GB1024530A - Improvements in or relating to corpuscular ray instruments - Google Patents
Improvements in or relating to corpuscular ray instrumentsInfo
- Publication number
- GB1024530A GB1024530A GB5283/65A GB528365A GB1024530A GB 1024530 A GB1024530 A GB 1024530A GB 5283/65 A GB5283/65 A GB 5283/65A GB 528365 A GB528365 A GB 528365A GB 1024530 A GB1024530 A GB 1024530A
- Authority
- GB
- United Kingdom
- Prior art keywords
- adjusting plate
- object carrier
- tiltable
- axis
- corpuscular ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Mechanical Pencils And Projecting And Retracting Systems Therefor, And Multi-System Writing Instruments (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
1,024,530. Electron microscopes. SIEMENS & HALSKE A.G. Feb. 8, 1965 [June 30, 1964], No. 5283/65. Heading H1D. A tilting device for objects which are to be investigated and/or worked on in a corpuscular ray instrument, e.g. an electron microscope, in which the objects are arranged on a tiltable object carrier, has a tiltable adjusting plate provided at a distance from the object carrier preferably in the direction of the corpuscular ray axis tiltable about an axis which is at right angles to the ray axis, and parallel guides provided between the adjusting plate and the object carrier for transferring each tilting position of the adjusting plate to the object carrier. The adjusting plate is held in a Cardanic suspension comprising a gimbal ring and is tiltable about two axes which are at right angles, the guides being guide rods which extend resiliently through recesses in a cartridge part provided between the object carrier and the adjusting plate, one end of the rods holding the object carrier, whilst their other end slide on a sliding surface on the adjusting plate.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES91781A DE1235456B (en) | 1964-06-30 | 1964-06-30 | Tilting device for objects to be examined and / or processed in a particle beam device, in particular an electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1024530A true GB1024530A (en) | 1966-03-30 |
Family
ID=7516744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5283/65A Expired GB1024530A (en) | 1964-06-30 | 1965-02-08 | Improvements in or relating to corpuscular ray instruments |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US3444367A (en) |
| DE (1) | DE1235456B (en) |
| GB (1) | GB1024530A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3952203A (en) * | 1972-07-21 | 1976-04-20 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. | Object adjustment device for a charged particle beam apparatus |
| CZ309523B6 (en) * | 2020-08-27 | 2023-03-22 | Tescan Brno, S.R.O. | Handling table tilting element |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3240934A (en) * | 1962-02-14 | 1966-03-15 | Jeol Ltd | Specimen holding device with means to tilt, rotate and shift the specimen |
| US3230365A (en) * | 1962-02-21 | 1966-01-18 | Jeol Ltd | Tiltable specimen holding device for electron beam apparatus |
-
1964
- 1964-06-30 DE DES91781A patent/DE1235456B/en active Pending
-
1965
- 1965-02-08 GB GB5283/65A patent/GB1024530A/en not_active Expired
- 1965-06-29 US US468080A patent/US3444367A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE1235456B (en) | 1967-03-02 |
| US3444367A (en) | 1969-05-13 |
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