GB1141594A - Improved high vacuum electron beam apparatus and method of operating same - Google Patents
Improved high vacuum electron beam apparatus and method of operating sameInfo
- Publication number
- GB1141594A GB1141594A GB22233/66A GB2223366A GB1141594A GB 1141594 A GB1141594 A GB 1141594A GB 22233/66 A GB22233/66 A GB 22233/66A GB 2223366 A GB2223366 A GB 2223366A GB 1141594 A GB1141594 A GB 1141594A
- Authority
- GB
- United Kingdom
- Prior art keywords
- electron beam
- coils
- plane
- beams
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 title abstract 4
- 238000000034 method Methods 0.000 title 1
- 239000012141 concentrate Substances 0.000 abstract 1
- 238000001816 cooling Methods 0.000 abstract 1
- 230000004907 flux Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 230000003252 repetitive effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Detergent Compositions (AREA)
Abstract
1,141,594. Electron beam furnaces. AIR REDUCTION CO. Ltd. 19 May, 1966 [11 June, 1965], No. 22233/66. Heading H1D. In an electron beam furnace a plurality of electron beams are first deflected laterally by a plurality of individually controllable magnetic fields and then transversely to the first direction of deflection by a magnetic field common to all the beams. As shown ribbonshaped beams generated by a plurality of guns 14 are focused by a coil 21 to pass through a plurality of slits 22, 23. Magnetic core members, 40 42, 44 having separately energized coils on side limbs (not shown) provide the first set of deflection fields (parallel to the plane of the paper). The core members may be provided with cooling coils. The common magnetic field (perpendicular to the plane of the paper) is set up by a rectangular core having separately energized coils on its side limbs 58, 62 and triangular top and bottom plates 70. The plates 70 are triangularly shaped so as to concentrate the magnetic flux in the central plane of the rectangular core. By suitable adjustment of the currents through the various coils the impact pattern on the heated material 26 may be varied and, if desired, in a cyclically repetitive manner.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US463190A US3394217A (en) | 1965-06-11 | 1965-06-11 | Method and apparatus for controlling plural electron beams |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1141594A true GB1141594A (en) | 1969-01-29 |
Family
ID=23839207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB22233/66A Expired GB1141594A (en) | 1965-06-11 | 1966-05-19 | Improved high vacuum electron beam apparatus and method of operating same |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US3394217A (en) |
| AT (1) | AT278187B (en) |
| BE (1) | BE681839A (en) |
| CH (1) | CH452731A (en) |
| DE (1) | DE1565881B2 (en) |
| DK (1) | DK117649B (en) |
| GB (1) | GB1141594A (en) |
| LU (1) | LU51261A1 (en) |
| NL (1) | NL6608065A (en) |
| NO (1) | NO117547B (en) |
| SE (1) | SE346196B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3475542A (en) * | 1967-09-13 | 1969-10-28 | Air Reduction | Apparatus for heating a target in an electron beam furnace |
| US3535428A (en) * | 1968-07-17 | 1970-10-20 | Air Reduction | Apparatus for producing and directing an electron beam |
| FR2244014B1 (en) * | 1973-09-17 | 1976-10-08 | Bosch Gmbh Robert | |
| IT1037702B (en) * | 1975-04-29 | 1979-11-20 | Varian Associates | ELECTRONIC BEAM HEATING AND EVAPORATION EQUIPMENT |
| US3999097A (en) * | 1975-06-30 | 1976-12-21 | International Business Machines Corporation | Ion implantation apparatus utilizing multiple aperture source plate and single aperture accel-decel system |
| SU782571A1 (en) * | 1976-05-12 | 1983-09-23 | Институт ядерной физики СО АН СССР | Method for radiation treatment of round-section products |
| DD204947A1 (en) * | 1982-04-20 | 1983-12-14 | Manfred Neumann | EQUIPMENT FOR ELECTRON RADIATION STEAMING BROADER |
| WO1991013458A1 (en) * | 1990-03-02 | 1991-09-05 | Varian Associates, Inc. | Charge neutralization apparatus for ion implantation system |
| US5136171A (en) * | 1990-03-02 | 1992-08-04 | Varian Associates, Inc. | Charge neutralization apparatus for ion implantation system |
| JP3275166B2 (en) * | 1997-02-28 | 2002-04-15 | 住友重機械工業株式会社 | Vacuum deposition system with plasma beam bias correction mechanism |
| US6476340B1 (en) | 1999-04-14 | 2002-11-05 | The Boc Group, Inc. | Electron beam gun with grounded shield to prevent arc-down and gas bleed to protect the filament |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3046936A (en) * | 1958-06-04 | 1962-07-31 | Nat Res Corp | Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof |
| US3105275A (en) * | 1960-05-27 | 1963-10-01 | Stauffer Chemical Co | Electron-beam furnace with double-coil magnetic beam guidance |
| FR1374335A (en) * | 1962-12-13 | 1964-10-09 | Electronique & Physique | Device for manufacturing a blade of high purity material |
-
1965
- 1965-06-11 US US463190A patent/US3394217A/en not_active Expired - Lifetime
-
1966
- 1966-05-19 GB GB22233/66A patent/GB1141594A/en not_active Expired
- 1966-05-31 BE BE681839D patent/BE681839A/xx unknown
- 1966-06-03 AT AT527966A patent/AT278187B/en active
- 1966-06-06 LU LU51261A patent/LU51261A1/xx unknown
- 1966-06-08 NO NO163344A patent/NO117547B/no unknown
- 1966-06-09 CH CH830066A patent/CH452731A/en unknown
- 1966-06-10 NL NL6608065A patent/NL6608065A/xx unknown
- 1966-06-10 SE SE7971/66A patent/SE346196B/xx unknown
- 1966-06-10 DK DK299966AA patent/DK117649B/en unknown
- 1966-06-10 DE DE19661565881 patent/DE1565881B2/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| NO117547B (en) | 1969-08-25 |
| NL6608065A (en) | 1966-12-12 |
| SE346196B (en) | 1972-06-26 |
| BE681839A (en) | 1966-10-31 |
| AT278187B (en) | 1970-01-26 |
| DE1565881A1 (en) | 1970-03-19 |
| CH452731A (en) | 1968-03-15 |
| DE1565881B2 (en) | 1971-01-21 |
| US3394217A (en) | 1968-07-23 |
| LU51261A1 (en) | 1966-08-16 |
| DK117649B (en) | 1970-05-19 |
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