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FR3155894B1 - VIBRATION SENSOR - Google Patents

VIBRATION SENSOR

Info

Publication number
FR3155894B1
FR3155894B1 FR2312942A FR2312942A FR3155894B1 FR 3155894 B1 FR3155894 B1 FR 3155894B1 FR 2312942 A FR2312942 A FR 2312942A FR 2312942 A FR2312942 A FR 2312942A FR 3155894 B1 FR3155894 B1 FR 3155894B1
Authority
FR
France
Prior art keywords
lateral
central portion
lateral portions
vibration sensor
mems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2312942A
Other languages
French (fr)
Other versions
FR3155894A1 (en
Inventor
Antoine Filipe
Olivier Gigan
Guillaume Papin
Nathan Georgeault
Yann David
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tronics Microsystems SA
Original Assignee
Tronics Microsystems SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tronics Microsystems SA filed Critical Tronics Microsystems SA
Priority to FR2312942A priority Critical patent/FR3155894B1/en
Priority to PCT/FR2024/051521 priority patent/WO2025109271A1/en
Publication of FR3155894A1 publication Critical patent/FR3155894A1/en
Application granted granted Critical
Publication of FR3155894B1 publication Critical patent/FR3155894B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

Capteur de vibration comprenant un boîtier (1) d’axe central (Z) dans lequel est disposé un circuit PCB (2). Le circuit PCB (2) présente une portion centrale (20) centrée sur l’axe central (Z) et de laquelle s’étendent des portions latérales (21a-21d) distinctes, des zones flexibles (22a-22d) connectant la portion centrale (20) aux portions latérales (21a-21d), chaque portion latérale (21a-21d) forme un angle supérieur ou égal à 90° par rapport à la portion centrale (20). Au moins deux éléments sensibles MEMS (3a-3c) de détection de vibration montés sur les faces internes (210a-210c) des portions latérales (21a-21c) du circuit (2), les axes sensibles (30a-30c) des éléments sensibles MEMS (3a-3c) sont parallèles à la face interne (210a-210d) de la portion latérale (21a-21d) correspondante et forment un repère tridimensionnel. Figure pour l’abrégé : Fig 2.Vibration sensor comprising a housing (1) with a central axis (Z) in which a PCB circuit (2) is arranged. The PCB circuit (2) has a central portion (20) centered on the central axis (Z) and from which extend distinct lateral portions (21a-21d), flexible zones (22a-22d) connecting the central portion (20) to the lateral portions (21a-21d), each lateral portion (21a-21d) forming an angle greater than or equal to 90° with respect to the central portion (20). At least two MEMS vibration sensing elements (3a-3c) are mounted on the inner faces (210a-210c) of the lateral portions (21a-21c) of the circuit (2). The sensing axes (30a-30c) of the MEMS sensing elements (3a-3c) are parallel to the inner face (210a-210d) of the corresponding lateral portion (21a-21d) and form a three-dimensional coordinate system. Figure for the abbreviation: Fig 2.

FR2312942A 2023-11-23 2023-11-23 VIBRATION SENSOR Active FR3155894B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR2312942A FR3155894B1 (en) 2023-11-23 2023-11-23 VIBRATION SENSOR
PCT/FR2024/051521 WO2025109271A1 (en) 2023-11-23 2024-11-18 Vibration sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2312942A FR3155894B1 (en) 2023-11-23 2023-11-23 VIBRATION SENSOR
FR2312942 2023-11-23

Publications (2)

Publication Number Publication Date
FR3155894A1 FR3155894A1 (en) 2025-05-30
FR3155894B1 true FR3155894B1 (en) 2025-10-24

Family

ID=89977972

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2312942A Active FR3155894B1 (en) 2023-11-23 2023-11-23 VIBRATION SENSOR

Country Status (2)

Country Link
FR (1) FR3155894B1 (en)
WO (1) WO2025109271A1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000002714A (en) * 1998-04-13 2000-01-07 Matsushita Electric Ind Co Ltd Piezoelectric acceleration sensor, acceleration detection method, and method of manufacturing piezoelectric acceleration sensor
US8368154B2 (en) * 2010-02-17 2013-02-05 The Regents Of The University Of California Three dimensional folded MEMS technology for multi-axis sensor systems
US10746758B2 (en) * 2017-02-21 2020-08-18 Hrl Laboratories, Llc MEMS-based sensor suite
FR3112392B1 (en) * 2020-07-07 2022-07-22 Autovib Triaxial industrial accelerometer

Also Published As

Publication number Publication date
WO2025109271A1 (en) 2025-05-30
FR3155894A1 (en) 2025-05-30

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Legal Events

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Effective date: 20250530

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