GB1069435A - Electromechanical transducer device - Google Patents
Electromechanical transducer deviceInfo
- Publication number
- GB1069435A GB1069435A GB2010963A GB2010963A GB1069435A GB 1069435 A GB1069435 A GB 1069435A GB 2010963 A GB2010963 A GB 2010963A GB 2010963 A GB2010963 A GB 2010963A GB 1069435 A GB1069435 A GB 1069435A
- Authority
- GB
- United Kingdom
- Prior art keywords
- tube
- films
- support
- pressure
- alternatively
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 abstract 6
- 239000000463 material Substances 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 3
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 229910052732 germanium Inorganic materials 0.000 abstract 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229920003023 plastic Polymers 0.000 abstract 1
- 239000004033 plastic Substances 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
- 229910052594 sapphire Inorganic materials 0.000 abstract 1
- 239000010980 sapphire Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0026—Transmitting or indicating the displacement of flexible, deformable tubes by electric, electromechanical, magnetic or electromagnetic means
- G01L9/0027—Transmitting or indicating the displacement of flexible, deformable tubes by electric, electromechanical, magnetic or electromagnetic means using variations in ohmic resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0002—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in ohmic resistance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Measurement Of Force In General (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
1,069,435. Pressure-sensitive resistors. G. V PLANER Ltd. Aug. 18, 1964 [May 21, 1963; Nov. 19, 1963], Nos. 20109/63 and 45582/63. Heading H1K. [Also in Division G1] A pressure transducer comprises an elastic support, such as a vitreous silica tube 1 (Fig. 1), of elliptical section and closed at one end, having terminal strips 2 . . . 6 deposited longitudinally on the exterior surface of the tube, and thin films 7, 8 of strain-sensitive semi-conductor material, such as intrinsic or doped germanium, deposited around the circumference of the tube, as shown. The pressure to be measured is introduced into the tube, and tends to distort the latter towards a circular cross-section, thus differentially stressing areas X and Y of film 7. X and Y are connected in a bridge circuit, Fig. 2 (not shown), with resistances (A, B), the reading on a meter (V) being indicative of the test pressure; film 8 (forming resistance Z), is connected in series with the meter to compensate for variation of temperature. Alternatively, film 8 may be shunted across a potentiometer (C, Fig. 3, not shown), in a balanced-bridge arrangement. Further temperature compensating films may be added to the circuit. The support may alternatively be made of sapphire, glass, ceramic, glazed metal, or plastics. The strain-sensitive material may alternatively be silicon, and is preferably deposited on the support by evaporation in a vacuum, although other methods such as sputtering may be used. A layer of protective material, e.g. silicon monoxide, silicon nitride, or silica, may be applied between the support and the films of strainsensitive material, and a similar layer may be applied over the films. Reference has been directed by the Comptroller to Specification 757,597.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2010963A GB1069435A (en) | 1963-05-21 | 1963-05-21 | Electromechanical transducer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2010963A GB1069435A (en) | 1963-05-21 | 1963-05-21 | Electromechanical transducer device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1069435A true GB1069435A (en) | 1967-05-17 |
Family
ID=10140538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2010963A Expired GB1069435A (en) | 1963-05-21 | 1963-05-21 | Electromechanical transducer device |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB1069435A (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0074574A1 (en) * | 1981-09-14 | 1983-03-23 | The Perkin-Elmer Corporation | Flow-through fluid pressure transducer |
| GB2129565A (en) * | 1982-10-29 | 1984-05-16 | Flopetrol Services Inc | Pressure and temperature transducer |
| FR2598804A1 (en) * | 1986-05-14 | 1987-11-20 | Bosch Gmbh Robert | SENSOR FOR DETERMINING PHYSICAL PHENOMENA IN THE COMBUSTION CHAMBER OF AN INTERNAL COMBUSTION ENGINE |
| FR2638524A1 (en) * | 1988-10-27 | 1990-05-04 | Schlumberger Prospection | PRESSURE SENSOR FOR USE IN OIL WELLS |
| US5637802A (en) * | 1995-02-28 | 1997-06-10 | Rosemount Inc. | Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates |
| US5665899A (en) * | 1996-02-23 | 1997-09-09 | Rosemount Inc. | Pressure sensor diagnostics in a process transmitter |
| US5808205A (en) * | 1997-04-01 | 1998-09-15 | Rosemount Inc. | Eccentric capacitive pressure sensor |
| US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
| US6508129B1 (en) | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
| US6516671B2 (en) | 2000-01-06 | 2003-02-11 | Rosemount Inc. | Grain growth of electrical interconnection for microelectromechanical systems (MEMS) |
| US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
| US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
| US6848316B2 (en) | 2002-05-08 | 2005-02-01 | Rosemount Inc. | Pressure sensor assembly |
-
1963
- 1963-05-21 GB GB2010963A patent/GB1069435A/en not_active Expired
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0074574A1 (en) * | 1981-09-14 | 1983-03-23 | The Perkin-Elmer Corporation | Flow-through fluid pressure transducer |
| GB2129565A (en) * | 1982-10-29 | 1984-05-16 | Flopetrol Services Inc | Pressure and temperature transducer |
| FR2598804A1 (en) * | 1986-05-14 | 1987-11-20 | Bosch Gmbh Robert | SENSOR FOR DETERMINING PHYSICAL PHENOMENA IN THE COMBUSTION CHAMBER OF AN INTERNAL COMBUSTION ENGINE |
| FR2638524A1 (en) * | 1988-10-27 | 1990-05-04 | Schlumberger Prospection | PRESSURE SENSOR FOR USE IN OIL WELLS |
| EP0373010A1 (en) * | 1988-10-27 | 1990-06-13 | Societe De Prospection Electrique Schlumberger | Pressure sensor usable in oil wells |
| US5024098A (en) * | 1988-10-27 | 1991-06-18 | Schlumberger Technology Corporation | Pressure sensor useable in oil wells |
| US6089097A (en) | 1995-02-28 | 2000-07-18 | Rosemount Inc. | Elongated pressure sensor for a pressure transmitter |
| US5637802A (en) * | 1995-02-28 | 1997-06-10 | Rosemount Inc. | Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates |
| US6079276A (en) | 1995-02-28 | 2000-06-27 | Rosemount Inc. | Sintered pressure sensor for a pressure transmitter |
| US6082199A (en) | 1995-02-28 | 2000-07-04 | Rosemount Inc. | Pressure sensor cavity etched with hot POCL3 gas |
| US5665899A (en) * | 1996-02-23 | 1997-09-09 | Rosemount Inc. | Pressure sensor diagnostics in a process transmitter |
| US5808205A (en) * | 1997-04-01 | 1998-09-15 | Rosemount Inc. | Eccentric capacitive pressure sensor |
| US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
| US6508129B1 (en) | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
| US6516671B2 (en) | 2000-01-06 | 2003-02-11 | Rosemount Inc. | Grain growth of electrical interconnection for microelectromechanical systems (MEMS) |
| US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
| US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
| US6848316B2 (en) | 2002-05-08 | 2005-02-01 | Rosemount Inc. | Pressure sensor assembly |
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