FR901990A - Microscope ionique - Google Patents
Microscope ioniqueInfo
- Publication number
- FR901990A FR901990A FR901990DA FR901990A FR 901990 A FR901990 A FR 901990A FR 901990D A FR901990D A FR 901990DA FR 901990 A FR901990 A FR 901990A
- Authority
- FR
- France
- Prior art keywords
- ion microscope
- microscope
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/04—Means for controlling the discharge
- H01J2237/049—Focusing means
- H01J2237/0492—Lens systems
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE901990X | 1942-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR901990A true FR901990A (fr) | 1945-08-14 |
Family
ID=6860921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR901990D Expired FR901990A (fr) | 1942-12-12 | 1944-02-16 | Microscope ionique |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR901990A (fr) |
-
1944
- 1944-02-16 FR FR901990D patent/FR901990A/fr not_active Expired
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