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FR3095295B1 - Visual inspection device to identify the presence of defects on the front face of a substrate - Google Patents

Visual inspection device to identify the presence of defects on the front face of a substrate Download PDF

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Publication number
FR3095295B1
FR3095295B1 FR1904064A FR1904064A FR3095295B1 FR 3095295 B1 FR3095295 B1 FR 3095295B1 FR 1904064 A FR1904064 A FR 1904064A FR 1904064 A FR1904064 A FR 1904064A FR 3095295 B1 FR3095295 B1 FR 3095295B1
Authority
FR
France
Prior art keywords
substrate
front face
inspection device
defects
visual inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1904064A
Other languages
French (fr)
Other versions
FR3095295A1 (en
Inventor
Florent Quagliotti
Thomas Oheix
Monique Lecomte
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics France SAS
Original Assignee
Exagan SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Exagan SAS filed Critical Exagan SAS
Priority to FR1904064A priority Critical patent/FR3095295B1/en
Publication of FR3095295A1 publication Critical patent/FR3095295A1/en
Application granted granted Critical
Publication of FR3095295B1 publication Critical patent/FR3095295B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H10P72/0606—
    • H10P72/00—
    • H10P72/0616—

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

Dispositif d’inspection visuelle (1) pour identifier l’éventuelle présence de défauts (4) sur une face dite avant (3) d’un substrat (2), le dispositif d’inspection (1) comprenant un support (6) pour recevoir le substrat (2) ; un gabarit (9) assemblé au support (6), le gabarit (9) étant situé au-dessus et à distance de la face avant (3) du substrat (2) et recouvrant une zone périphérique de celle-ci lorsque le substrat (2) est placé sur le support (6). Fig. 1Visual inspection device (1) for identifying the possible presence of defects (4) on a so-called front face (3) of a substrate (2), the inspection device (1) comprising a support (6) for receiving the substrate (2); a template (9) assembled to the support (6), the template (9) being located above and at a distance from the front face (3) of the substrate (2) and covering a peripheral zone thereof when the substrate ( 2) is placed on the support (6). Fig. 1

FR1904064A 2019-04-16 2019-04-16 Visual inspection device to identify the presence of defects on the front face of a substrate Active FR3095295B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1904064A FR3095295B1 (en) 2019-04-16 2019-04-16 Visual inspection device to identify the presence of defects on the front face of a substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1904064 2019-04-16
FR1904064A FR3095295B1 (en) 2019-04-16 2019-04-16 Visual inspection device to identify the presence of defects on the front face of a substrate

Publications (2)

Publication Number Publication Date
FR3095295A1 FR3095295A1 (en) 2020-10-23
FR3095295B1 true FR3095295B1 (en) 2021-04-09

Family

ID=67441445

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1904064A Active FR3095295B1 (en) 2019-04-16 2019-04-16 Visual inspection device to identify the presence of defects on the front face of a substrate

Country Status (1)

Country Link
FR (1) FR3095295B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115439476B (en) * 2022-11-07 2023-03-14 成都博视广达科技有限责任公司 Silk-screen defect detection method and device based on image analysis

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4517315B2 (en) * 1999-10-08 2010-08-04 株式会社ニコン Substrate fall prevention mechanism and substrate inspection apparatus provided with the same
US7227628B1 (en) * 2003-10-10 2007-06-05 Kla-Tencor Technologies Corp. Wafer inspection systems and methods for analyzing inspection data
JP5524668B2 (en) * 2010-03-26 2014-06-18 ラピスセミコンダクタ株式会社 Wafer holding apparatus and method
JP6617649B2 (en) * 2016-06-20 2019-12-11 東京エレクトロン株式会社 Method for setting placement position of substrate to be processed and film forming system

Also Published As

Publication number Publication date
FR3095295A1 (en) 2020-10-23

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