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GB1098182A - Electrolyte or electroless plating process - Google Patents

Electrolyte or electroless plating process

Info

Publication number
GB1098182A
GB1098182A GB5104163A GB5104163A GB1098182A GB 1098182 A GB1098182 A GB 1098182A GB 5104163 A GB5104163 A GB 5104163A GB 5104163 A GB5104163 A GB 5104163A GB 1098182 A GB1098182 A GB 1098182A
Authority
GB
United Kingdom
Prior art keywords
mask
workpiece
copper
metal
backing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5104163A
Inventor
Jean Paul Lenoble
Bruce Paul Piggin
Anton Max Setzer
Eric Vaughan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to GB5104163A priority Critical patent/GB1098182A/en
Priority to DE19641521306 priority patent/DE1521306B2/en
Priority to NL6415051A priority patent/NL6415051A/xx
Publication of GB1098182A publication Critical patent/GB1098182A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/07Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process being removed electrolytically
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1603Process or apparatus coating on selected surface areas
    • C23C18/1605Process or apparatus coating on selected surface areas by masking
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02Electroplating of selected surface areas
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • C25F3/02Etching
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • C25F3/02Etching
    • C25F3/14Etching locally
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0002Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/241Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/243Reinforcing the conductive pattern characterised by selective plating, e.g. for finish plating of pads
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0364Conductor shape
    • H05K2201/0367Metallic bump or raised conductor not used as solder bump
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09654Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/09736Varying thickness of a single conductor; Conductors in the same plane having different thicknesses
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09654Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/098Special shape of the cross-section of conductors, e.g. very thick plated conductors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01Tools for processing; Objects used during processing
    • H05K2203/0104Tools for processing; Objects used during processing for patterning or coating
    • H05K2203/0117Pattern shaped electrode used for patterning, e.g. plating or etching
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0548Masks
    • H05K2203/0557Non-printed masks
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15Position of the PCB during processing
    • H05K2203/1545Continuous processing, i.e. involving rolls moving a band-like or solid carrier along a continuous production path
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/108Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4007Surface contacts, e.g. bumps
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4647Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits by applying an insulating layer around previously made via studs

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Electrochemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

Metal is deposited locally on a workpiece by electrolytic or electroless action by using an insulating mask having one or more openings in <PICT:1098182/C6-C7/1> contact with the workpiece and a porous backing member engaging the surface of the mask remote from the workpiece, a solution for effecting the deposition being present in the backing member and one or more of the openings in the mask. The mask may be formed by a photographic technique using a photo-sensitive resist or sensitized polyvinyl alcohol or nylon and may be adhered to a porous metallic backing. Alternatively a plastics sheet may be coated on to the backing and the masking openings formed in the sheet by mechanical scribing or by an electron or laser beam, or a punched plastic sheet may be secured to the metal backing. The workpiece and mask may be pressed together by flexible pressure bags. In one arrangement, a workpiece sandwiched between two masks is placed inside a bag 46 of rubber or plastic secured to a frame 45 and supported within a pressure applying vessel 40 which also contains a heater 50 and ultrasonic generators 48, 49. If desired the surface of the support member adjacent the mask may be channelled and connected to a supply pipe to allow for forced circulation of an electro-plating electrolyte to which additions may be made externally of the plating chamber. By passing successively different plating and intermediate washing solutions, successive different metal deposits may be provided, e.g. copper followed by gold. In another arrangement the workpiece and mask are held by a pressure bag against a rigid grid on the far side of which is disposed a soluble metal anode. The anode may be bagged or surrounded by a wad of glass fibre in a plastics net. For electro-depositing copper on a copper coated insulator an acid sulphate solution containing potash alum may be used. The copper coating in the unplated area may be removed by treating with acidified dichromate or ferric chloride solution. If the electrodeposited metal is tin-lead alloy from a fluoborate bath or gold the unplated copper coating may be removed with ammonium persulphate or ferric chloride solution respectively. Electroless plating with copper may be effected directly on to an insulating workpiece which has been sensitized by dipping successively in stannous chloride and palladium chloride solutions followed by washing. For printed circuit production conductors of different cross-sections may be deposited by employing a mask having openings of complementary profile. The spaces between the deposited metal may be filled with epoxy resin, cured, ground and polished to provide conducting pins flush with the resin surface and a uniform metal coating may be applied thereover. By so treating both faces of a workpiece a coil or multiple plate capacitor may be formed or connections extending through an insulator produced. In an arrangement for forming an electro-plated printed circuit, a copper coated insulating strip is fed around a porous cylinder bearing an insulating mask and partially immersed in an electrolytic bath, an endless moving belt conveyer holding the copper surface of the strip, to which cathodic connection is made by a roller, against the mask.
GB5104163A 1963-12-27 1963-12-27 Electrolyte or electroless plating process Expired GB1098182A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB5104163A GB1098182A (en) 1963-12-27 1963-12-27 Electrolyte or electroless plating process
DE19641521306 DE1521306B2 (en) 1963-12-27 1964-12-19 METHOD FOR ELECTROLYTIC OR CHEMICAL APPLICATION OF ELECTRIC CABLE LINES
NL6415051A NL6415051A (en) 1963-12-27 1964-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5104163A GB1098182A (en) 1963-12-27 1963-12-27 Electrolyte or electroless plating process

