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GB1139608A - Plasma generator - Google Patents

Plasma generator

Info

Publication number
GB1139608A
GB1139608A GB45619/66A GB4561966A GB1139608A GB 1139608 A GB1139608 A GB 1139608A GB 45619/66 A GB45619/66 A GB 45619/66A GB 4561966 A GB4561966 A GB 4561966A GB 1139608 A GB1139608 A GB 1139608A
Authority
GB
United Kingdom
Prior art keywords
generator
electrodes
switch
gas
arc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB45619/66A
Inventor
Denis Cleaver
Peter Compton Macdonald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
British Titan Products Co Ltd
British Titan Ltd
Original Assignee
British Titan Products Co Ltd
British Titan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Titan Products Co Ltd, British Titan Ltd filed Critical British Titan Products Co Ltd
Priority to GB45619/66A priority Critical patent/GB1139608A/en
Priority to US667219A priority patent/US3501675A/en
Priority to NL6713682A priority patent/NL6713682A/xx
Priority to BE705033D priority patent/BE705033A/xx
Priority to FR124297A priority patent/FR1540771A/en
Priority to DE19671589548 priority patent/DE1589548A1/en
Publication of GB1139608A publication Critical patent/GB1139608A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/4645—Radiofrequency discharges
    • H05H1/4652—Radiofrequency discharges using inductive coupling means, e.g. coils
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/47—Generating plasma using corona discharges
    • H05H1/471—Pointed electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)

Abstract

1,139,608. Induction plasma generator. BRITISH TITAN PRODUCTS CO. Ltd. 6 Sept., 1967 [12 Oct., 1966], No. 45619/66. Heading H5H. Induction plasma apparatus comprises a gas confining tube 1 surrounded by a water-cooled copper coil 2 connected to an oscillating generator and withdrawable carbon electrodes 7, 8 connected through a switch 5 to the terminals 3, 4 of the generator. Switch 5 is closed and the generator produces an arc between the electrodes. The electrodes are slowly withdrawn and the generator power increased. Switch 5 is opened to break the arc and the plasma is formed. The electrodes are completely withdrawn by a motor connected to a cable 9 and a brass rod 13. When electrode 7 is removed, the aperture in the brass gas distribution head 11 is closed by a spring-loaded flop 10. The generator frequency is less than 1 megacycle/sec. The gas may be argon, neon, krypton. Tube 1 is silica or of conducting material as in Specification 1,061,956. The electrode may be supplied from a separate D.C. source.
GB45619/66A 1966-10-12 1966-10-12 Plasma generator Expired GB1139608A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB45619/66A GB1139608A (en) 1966-10-12 1966-10-12 Plasma generator
US667219A US3501675A (en) 1966-10-12 1967-09-12 Initiation process
NL6713682A NL6713682A (en) 1966-10-12 1967-10-09
BE705033D BE705033A (en) 1966-10-12 1967-10-12
FR124297A FR1540771A (en) 1966-10-12 1967-10-12 Method and apparatus for generating plasma by induction
DE19671589548 DE1589548A1 (en) 1966-10-12 1967-10-12 Process for initiating the formation of a hot plasma in a gas containing plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB45619/66A GB1139608A (en) 1966-10-12 1966-10-12 Plasma generator

Publications (1)

Publication Number Publication Date
GB1139608A true GB1139608A (en) 1969-01-08

Family

ID=10437912

Family Applications (1)

Application Number Title Priority Date Filing Date
GB45619/66A Expired GB1139608A (en) 1966-10-12 1966-10-12 Plasma generator

Country Status (5)

Country Link
US (1) US3501675A (en)
BE (1) BE705033A (en)
DE (1) DE1589548A1 (en)
GB (1) GB1139608A (en)
NL (1) NL6713682A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115603109A (en) * 2022-10-09 2023-01-13 无锡东洋电器有限公司（Cn） A modular ion generator with detachable electrodes

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT318768B (en) * 1972-09-08 1974-11-11 Boehler & Co Ag Geb Method and device for igniting a high-frequency plasma torch
JPS5329076A (en) * 1976-08-31 1978-03-17 Toshiba Corp Plasma treating apparatus of semiconductor substrates
US4306175A (en) * 1980-02-29 1981-12-15 Instrumentation Laboratory Inc. Induction plasma system
GB2296369A (en) * 1994-12-22 1996-06-26 Secr Defence Radio frequency ion source
DE102004054826A1 (en) * 2004-11-12 2006-05-24 Georg Herdrich Inductive plasma generator for space reentry simulation has plasma generating tube surrounded by magnetic coil and cooler with branched holding flanges and O rings
WO2022263055A1 (en) * 2021-06-18 2022-12-22 Thermo Fisher Scientific (Ecublens) Sarl Plasma control for spark optical emission spectroscopy

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1033392A (en) * 1962-06-20 1966-06-22 Atomic Energy Authority Uk Improvements in or relating to induction coupled plasma generators
FR1358425A (en) * 1963-01-22 1964-04-17 Traitements Electrolytiques & High Frequency Plasma Torch Improvement
US3324334A (en) * 1966-03-15 1967-06-06 Massachusetts Inst Technology Induction plasma torch with means for recirculating the plasma

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115603109A (en) * 2022-10-09 2023-01-13 无锡东洋电器有限公司（Cn） A modular ion generator with detachable electrodes
CN115603109B (en) * 2022-10-09 2025-08-15 无锡东洋电器有限公司 Modularized ion generator with detachable electrode

Also Published As

Publication number Publication date
US3501675A (en) 1970-03-17
BE705033A (en) 1968-04-12
DE1589548A1 (en) 1970-03-26
NL6713682A (en) 1968-04-16

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