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GB1217685A - Improvements in or relating to methods and apparatus for sputtering of materials - Google Patents

Improvements in or relating to methods and apparatus for sputtering of materials

Info

Publication number
GB1217685A
GB1217685A GB25874/67A GB2587467A GB1217685A GB 1217685 A GB1217685 A GB 1217685A GB 25874/67 A GB25874/67 A GB 25874/67A GB 2587467 A GB2587467 A GB 2587467A GB 1217685 A GB1217685 A GB 1217685A
Authority
GB
United Kingdom
Prior art keywords
sputtering
targets
deposited
anode
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB25874/67A
Inventor
Norman Lomas Sigournay
Hugh Norman Evans
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Smiths Group PLC
Original Assignee
Smiths Group PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Smiths Group PLC filed Critical Smiths Group PLC
Priority to GB25874/67A priority Critical patent/GB1217685A/en
Priority to US733669A priority patent/US3576729A/en
Publication of GB1217685A publication Critical patent/GB1217685A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/10—Construction relative to lubrication
    • F16C33/1025—Construction relative to lubrication with liquid, e.g. oil, as lubricant
    • F16C33/106—Details of distribution or circulation inside the bearings, e.g. details of the bearing surfaces to affect flow or pressure of the liquid
    • F16C33/1065—Grooves on a bearing surface for distributing or collecting the liquid
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00—Sliding-contact bearings for exclusively rotary movement
    • F16C17/10—Sliding-contact bearings for exclusively rotary movement for both radial and axial load
    • F16C17/102—Sliding-contact bearings for exclusively rotary movement for both radial and axial load with grooves in the bearing surface to generate hydrodynamic pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Fluid Mechanics (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1,217,685. Coating by sputtering. SMITHS INDUSTRIES Ltd. May 31, 1968 [June 5, 1967], No.25874/67. Heading C7F. Material is sputtered from targets 7 on to substrates 10 of e.g. alumina on carriers 11 supported from hooks 8 by forming a plasma in an argon atmosphere between anode 1 and cathode 2, whilst maintaining the targets at a negative potential and controlling the plasma column with electro-magnets 19, 20 arranged with which are windings 25 in such a manner that the magnetic field is transverse to the plasma column and rotates about it. The substrates may first be cleaned by using the anode and cathode to form a glow discharge in an argon atmosphere at a pressure higher than that used for sputtering. A Ni-Cr alloy may be deposited first and then by rotating the targets 7 through 180 degrees, Cu or Au may be deposited on the Ni-Cr. The coatings may be subsequently heated at 150‹C, and etched non-conductive materials may also be deposited particularly when using a R. F. field.
GB25874/67A 1967-06-05 1967-06-05 Improvements in or relating to methods and apparatus for sputtering of materials Expired GB1217685A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB25874/67A GB1217685A (en) 1967-06-05 1967-06-05 Improvements in or relating to methods and apparatus for sputtering of materials
US733669A US3576729A (en) 1967-06-05 1968-05-31 Sputtering methods and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB25874/67A GB1217685A (en) 1967-06-05 1967-06-05 Improvements in or relating to methods and apparatus for sputtering of materials

Publications (1)

Publication Number Publication Date
GB1217685A true GB1217685A (en) 1970-12-31

Family

ID=10234781

Family Applications (1)

Application Number Title Priority Date Filing Date
GB25874/67A Expired GB1217685A (en) 1967-06-05 1967-06-05 Improvements in or relating to methods and apparatus for sputtering of materials

Country Status (2)

Country Link
US (1) US3576729A (en)
GB (1) GB1217685A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2144772A (en) * 1983-07-19 1985-03-13 Varian Associates Magnetron sputter coating source for both magnetic and nonmagnetic target materials
CN101353781B (en) * 2008-09-22 2010-06-02 河南理工大学 A method for ion-plating a wear-resistant and anti-corrosion alloy on the surface of pure copper

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3869368A (en) * 1967-12-29 1975-03-04 Smiths Industries Ltd Methods of sputter deposition of materials
US3669860A (en) * 1970-04-01 1972-06-13 Zenith Radio Corp Method and apparatus for applying a film to a substrate surface by diode sputtering
CH540995A (en) * 1971-03-22 1973-08-31 Bbc Brown Boveri & Cie Method for applying a protective layer to a body
US4068025A (en) * 1971-03-22 1978-01-10 Brown, Boveri & Company Limited Method of applying a protective coating to a body
FR2129996B1 (en) * 1971-03-25 1975-01-17 Centre Nat Etd Spatiales
US4157465A (en) * 1972-01-10 1979-06-05 Smiths Industries Limited Gas-lubricated bearings
JPS6037188B2 (en) * 1981-08-27 1985-08-24 三菱マテリアル株式会社 sputtering equipment
US4885070A (en) * 1988-02-12 1989-12-05 Leybold Aktiengesellschaft Method and apparatus for the application of materials
US4851095A (en) * 1988-02-08 1989-07-25 Optical Coating Laboratory, Inc. Magnetron sputtering apparatus and process
US5225057A (en) * 1988-02-08 1993-07-06 Optical Coating Laboratory, Inc. Process for depositing optical films on both planar and non-planar substrates
US5618388A (en) * 1988-02-08 1997-04-08 Optical Coating Laboratory, Inc. Geometries and configurations for magnetron sputtering apparatus
US5798027A (en) * 1988-02-08 1998-08-25 Optical Coating Laboratory, Inc. Process for depositing optical thin films on both planar and non-planar substrates
US6669824B2 (en) 2000-07-10 2003-12-30 Unaxis Usa, Inc. Dual-scan thin film processing system
US6495010B2 (en) 2000-07-10 2002-12-17 Unaxis Usa, Inc. Differentially-pumped material processing system
CN101818326B (en) * 2009-02-26 2012-11-21 鸿富锦精密工业（深圳）有限公司 Sputtering device
CN101698934B (en) * 2009-10-23 2011-06-15 武汉大学 Hollow cathode electric arc ion coating plating system
KR20120096788A (en) * 2011-02-23 2012-08-31 삼성전자주식회사 Surface coating method and surface coating device for exterior part product

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2144772A (en) * 1983-07-19 1985-03-13 Varian Associates Magnetron sputter coating source for both magnetic and nonmagnetic target materials
CN101353781B (en) * 2008-09-22 2010-06-02 河南理工大学 A method for ion-plating a wear-resistant and anti-corrosion alloy on the surface of pure copper

Also Published As

Publication number Publication date
US3576729A (en) 1971-04-27

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