Publications (1)

Publication Number Publication Date
GB1098182A true GB1098182A (en) 1968-01-10

Family

ID=10458406

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5104163A Expired GB1098182A (en) 1963-12-27 1963-12-27 Electrolyte or electroless plating process

Country Status (3)

Country Link
DE (1) DE1521306B2 (en)
GB (1) GB1098182A (en)
NL (1) NL6415051A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3819502A (en) * 1971-05-25 1974-06-25 Meco Metal Finishing Eng Nv Line- and spotplating machine
US4007097A (en) * 1973-10-04 1977-02-08 Galentan A.G. Process for selectively applying a metal coating to the metallic parts of elements which pass through an insulator
US4014773A (en) * 1974-07-31 1977-03-29 Daiichi Denshi Kogyo Kabushiki Kaisha Apparatus for electrolytic treatment
US4358349A (en) * 1979-05-24 1982-11-09 Matsushita Electric Works, Ltd. Method of forming electrical wiring path on insulative substrate
US4374004A (en) * 1981-06-29 1983-02-15 Northern Telecom Limited Method and apparatus for surface-treating predetermined areas of a surface of a body
US4605483A (en) * 1984-11-06 1986-08-12 Michaelson Henry W Electrode for electro-plating non-continuously conductive surfaces
EP0166105A3 (en) * 1984-06-27 1987-07-15 Nippon Mektron, Ltd. Flexible board and process for making it
US7790009B2 (en) 2001-06-15 2010-09-07 Replisaurus Technologies Ab Method and electrode for defining and replicating structures in conducting materials
CN102400115A (en) * 2011-10-20 2012-04-04 复旦大学 A method for preparing a flexible copper electrode pattern with a micron-scale line width
EP3461934A1 (en) * 2017-09-28 2019-04-03 Toyota Jidosha Kabushiki Kaisha Film forming method for metal film and film forming apparatus for metal film

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5267961A (en) * 1975-12-03 1977-06-06 Mitsubishi Electric Corp Electrode formation of semiconductor unit

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3819502A (en) * 1971-05-25 1974-06-25 Meco Metal Finishing Eng Nv Line- and spotplating machine
US4007097A (en) * 1973-10-04 1977-02-08 Galentan A.G. Process for selectively applying a metal coating to the metallic parts of elements which pass through an insulator
US4014773A (en) * 1974-07-31 1977-03-29 Daiichi Denshi Kogyo Kabushiki Kaisha Apparatus for electrolytic treatment
US4358349A (en) * 1979-05-24 1982-11-09 Matsushita Electric Works, Ltd. Method of forming electrical wiring path on insulative substrate
US4374004A (en) * 1981-06-29 1983-02-15 Northern Telecom Limited Method and apparatus for surface-treating predetermined areas of a surface of a body
EP0166105A3 (en) * 1984-06-27 1987-07-15 Nippon Mektron, Ltd. Flexible board and process for making it
US4605483A (en) * 1984-11-06 1986-08-12 Michaelson Henry W Electrode for electro-plating non-continuously conductive surfaces
US7790009B2 (en) 2001-06-15 2010-09-07 Replisaurus Technologies Ab Method and electrode for defining and replicating structures in conducting materials
CN102400115A (en) * 2011-10-20 2012-04-04 复旦大学 A method for preparing a flexible copper electrode pattern with a micron-scale line width
CN102400115B (en) * 2011-10-20 2014-04-02 复旦大学 Preparation method of flexible copper electrode pattern in micron level wire width
EP3461934A1 (en) * 2017-09-28 2019-04-03 Toyota Jidosha Kabushiki Kaisha Film forming method for metal film and film forming apparatus for metal film
CN109576746A (en) * 2017-09-28 2019-04-05 丰田自动车株式会社 The film build method of metal envelope and the film formation device of metal envelope
US11035049B2 (en) 2017-09-28 2021-06-15 Toyota Jidosha Kabushiki Kaisha Film forming method for metal film and film forming apparatus for metal film

Also Published As

Publication number Publication date
DE1521306B2 (en) 1971-05-06
NL6415051A (en) 1965-06-28
DE1521306A1 (en) 1969-11-06

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