| CA (1) | CA980918A (en) |
| DE (1) | DE2321390C3 (en) |
| FR (1) | FR2183111B1 (en) |
| GB (1) | GB1379011A (en) |
| IT (1) | IT988158B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS591667A (en) * | 1982-05-20 | 1984-01-07 | ゼネラル・エレクトリツク・カンパニイ | Platinum non-electrolytic plating process for silicon |
| JPS60182010A (en) * | 1984-02-29 | 1985-09-17 | Canon Electronics Inc | Head device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL241982A (en) * | 1958-08-13 | 1900-01-01 | ||
| NL134170C (en) * | 1963-12-17 | 1900-01-01 | ||
| DE1213921B (en) * | 1964-08-25 | 1966-04-07 | Bosch Gmbh Robert | Method for manufacturing a semiconductor device |
| DE1283970B (en) * | 1966-03-19 | 1968-11-28 | Siemens Ag | Metallic contact on a semiconductor component |
| US3599054A (en) * | 1968-11-22 | 1971-08-10 | Bell Telephone Labor Inc | Barrier layer devices and methods for their manufacture |
| US3640783A (en) * | 1969-08-11 | 1972-02-08 | Trw Semiconductors Inc | Semiconductor devices with diffused platinum |
-
1972
- 1972-05-02 JP JP47044141A patent/JPS5745061B2/ja not_active Expired
-
1973
- 1973-04-27 DE DE2321390A patent/DE2321390C3/en not_active Expired
- 1973-04-27 FR FR7315568A patent/FR2183111B1/fr not_active Expired
- 1973-04-27 GB GB2009073A patent/GB1379011A/en not_active Expired
- 1973-05-01 CA CA170,129A patent/CA980918A/en not_active Expired
- 1973-05-02 IT IT49755/73A patent/IT988158B/en active
Also Published As
| Publication number | Publication date |
|---|---|
| IT988158B (en) | 1975-04-10 |
| FR2183111B1 (en) | 1976-11-12 |
| CA980918A (en) | 1975-12-30 |
| JPS5745061B2 (en) | 1982-09-25 |
| JPS495575A (en) | 1974-01-18 |
| DE2321390C3 (en) | 1982-07-08 |
| FR2183111A1 (en) | 1973-12-14 |
| DE2321390B2 (en) | 1976-10-28 |
| DE2321390A1 (en) | 1973-11-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| 746 | Register noted 'licences of right' (sect. 46/1977) | ||
| PE20 | Patent expired after termination of 20 years |
Effective date: 19930426 |