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GB1138212A - Ion beam generator - Google Patents

Ion beam generator

Info

Publication number
GB1138212A
GB1138212A GB22808/66A GB2280866A GB1138212A GB 1138212 A GB1138212 A GB 1138212A GB 22808/66 A GB22808/66 A GB 22808/66A GB 2280866 A GB2280866 A GB 2280866A GB 1138212 A GB1138212 A GB 1138212A
Authority
GB
United Kingdom
Prior art keywords
laser
ion beam
van
sphere
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB22808/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
US Atomic Energy Commission (AEC)
Original Assignee
US Atomic Energy Commission (AEC)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by US Atomic Energy Commission (AEC) filed Critical US Atomic Energy Commission (AEC)
Publication of GB1138212A publication Critical patent/GB1138212A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/24—Ion sources; Ion guns using photo-ionisation, e.g. using laser beam
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H5/00—Direct voltage accelerators; Accelerators using single pulses
    • H05H5/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H5/00—Direct voltage accelerators; Accelerators using single pulses
    • H05H5/04—Direct voltage accelerators; Accelerators using single pulses energised by electrostatic generators

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)

Abstract

1,138,212. Ion beam tubes. UNITED STATES ATOMIC ENERGY COMMISSION. 23 May, 1966 [16 June, 1965], No. 22808/66. Heading H1D. An ion beam generator, as shown, incorporated in a Van de Graaf accelerator, comprises a body such as a rod, or a wire 53 fed from a spool 54, which is vaporized to form a plasma of ions by subjection to a laser light beam. The laser beam is focused at a point e.g. about <SP>1</SP>/ 4 inch from the tip of the wire 53. The ions are extracted and accelerated by grid electrodes 70, 74 the latter being preferably convex-shaped. A focusing electrode 76 is provided between the source and the main accelerating tube 42. The tube 42 and the Van de Graaf sphere 31 may enclose a common evacuated space in which case tube end 61 is omitted. The target 78 may be within the sphere 38. As shown, the laser beam from the laser 63 is directed into the column 32 through a window 66, is reflected by a prism 67 and enters the accelerating tube end 61 through a lens 68. The ion emitter body may be of Al, C, Cu, Fe, Ni or Ta or may be a pool of liquid, e.g. mercury.
GB22808/66A 1965-06-16 1966-05-23 Ion beam generator Expired GB1138212A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US464589A US3406349A (en) 1965-06-16 1965-06-16 Ion beam generator having laseractivated ion source

Publications (1)

Publication Number Publication Date
GB1138212A true GB1138212A (en) 1968-12-27

Family

ID=23844515

Family Applications (1)

Application Number Title Priority Date Filing Date
GB22808/66A Expired GB1138212A (en) 1965-06-16 1966-05-23 Ion beam generator

Country Status (3)

Country Link
US (1) US3406349A (en)
DE (1) DE1564973A1 (en)
GB (1) GB1138212A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2364979C1 (en) * 2007-11-20 2009-08-20 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт машиностроения" (ФГУП ЦНИИмаш) Method of ions acceleration and device for its realization
US8354652B2 (en) 2006-07-20 2013-01-15 Aviza Technology Limited Ion source including separate support systems for accelerator grids
US8400063B2 (en) 2006-07-20 2013-03-19 Aviza Technology Limited Plasma sources
US8425741B2 (en) 2006-07-20 2013-04-23 Aviza Technology Limited Ion deposition apparatus having rotatable carousel for supporting a plurality of targets

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679897A (en) * 1969-08-28 1972-07-25 Trw Inc Laser bombardment of microparticle beam for producing atomic particles in the form of a beam or an expanding cloud
US3761828A (en) * 1970-12-10 1973-09-25 J Pollard Linear particle accelerator with coast through shield
US3746860A (en) * 1972-02-17 1973-07-17 J Stettler Soft x-ray generator assisted by laser
DE2540505A1 (en) * 1975-09-11 1977-03-24 Leybold Heraeus Gmbh & Co Kg FLIGHT TIME MASS SPECTROMETERS FOR IONS WITH DIFFERENT ENERGIES
GB1582706A (en) * 1976-04-15 1981-01-14 Unisearch Ltd Apparatus and method for separating isotopes
US4166951A (en) * 1977-04-13 1979-09-04 Westinghouse Electric Corp. Isotope enrichment
DE2739829C2 (en) * 1977-09-03 1986-04-10 Gesellschaft für Strahlen- und Umweltforschung mbH, 8000 München Arrangement for analyzing a sample layer by bombarding it with electromagnetic radiation
JPH088160B2 (en) 1987-05-30 1996-01-29 日本真空技術株式会社 Megavolt tandem accelerator
US4987007A (en) * 1988-04-18 1991-01-22 Board Of Regents, The University Of Texas System Method and apparatus for producing a layer of material from a laser ion source
US5411797A (en) * 1988-04-18 1995-05-02 Board Of Regents, The University Of Texas System Nanophase diamond films
JP5801144B2 (en) * 2011-08-30 2015-10-28 株式会社東芝 Ion source
JP5813536B2 (en) * 2012-03-02 2015-11-17 株式会社東芝 Ion source

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1198465B (en) * 1961-10-26 1965-08-12 Atlas Mess Und Analysentechnik Ion source for solid substances
US3360733A (en) * 1964-11-12 1967-12-26 Boeing Co Plasma formation and particle acceleration by pulsed laser

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8354652B2 (en) 2006-07-20 2013-01-15 Aviza Technology Limited Ion source including separate support systems for accelerator grids
US8400063B2 (en) 2006-07-20 2013-03-19 Aviza Technology Limited Plasma sources
US8425741B2 (en) 2006-07-20 2013-04-23 Aviza Technology Limited Ion deposition apparatus having rotatable carousel for supporting a plurality of targets
RU2364979C1 (en) * 2007-11-20 2009-08-20 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт машиностроения" (ФГУП ЦНИИмаш) Method of ions acceleration and device for its realization

Also Published As

Publication number Publication date
US3406349A (en) 1968-10-15
DE1564973A1 (en) 1970-02-26

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