GB1083248A - Improvements in or relating to zone melting - Google Patents
Improvements in or relating to zone meltingInfo
- Publication number
- GB1083248A GB1083248A GB18794/66A GB1879466A GB1083248A GB 1083248 A GB1083248 A GB 1083248A GB 18794/66 A GB18794/66 A GB 18794/66A GB 1879466 A GB1879466 A GB 1879466A GB 1083248 A GB1083248 A GB 1083248A
- Authority
- GB
- United Kingdom
- Prior art keywords
- side wall
- plate
- heating means
- slit
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004857 zone melting Methods 0.000 title abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 5
- 230000006698 induction Effects 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910000831 Steel Inorganic materials 0.000 abstract 1
- 239000003990 capacitor Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000003921 oil Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000010959 steel Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/32—Mechanisms for moving either the charge or the heater
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
- H05B6/22—Furnaces without an endless core
- H05B6/30—Arrangements for remelting or zone melting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S65/00—Glass manufacturing
- Y10S65/04—Electric heat
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Furnace Details (AREA)
Abstract
1,083,248. Zone-melting. SIEMENS A.G. April 28, 1966 [April 28, 1965], No. 18794/66. Heading B1S. In the zone-melting of a silicon rod in a steel vacuum chamber 2 using an annular heating means 9, the heating means is carried by a holder 14 which extends through a vertical slit 12 in a side wall of the chamber to enable relative movement between the rod and heating means. The side wall carrying the slit is hermetically covered by a plate 13 which carries the holder, the contacting surfaces of the wall and plate being ground and polished. Two continuous channels (Fig. 3) in the surface of the side wall surround the slit, the inner one 18 being connected to a source of vacuum and the outer one 15 to a source of vacuum oil. The heating means may provide induction or radiant heating. In the former case, the plate also carries a capacitor 19 forming a resonant circuit with the induction coil. The side wall opposite the plate has a door 3 with an observation window 4 of unbreakable glass. The holders for the rod ends pass through bushes and may be rotated and/or vertically moved from outside the chamber.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES96806A DE1262226B (en) | 1965-04-28 | 1965-04-28 | Device for crucible-free zone melting with a vacuum chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1083248A true GB1083248A (en) | 1967-09-13 |
Family
ID=7520302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB18794/66A Expired GB1083248A (en) | 1965-04-28 | 1966-04-28 | Improvements in or relating to zone melting |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3391235A (en) |
| BE (1) | BE680141A (en) |
| DE (1) | DE1262226B (en) |
| GB (1) | GB1083248A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1519902C3 (en) * | 1966-09-24 | 1975-07-10 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod |
| DE1272886B (en) * | 1966-09-24 | 1968-07-18 | Siemens Ag | Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod |
| GB1179545A (en) * | 1968-01-16 | 1970-01-28 | Siemens Ag | Apparatus for Melting a Rod of Crystalline Material Zone-by-Zone |
| GB1366532A (en) * | 1971-04-21 | 1974-09-11 | Nat Res Dev | Apparatus for the preparation and growth of crystalline material |
| DE2533858C2 (en) * | 1975-07-29 | 1983-11-17 | Siemens AG, 1000 Berlin und 8000 München | Device for crucible-free zone melting of a semiconductor material rod with an induction heating coil fixed in the axial direction |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2937216A (en) * | 1957-12-30 | 1960-05-17 | Minnesota Mining & Mfg | Zone refining apparatus |
| GB977591A (en) * | 1960-01-20 |
-
1965
- 1965-04-28 DE DES96806A patent/DE1262226B/en not_active Withdrawn
- 1965-10-22 US US501674A patent/US3391235A/en not_active Expired - Lifetime
-
1966
- 1966-04-27 BE BE680141D patent/BE680141A/xx unknown
- 1966-04-28 GB GB18794/66A patent/GB1083248A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| BE680141A (en) | 1966-10-27 |
| DE1262226B (en) | 1968-03-07 |
| US3391235A (en) | 1968-07-02 |
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