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GB1080029A - Improvements in and relating to piezoelectric devices - Google Patents

Improvements in and relating to piezoelectric devices

Info

Publication number
GB1080029A
GB1080029A GB44105/64A GB4410564A GB1080029A GB 1080029 A GB1080029 A GB 1080029A GB 44105/64 A GB44105/64 A GB 44105/64A GB 4410564 A GB4410564 A GB 4410564A GB 1080029 A GB1080029 A GB 1080029A
Authority
GB
United Kingdom
Prior art keywords
substrate
layer
silver
copper
gold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB44105/64A
Inventor
Norman Francis Foster
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US387837A external-priority patent/US3388002A/en
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of GB1080029A publication Critical patent/GB1080029A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/133—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials for electromechanical delay lines or filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
    • H10P95/00—

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Light Receiving Elements (AREA)

Abstract

A Piezo-electric transducer is made by evaporating a Piezo-electric semi-conductive substance on to a substrate and controlling the resistivity of the material during or after evaporation. The method may be applied to cubic or hexagonal group II - VI compounds such as cadmium sulphide, zinc oxide, cadmium selenide, magnesium telluride or zinc sulphide. The evaporation is carried out using known apparatus at a pressure of between 2 and 6 x 10-6 torr the substrate being held at a temperature such that a structure consisting of aligned crystals is built up (200-230 DEG C. is suitable for CdS). Thereafter, the temperature is raised to about 450 DEG C. to cause diffusion of compensating materials e.g. gold, silver, copper, from the substrate and/or an outer electrode whereby the resistivity of the layer is raised to at least 106O /cm. Alternatively, compensating material may be deposited along with the semi-conductive material. Other methods of compensation are also referred to. The orientation of the Piezo-electric axis of the layer depends upon the substrate material. For longitudinal-mode operation, the axis must be approximately normal to the layer. This orientation is achieved by slow evaporation in a direction normal to a hot gold substrate. For shear-mode operation an alignment parallel to the faces of the layer is produced by a relatively rapid evaporation at an acute angle on to a relatively cool substrate of silver. A copper substrate may be used to obtain a mixture of both modes. Copper, silver or gold may be deposited on a base of glass, quartz or aluminium and a nickel chromium alloy layer may be first deposited as a key. The copper, silver or gold may also be deposited as an outer layer on the semi-conductive substance.
GB44105/64A 1963-10-31 1964-10-29 Improvements in and relating to piezoelectric devices Expired GB1080029A (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US32037963A 1963-10-31 1963-10-31
US387837A US3388002A (en) 1964-08-06 1964-08-06 Method of forming a piezoelectric ultrasonic transducer
US66932767A 1967-07-24 1967-07-24
US77168568A 1968-10-24 1968-10-24

Publications (1)

Publication Number Publication Date
GB1080029A true GB1080029A (en) 1967-08-23

Family

ID=27502195

Family Applications (1)

Application Number Title Priority Date Filing Date
GB44105/64A Expired GB1080029A (en) 1963-10-31 1964-10-29 Improvements in and relating to piezoelectric devices

Country Status (2)

Country Link
GB (1) GB1080029A (en)
NL (1) NL6412589A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2434541A1 (en) * 1978-07-26 1980-03-21 Nasa PHASE INSENSITIVE ULTRASONIC TRANSDUCER

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2434541A1 (en) * 1978-07-26 1980-03-21 Nasa PHASE INSENSITIVE ULTRASONIC TRANSDUCER

Also Published As

Publication number Publication date
NL6412589A (en) 1965-05-03

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