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GB1141594A - Improved high vacuum electron beam apparatus and method of operating same - Google Patents

Improved high vacuum electron beam apparatus and method of operating same

Info

Publication number
GB1141594A
GB1141594A GB22233/66A GB2223366A GB1141594A GB 1141594 A GB1141594 A GB 1141594A GB 22233/66 A GB22233/66 A GB 22233/66A GB 2223366 A GB2223366 A GB 2223366A GB 1141594 A GB1141594 A GB 1141594A
Authority
GB
United Kingdom
Prior art keywords
electron beam
coils
plane
beams
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB22233/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airco Inc
Original Assignee
Air Reduction Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Reduction Co Inc filed Critical Air Reduction Co Inc
Publication of GB1141594A publication Critical patent/GB1141594A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Detergent Compositions (AREA)

Abstract

1,141,594. Electron beam furnaces. AIR REDUCTION CO. Ltd. 19 May, 1966 [11 June, 1965], No. 22233/66. Heading H1D. In an electron beam furnace a plurality of electron beams are first deflected laterally by a plurality of individually controllable magnetic fields and then transversely to the first direction of deflection by a magnetic field common to all the beams. As shown ribbonshaped beams generated by a plurality of guns 14 are focused by a coil 21 to pass through a plurality of slits 22, 23. Magnetic core members, 40 42, 44 having separately energized coils on side limbs (not shown) provide the first set of deflection fields (parallel to the plane of the paper). The core members may be provided with cooling coils. The common magnetic field (perpendicular to the plane of the paper) is set up by a rectangular core having separately energized coils on its side limbs 58, 62 and triangular top and bottom plates 70. The plates 70 are triangularly shaped so as to concentrate the magnetic flux in the central plane of the rectangular core. By suitable adjustment of the currents through the various coils the impact pattern on the heated material 26 may be varied and, if desired, in a cyclically repetitive manner.
GB22233/66A 1965-06-11 1966-05-19 Improved high vacuum electron beam apparatus and method of operating same Expired GB1141594A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US463190A US3394217A (en) 1965-06-11 1965-06-11 Method and apparatus for controlling plural electron beams

Publications (1)

Publication Number Publication Date
GB1141594A true GB1141594A (en) 1969-01-29

Family

ID=23839207

Family Applications (1)

Application Number Title Priority Date Filing Date
GB22233/66A Expired GB1141594A (en) 1965-06-11 1966-05-19 Improved high vacuum electron beam apparatus and method of operating same

Country Status (11)

Country Link
US (1) US3394217A (en)
AT (1) AT278187B (en)
BE (1) BE681839A (en)
CH (1) CH452731A (en)
DE (1) DE1565881B2 (en)
DK (1) DK117649B (en)
GB (1) GB1141594A (en)
LU (1) LU51261A1 (en)
NL (1) NL6608065A (en)
NO (1) NO117547B (en)
SE (1) SE346196B (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475542A (en) * 1967-09-13 1969-10-28 Air Reduction Apparatus for heating a target in an electron beam furnace
US3535428A (en) * 1968-07-17 1970-10-20 Air Reduction Apparatus for producing and directing an electron beam
FR2244014B1 (en) * 1973-09-17 1976-10-08 Bosch Gmbh Robert
IT1037702B (en) * 1975-04-29 1979-11-20 Varian Associates ELECTRONIC BEAM HEATING AND EVAPORATION EQUIPMENT
US3999097A (en) * 1975-06-30 1976-12-21 International Business Machines Corporation Ion implantation apparatus utilizing multiple aperture source plate and single aperture accel-decel system
SU782571A1 (en) * 1976-05-12 1983-09-23 Институт ядерной физики СО АН СССР Method for radiation treatment of round-section products
DD204947A1 (en) * 1982-04-20 1983-12-14 Manfred Neumann EQUIPMENT FOR ELECTRON RADIATION STEAMING BROADER
WO1991013458A1 (en) * 1990-03-02 1991-09-05 Varian Associates, Inc. Charge neutralization apparatus for ion implantation system
US5136171A (en) * 1990-03-02 1992-08-04 Varian Associates, Inc. Charge neutralization apparatus for ion implantation system
JP3275166B2 (en) * 1997-02-28 2002-04-15 住友重機械工業株式会社 Vacuum deposition system with plasma beam bias correction mechanism
US6476340B1 (en) 1999-04-14 2002-11-05 The Boc Group, Inc. Electron beam gun with grounded shield to prevent arc-down and gas bleed to protect the filament

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US3105275A (en) * 1960-05-27 1963-10-01 Stauffer Chemical Co Electron-beam furnace with double-coil magnetic beam guidance
FR1374335A (en) * 1962-12-13 1964-10-09 Electronique & Physique Device for manufacturing a blade of high purity material

Also Published As

Publication number Publication date
NO117547B (en) 1969-08-25
NL6608065A (en) 1966-12-12
SE346196B (en) 1972-06-26
BE681839A (en) 1966-10-31
AT278187B (en) 1970-01-26
DE1565881A1 (en) 1970-03-19
CH452731A (en) 1968-03-15
DE1565881B2 (en) 1971-01-21
US3394217A (en) 1968-07-23
LU51261A1 (en) 1966-08-16
DK117649B (en) 1970-05-19

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