GB1026338A - Semiconductor strain-gauge - Google Patents
Semiconductor strain-gaugeInfo
- Publication number
- GB1026338A GB1026338A GB1258163A GB1258163A GB1026338A GB 1026338 A GB1026338 A GB 1026338A GB 1258163 A GB1258163 A GB 1258163A GB 1258163 A GB1258163 A GB 1258163A GB 1026338 A GB1026338 A GB 1026338A
- Authority
- GB
- United Kingdom
- Prior art keywords
- indium
- wafer
- strain gauge
- resistivity
- march
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 229910052738 indium Inorganic materials 0.000 abstract 7
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 abstract 7
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 230000000873 masking effect Effects 0.000 abstract 1
- 239000000155 melt Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Abstract
1,026,338. Semi-conductor strain gauges. STANDARD TELEPHONES & CABLES Ltd. March 25, 1964 [March 29, 1963], No. 12581/63. Heading H1K. A strain gauge comprises a body of singlecrystal silicon doped with indium. As shown, a strain gauge is manufactured by evaporating a layer of indium on to the major faces of a wafer of monocrystalline silicon, heating to diffuse-in the indium, and then masking and etching the surfaces to produce a narrow resistive strip (shown cross-hatched) containing indium on both major faces of the wafer. Contacts 1, 2, 4, 5 are made to the ends of the resistive strips and a contact 3 is made to the bulk of the wafer. The strain gauge is connected in a bridge circuit, Fig. 6 (not shown). The indium doped layer may also be produced by epitaxial deposition, and the Specification also states that slices cut from a crystal drawn from a melt containing indium may be used as strain gauges. It is stated that in silicon containing indium and having a resistivity in the range 0À001 to 100 ohm/cm., the resistivity is substantially invariable with temperature over the range 0‹ C. to 100‹ C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1258163A GB1026338A (en) | 1963-03-29 | 1963-03-29 | Semiconductor strain-gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1258163A GB1026338A (en) | 1963-03-29 | 1963-03-29 | Semiconductor strain-gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1026338A true GB1026338A (en) | 1966-04-20 |
Family
ID=10007271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1258163A Expired GB1026338A (en) | 1963-03-29 | 1963-03-29 | Semiconductor strain-gauge |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB1026338A (en) |
-
1963
- 1963-03-29 GB GB1258163A patent/GB1026338A/en not_active Expired
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