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GB1270124A - Apparatus for the relative positioning of two objects by means of a beam of visible radiation - Google Patents

Apparatus for the relative positioning of two objects by means of a beam of visible radiation

Info

Publication number
GB1270124A
GB1270124A GB06046/69A GB1604669A GB1270124A GB 1270124 A GB1270124 A GB 1270124A GB 06046/69 A GB06046/69 A GB 06046/69A GB 1604669 A GB1604669 A GB 1604669A GB 1270124 A GB1270124 A GB 1270124A
Authority
GB
United Kingdom
Prior art keywords
circles
pattern
patterns
pitch
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB06046/69A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1270124A publication Critical patent/GB1270124A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B63—SHIPS OR OTHER WATERBORNE VESSELS; RELATED EQUIPMENT
    • B63H—MARINE PROPULSION OR STEERING
    • B63H25/00—Steering; Slowing-down otherwise than by use of propulsive elements; Dynamic anchoring, i.e. positioning vessels by means of main or auxiliary propulsive elements
    • B63H25/46—Steering or dynamic anchoring by jets or by rudders carrying jets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/80—Arrangements for controlling the ray or beam after passing the main deflection system, e.g. for post-acceleration or post-concentration, for colour switching
    • H01J29/81—Arrangements for controlling the ray or beam after passing the main deflection system, e.g. for post-acceleration or post-concentration, for colour switching using shadow masks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • Ocean & Marine Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

1,270,124. Optical positioning apparatus. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. March 27, 1969 [March 30, 1968], No. 16046/69. Heading G2J. Positioning apparatus comprises two objects on each of which is provided a pattern of concentric equidistant circles which intercept a beam of radiation, the pitch of one pattern being different from the pitch of the other whereby a Moire fringe pattern is produced, the patterns nearly engaging one another. If desired one of the patterns may comprise more than one group of equidistant concentric circles. The spacing between the circles is preferably half of the pitch of the respective pattern. One or both of the patterns, may be marked, e.g. by one of the circles being replaced by a circle which transmits the radiation. Preferably both patterns comprise 200 circles, the width of each circle in one pattern being 40 Ám and in the other 39À6 Ám. The apparatus may be used in the production of the mask for colour television tubes or in machine tool positioning. Reference has been directed by the Comptroller to Specification 1, 174, 781.
GB06046/69A 1968-03-30 1969-03-27 Apparatus for the relative positioning of two objects by means of a beam of visible radiation Expired GB1270124A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6804512A NL6804512A (en) 1968-03-30 1968-03-30

Publications (1)

Publication Number Publication Date
GB1270124A true GB1270124A (en) 1972-04-12

Family

ID=19803190

Family Applications (1)

Application Number Title Priority Date Filing Date
GB06046/69A Expired GB1270124A (en) 1968-03-30 1969-03-27 Apparatus for the relative positioning of two objects by means of a beam of visible radiation

Country Status (6)

Country Link
US (1) US3689162A (en)
BE (1) BE730708A (en)
DE (1) DE1915408A1 (en)
FR (1) FR2005192A1 (en)
GB (1) GB1270124A (en)
NL (1) NL6804512A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2129960A (en) * 1982-10-12 1984-05-23 Trade & Industry Secretary Of Alignment aid
GB2183364A (en) * 1985-11-22 1987-06-03 Gen Electric Plc Alignment using gratings having varying stripe pitch

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4037969A (en) * 1976-04-02 1977-07-26 Bell Telephone Laboratories, Incorporated Zone plate alignment marks
US5288729A (en) * 1989-10-07 1994-02-22 Kabushiki Kaisha Toshiba Exposing method and apparatus
US5052807A (en) * 1990-06-28 1991-10-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Three dimensional moire pattern alignment
KR960011399B1 (en) * 1991-04-03 1996-08-22 샤프 가부시끼가이샤 Apparatus for assembling an optical device
KR0124058B1 (en) * 1993-12-22 1997-11-24 Korea Telecommunication Measuring device and method of 2-dimension microscope displacement by using moire appearance
US5613013A (en) * 1994-05-13 1997-03-18 Reticula Corporation Glass patterns in image alignment and analysis
US5805290A (en) * 1996-05-02 1998-09-08 International Business Machines Corporation Method of optical metrology of unresolved pattern arrays
US5731877A (en) * 1996-10-08 1998-03-24 International Business Machines Corporation Automated system utilizing self-labeled target by pitch encoding
US5965309A (en) * 1997-08-28 1999-10-12 International Business Machines Corporation Focus or exposure dose parameter control system using tone reversing patterns
US5953128A (en) * 1997-08-28 1999-09-14 International Business Machines Corporation Optically measurable serpentine edge tone reversed targets
US5976740A (en) * 1997-08-28 1999-11-02 International Business Machines Corporation Process for controlling exposure dose or focus parameters using tone reversing pattern
US5914784A (en) * 1997-09-30 1999-06-22 International Business Machines Corporation Measurement method for linewidth metrology
US6128089A (en) * 1998-07-28 2000-10-03 International Business Machines Corporation Combined segmented and nonsegmented bar-in-bar targets
US6137578A (en) * 1998-07-28 2000-10-24 International Business Machines Corporation Segmented bar-in-bar target
US6660997B2 (en) 2001-04-26 2003-12-09 Creo Srl Absolute position Moiré type encoder for use in a control system
DE102005016231B4 (en) * 2005-04-06 2010-09-16 Jenoptik Laser, Optik, Systeme Gmbh Optical system and method of manufacturing a composite element of transparent plate-shaped substrates provided with micro-optical structures

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2129960A (en) * 1982-10-12 1984-05-23 Trade & Industry Secretary Of Alignment aid
GB2183364A (en) * 1985-11-22 1987-06-03 Gen Electric Plc Alignment using gratings having varying stripe pitch
GB2183364B (en) * 1985-11-22 1989-10-04 Gen Electric Plc Alignment using gratings having varying stripe pitch

Also Published As

Publication number Publication date
DE1915408A1 (en) 1969-11-06
FR2005192A1 (en) 1969-12-05
BE730708A (en) 1969-09-29
US3689162A (en) 1972-09-05
NL6804512A (en) 1969-10-02

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