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FR3090421B1 - Transducteur ultrasonore à membrane vibrante à effet capacitif à large bande passante - Google Patents

Transducteur ultrasonore à membrane vibrante à effet capacitif à large bande passante Download PDF

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Publication number
FR3090421B1
FR3090421B1 FR1874085A FR1874085A FR3090421B1 FR 3090421 B1 FR3090421 B1 FR 3090421B1 FR 1874085 A FR1874085 A FR 1874085A FR 1874085 A FR1874085 A FR 1874085A FR 3090421 B1 FR3090421 B1 FR 3090421B1
Authority
FR
France
Prior art keywords
vibrating membrane
ultrasonic transducer
capacitive effect
membrane
wide bandwidth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1874085A
Other languages
English (en)
Other versions
FR3090421A1 (fr
Inventor
Anne Ghis
Marc Delaunay
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1874085A priority Critical patent/FR3090421B1/fr
Priority to US16/723,312 priority patent/US11039255B2/en
Priority to EP19218531.2A priority patent/EP3670004A1/fr
Publication of FR3090421A1 publication Critical patent/FR3090421A1/fr
Application granted granted Critical
Publication of FR3090421B1 publication Critical patent/FR3090421B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/02—Loudspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • B06B1/0223—Driving circuits for generating signals continuous in time
    • B06B1/0238—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave
    • B06B1/0246—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal
    • B06B1/0261—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal taken from a transducer or electrode connected to the driving transducer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/50—Application to a particular transducer type
    • B06B2201/51—Electrostatic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

L’invention porte sur un transducteur ultrasonore à membrane vibrante à effet capacitif (1), comprenant :-un support (13) avec une cavité (14) est ménagée ;-une membrane vibrante (11) fixée au support (13) et recouvrant la cavité (14) ;-un élément conducteur (101) séparé de la membrane (11) par la cavité (14) ;-caractérisé en ce que :-la membrane vibrante (11) présente une fréquence de résonance en mode membrane fm et une fréquence de résonance en mode plaque vérifiant la relation fm>fp ; -un circuit d’excitation (2) a des bornes connectées entre la membrane vibrante (11) et l’élément conducteur (101), et configuré pour appliquer entre ses bornes un signal électrique dont la fréquence maximale fo vérifie la relation fm> 1,5*fo; ou-un circuit de mesure (3) est connecté entre la membrane vibrante (11) et l’élément conducteur et configuré pour mesurer les variations de capacité jusqu’à une fréquence fo. Figure à publier avec l’abrégé : Fig. 1
FR1874085A 2018-12-23 2018-12-23 Transducteur ultrasonore à membrane vibrante à effet capacitif à large bande passante Expired - Fee Related FR3090421B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR1874085A FR3090421B1 (fr) 2018-12-23 2018-12-23 Transducteur ultrasonore à membrane vibrante à effet capacitif à large bande passante
US16/723,312 US11039255B2 (en) 2018-12-23 2019-12-20 Wide-passband capacitive vibrating-membrane ultrasonic transducer
EP19218531.2A EP3670004A1 (fr) 2018-12-23 2019-12-20 Transducteur ultrasonore à membrane vibrante à effet capacitif à large bande passante

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1874085A FR3090421B1 (fr) 2018-12-23 2018-12-23 Transducteur ultrasonore à membrane vibrante à effet capacitif à large bande passante

Publications (2)

Publication Number Publication Date
FR3090421A1 FR3090421A1 (fr) 2020-06-26
FR3090421B1 true FR3090421B1 (fr) 2020-12-25

Family

ID=67742485

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1874085A Expired - Fee Related FR3090421B1 (fr) 2018-12-23 2018-12-23 Transducteur ultrasonore à membrane vibrante à effet capacitif à large bande passante

Country Status (3)

Country Link
US (1) US11039255B2 (fr)
EP (1) EP3670004A1 (fr)
FR (1) FR3090421B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118321130A (zh) * 2023-01-12 2024-07-12 天津大学 超声波换能器及电子设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9815992D0 (en) * 1998-07-23 1998-09-23 Secr Defence Improvements in and relating to microchemical devices
WO2008134909A1 (fr) * 2007-05-07 2008-11-13 Baumer Electric Ag Convertisseur acoustique
FR2962926B1 (fr) 2010-07-23 2015-01-02 Univ Tours Francois Rabelais Procede et dispositif de generation d'ultrasons mettant en oeuvre des cmuts, et procede et systeme d'imagerie medicale.
FR3048689A1 (fr) * 2016-03-10 2017-09-15 Commissariat Energie Atomique Membrane en carbone amorphe et mems comportant une telle membrane

Also Published As

Publication number Publication date
FR3090421A1 (fr) 2020-06-26
US20200374636A1 (en) 2020-11-26
US11039255B2 (en) 2021-06-15
EP3670004A1 (fr) 2020-06-24

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