GB1220110A - Apparatus for producing a metallic vapour - Google Patents
Apparatus for producing a metallic vapourInfo
- Publication number
- GB1220110A GB1220110A GB48427/68A GB4842768A GB1220110A GB 1220110 A GB1220110 A GB 1220110A GB 48427/68 A GB48427/68 A GB 48427/68A GB 4842768 A GB4842768 A GB 4842768A GB 1220110 A GB1220110 A GB 1220110A
- Authority
- GB
- United Kingdom
- Prior art keywords
- evaporator
- resistance
- producing
- graphite
- trough
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 2
- 239000004411 aluminium Substances 0.000 abstract 2
- 229910052782 aluminium Inorganic materials 0.000 abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 2
- 239000010949 copper Substances 0.000 abstract 2
- 229910052802 copper Inorganic materials 0.000 abstract 2
- 229910002804 graphite Inorganic materials 0.000 abstract 2
- 239000010439 graphite Substances 0.000 abstract 2
- 229910052582 BN Inorganic materials 0.000 abstract 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 abstract 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229910001338 liquidmetal Inorganic materials 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
- Manufacture Of Alloys Or Alloy Compounds (AREA)
Abstract
1,220,110. Apparatus for producing a metallic vapour. COMPAGNIE GENERALE d'ELEC - TRICITE. 11 Oct., 1968 [6 Nov., 1967; 14 Feb., 1968], No. 48427/68. Heading F4B. [Also in Divisions C6-C7] Apparatus for producing aluminium vapour, for performing metallizing operations in a rarefied atmosphere, comprises a bridge-shaped refractory evaporator member 1 mounted above an elongate electric resistance heating element 3. One or more aluminium filaments 2 are fed at a controlled rate to the upper surface of evaporator 1, and are thereby quasi-instantaneously melted and vaporized. A water cooled copper heat reflecting trough 11 surrounds both the evaporator 1 and the resistance 3, and carries copper support members 12 on which evaporator 1 is mounted, and also electrical connections (not shown) for resistance 3. The distance between the surfaces of the evaporator 1, resistance 3 and trough 11 are sufficiently large to prevent any drops of liquid metal being maintained between them by capillarity. The evaporator member 1 may be of boron nitride or graphite and the element 3 of titanium boride or graphite.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR127093 | 1967-11-06 | ||
| FR139874A FR94385E (en) | 1967-11-06 | 1968-02-14 | Source for vacuum evaporation. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1220110A true GB1220110A (en) | 1971-01-20 |
Family
ID=26180552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB48427/68A Expired GB1220110A (en) | 1967-11-06 | 1968-10-11 | Apparatus for producing a metallic vapour |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3541301A (en) |
| BE (1) | BE722796A (en) |
| FR (1) | FR94385E (en) |
| GB (1) | GB1220110A (en) |
| NL (1) | NL6815791A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2250752A (en) * | 1990-10-12 | 1992-06-17 | Custom Metalliz Serv Inc | Cylindrical vapor source for vacuum metallizing containing through passage; radiant shield associated therewith |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4264803A (en) * | 1978-01-10 | 1981-04-28 | Union Carbide Corporation | Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization |
| US5383969A (en) * | 1993-04-05 | 1995-01-24 | Cvd, Inc. | Process and apparatus for supplying zinc vapor continuously to a chemical vapor deposition process from a continuous supply of solid zinc |
| US6229956B1 (en) * | 2000-03-22 | 2001-05-08 | Advanced Ceramics Corporation | Flash evaporator vessel |
| CN1332061C (en) * | 2000-12-14 | 2007-08-15 | 通用电气公司 | Quick steaming container |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2664853A (en) * | 1952-05-12 | 1954-01-05 | Nat Res Corp | Apparatus for vapor coating |
| US3036549A (en) * | 1957-05-08 | 1962-05-29 | Sumitomo Electric Industries | Apparatus for vacuum evaporation of metals |
| GB900205A (en) * | 1957-07-15 | 1962-07-04 | Richard John Fletcher | Improvements in and relating to sources for the evaporation of metals and other materials under vacuum |
-
1968
- 1968-02-14 FR FR139874A patent/FR94385E/en not_active Expired
- 1968-10-11 GB GB48427/68A patent/GB1220110A/en not_active Expired
- 1968-10-24 BE BE722796D patent/BE722796A/xx unknown
- 1968-10-31 US US772281A patent/US3541301A/en not_active Expired - Lifetime
- 1968-11-06 NL NL6815791A patent/NL6815791A/xx not_active Application Discontinuation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2250752A (en) * | 1990-10-12 | 1992-06-17 | Custom Metalliz Serv Inc | Cylindrical vapor source for vacuum metallizing containing through passage; radiant shield associated therewith |
| GB2250752B (en) * | 1990-10-12 | 1994-11-23 | Custom Metalliz Serv Inc | Vapor source for vacuum metallizing |
Also Published As
| Publication number | Publication date |
|---|---|
| BE722796A (en) | 1969-04-24 |
| NL6815791A (en) | 1969-05-08 |
| DE1805246B2 (en) | 1977-02-03 |
| DE1805246A1 (en) | 1969-06-19 |
| FR94385E (en) | 1969-08-08 |
| US3541301A (en) | 1970-11-17 |
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