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GB0614028D0 - Method of controlling contamination of a surface - Google Patents

Method of controlling contamination of a surface

Info

Publication number
GB0614028D0
GB0614028D0 GB0614028A GB0614028A GB0614028D0 GB 0614028 D0 GB0614028 D0 GB 0614028D0 GB 0614028 A GB0614028 A GB 0614028A GB 0614028 A GB0614028 A GB 0614028A GB 0614028 D0 GB0614028 D0 GB 0614028D0
Authority
GB
United Kingdom
Prior art keywords
controlling contamination
contamination
controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0614028A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GB0614028A priority Critical patent/GB0614028D0/en
Publication of GB0614028D0 publication Critical patent/GB0614028D0/en
Priority to PCT/GB2007/050350 priority patent/WO2008007134A2/en
Priority to TW96124322A priority patent/TW200821762A/en
Ceased legal-status Critical Current

Links

GB0614028A 2006-07-14 2006-07-14 Method of controlling contamination of a surface Ceased GB0614028D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0614028A GB0614028D0 (en) 2006-07-14 2006-07-14 Method of controlling contamination of a surface
PCT/GB2007/050350 WO2008007134A2 (en) 2006-07-14 2007-06-22 Method of controlling contamination of a surface
TW96124322A TW200821762A (en) 2006-07-14 2007-07-04 Method of controlling contamination of a surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0614028A GB0614028D0 (en) 2006-07-14 2006-07-14 Method of controlling contamination of a surface

Publications (1)

Publication Number Publication Date
GB0614028D0 true GB0614028D0 (en) 2006-08-23

Family

ID=36955676

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0614028A Ceased GB0614028D0 (en) 2006-07-14 2006-07-14 Method of controlling contamination of a surface

Country Status (3)

Country Link
GB (1) GB0614028D0 (en)
TW (1) TW200821762A (en)
WO (1) WO2008007134A2 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3598602B2 (en) * 1995-08-07 2004-12-08 セイコーエプソン株式会社 Plasma etching method, liquid crystal display panel manufacturing method, and plasma etching apparatus
EP1671711A1 (en) * 2003-10-09 2006-06-21 Ebara Corporation Method of purifying matter contaminated by heavy metal and apparatus therefor
US7196342B2 (en) * 2004-03-10 2007-03-27 Cymer, Inc. Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source
GB0426036D0 (en) * 2004-11-26 2004-12-29 Boc Group Plc Protection of surfaces exposed to charged particles
GB0605725D0 (en) * 2006-03-23 2006-05-03 Boc Group Plc Spectral filter repair

Also Published As

Publication number Publication date
WO2008007134A2 (en) 2008-01-17
WO2008007134A3 (en) 2008-03-27
TW200821762A (en) 2008-05-16

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Legal Events

Date Code Title Description
COOA Change in applicant's name or ownership of the application

Owner name: EDWARDS LIMITED

Free format text: FORMER APPLICANT(S): BOC GROUP, THE PLC

AT Applications terminated before publication under section 16(1)