GB1104881A - Improvements in or relating to methods of making thin film electric circuit elements - Google Patents
Improvements in or relating to methods of making thin film electric circuit elementsInfo
- Publication number
- GB1104881A GB1104881A GB36579/64A GB3657964A GB1104881A GB 1104881 A GB1104881 A GB 1104881A GB 36579/64 A GB36579/64 A GB 36579/64A GB 3657964 A GB3657964 A GB 3657964A GB 1104881 A GB1104881 A GB 1104881A
- Authority
- GB
- United Kingdom
- Prior art keywords
- spark
- layer
- depositing
- resistor
- electric circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title abstract 2
- 239000010409 thin film Substances 0.000 title 1
- 238000009760 electrical discharge machining Methods 0.000 abstract 4
- 239000003990 capacitor Substances 0.000 abstract 3
- 238000000151 deposition Methods 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 2
- 239000010445 mica Substances 0.000 abstract 2
- 229910052618 mica group Inorganic materials 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 239000000956 alloy Substances 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 238000004070 electrodeposition Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910001120 nichrome Inorganic materials 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 239000004332 silver Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
- B23H9/06—Marking or engraving
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
1,104,881. Making capacitors and resistors; spark erosion. STANDARD TELEPHONES & CABLES Ltd. 3 Sept., 1965 [7 Sept., 1964] No. 36579/64. Headings B3A and B3V. [Also in Division H1] An electric circuit element such as a resistor or capacitor is made by depositing a metal layer on a substrate and removing part of the layer by spark erosion using a resilient electrode which is oscillated relatively to the layer. The spark erosion apparatus is of the kind described in Specification 1,105,411. In the manufacture of a resistor, Figs. 4-6 (not shown), conductive tracks (41) of gold or copper are provided on a glass substrate (40) by an evaporation process and are then built up by electro-deposition. A resistor pad (44) of Nichrome alloy (Trade Mark) is deposited in vacuum to bridge the tracks and is then spark eroded to give correct resistance. A capacitor, Figs. 7, 8 (not shown), is made by depositing on a substrate (51) upper and lower layers which may be of aluminium separated by a dielectric of silicon dioxide. The upper layer is then spark eroded. A silver-mica condenser, Fig. 8 (not shown), is made by depositing silver (61) on each side of a mica sheet (60) and then spark eroding one of the layers.
Priority Applications (13)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB36578/64A GB1105411A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to apparatus for working conductive materials by electric spark discharges |
| GB36580/64A GB1105412A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to the making of thin film circuit devices |
| GB36579/64A GB1104881A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to methods of making thin film electric circuit elements |
| BR172888/65A BR6572888D0 (en) | 1964-09-07 | 1965-06-06 | APPLIANCE AND METHOD FOR WORKING CONDUCTIVE MATERIALS THROUGH ELECTRIC SPARK |
| SE11489/65A SE336082B (en) | 1964-09-07 | 1965-09-03 | |
| CH1235065A CH445679A (en) | 1964-09-07 | 1965-09-03 | Process for engraving conductive material using electrical spark discharges |
| NL6511616A NL6511616A (en) | 1964-09-07 | 1965-09-06 | |
| BE669273D BE669273A (en) | 1964-09-07 | 1965-09-07 | |
| FR30685A FR1458418A (en) | 1964-09-07 | 1965-09-07 | Method and device for the machining of conductive materials by electrical disruptive discharges |
| GB5164065A GB1107941A (en) | 1964-09-07 | 1965-12-06 | Improvements in or relating to an apparatus and a method for working conductive material by electric spark discharge |
| CH1733366A CH467646A (en) | 1964-09-07 | 1966-12-05 | Device for engraving conductive material by means of electrical spark discharges |
| FR86295A FR93462E (en) | 1964-09-07 | 1966-12-06 | Method and device for the machining of conductive materials by electrical disruptive discharges. |
| NL6617159A NL6617159A (en) | 1964-09-07 | 1966-12-06 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB36579/64A GB1104881A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to methods of making thin film electric circuit elements |
| GB36580/64A GB1105412A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to the making of thin film circuit devices |
| GB36578/64A GB1105411A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to apparatus for working conductive materials by electric spark discharges |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1104881A true GB1104881A (en) | 1968-03-06 |
Family
ID=27259378
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB36580/64A Expired GB1105412A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to the making of thin film circuit devices |
| GB36578/64A Expired GB1105411A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to apparatus for working conductive materials by electric spark discharges |
| GB36579/64A Expired GB1104881A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to methods of making thin film electric circuit elements |
Family Applications Before (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB36580/64A Expired GB1105412A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to the making of thin film circuit devices |
| GB36578/64A Expired GB1105411A (en) | 1964-09-07 | 1964-09-07 | Improvements in or relating to apparatus for working conductive materials by electric spark discharges |
Country Status (7)
| Country | Link |
|---|---|
| BE (1) | BE669273A (en) |
| BR (1) | BR6572888D0 (en) |
| CH (1) | CH445679A (en) |
| FR (1) | FR1458418A (en) |
| GB (3) | GB1105412A (en) |
| NL (1) | NL6511616A (en) |
| SE (1) | SE336082B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8319277B2 (en) | 2006-12-20 | 2012-11-27 | Fujitsu Limited | Semiconductor device, method of manufacturing same, and apparatus for designing same |
| CN113579377A (en) * | 2021-06-11 | 2021-11-02 | 淮阴工学院 | Stepped blade double-loop nesting electrochemical machining device and method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56163832A (en) | 1980-05-15 | 1981-12-16 | Inoue Japax Res Inc | Electric machining device |
| DE9409413U1 (en) * | 1994-06-13 | 1994-09-29 | Oblf, Gesellschaft für Elektronik und Feinwerktechnik mbH, 58454 Witten | Device for marking metallic samples |
-
1964
- 1964-09-07 GB GB36580/64A patent/GB1105412A/en not_active Expired
- 1964-09-07 GB GB36578/64A patent/GB1105411A/en not_active Expired
- 1964-09-07 GB GB36579/64A patent/GB1104881A/en not_active Expired
-
1965
- 1965-06-06 BR BR172888/65A patent/BR6572888D0/en unknown
- 1965-09-03 CH CH1235065A patent/CH445679A/en unknown
- 1965-09-03 SE SE11489/65A patent/SE336082B/xx unknown
- 1965-09-06 NL NL6511616A patent/NL6511616A/xx unknown
- 1965-09-07 BE BE669273D patent/BE669273A/xx unknown
- 1965-09-07 FR FR30685A patent/FR1458418A/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8319277B2 (en) | 2006-12-20 | 2012-11-27 | Fujitsu Limited | Semiconductor device, method of manufacturing same, and apparatus for designing same |
| CN113579377A (en) * | 2021-06-11 | 2021-11-02 | 淮阴工学院 | Stepped blade double-loop nesting electrochemical machining device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1105412A (en) | 1968-03-06 |
| GB1105411A (en) | 1968-03-06 |
| BE669273A (en) | 1966-03-07 |
| BR6572888D0 (en) | 1973-09-18 |
| FR1458418A (en) | 1966-11-10 |
| NL6511616A (en) | 1966-03-08 |
| SE336082B (en) | 1971-06-21 |
| CH445679A (en) | 1967-10-31 |
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