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FR3090011B1 - Procédé d’infiltration ou de dépôt chimique en phase vapeur - Google Patents

Procédé d’infiltration ou de dépôt chimique en phase vapeur Download PDF

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Publication number
FR3090011B1
FR3090011B1 FR1872948A FR1872948A FR3090011B1 FR 3090011 B1 FR3090011 B1 FR 3090011B1 FR 1872948 A FR1872948 A FR 1872948A FR 1872948 A FR1872948 A FR 1872948A FR 3090011 B1 FR3090011 B1 FR 3090011B1
Authority
FR
France
Prior art keywords
infiltration
vapor deposition
chemical vapor
deposition process
pyrocarbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1872948A
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English (en)
Other versions
FR3090011A1 (fr
Inventor
Jean-François Daniel René Potin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Ceramics SA
Original Assignee
Safran Ceramics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Safran Ceramics SA filed Critical Safran Ceramics SA
Priority to FR1872948A priority Critical patent/FR3090011B1/fr
Priority to PCT/FR2019/052794 priority patent/WO2020120857A1/fr
Priority to EP19842373.3A priority patent/EP3894611A1/fr
Priority to CN201980082857.3A priority patent/CN113242914A/zh
Priority to US17/413,296 priority patent/US20220041513A1/en
Publication of FR3090011A1 publication Critical patent/FR3090011A1/fr
Application granted granted Critical
Publication of FR3090011B1 publication Critical patent/FR3090011B1/fr
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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62645—Thermal treatment of powders or mixtures thereof other than sintering
    • C04B35/6267—Pyrolysis, carbonisation or auto-combustion reactions
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/71—Ceramic products containing macroscopic reinforcing agents
    • C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
    • C04B35/80—Fibres, filaments, whiskers, platelets, or the like
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/71—Ceramic products containing macroscopic reinforcing agents
    • C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
    • C04B35/80—Fibres, filaments, whiskers, platelets, or the like
    • C04B35/83—Carbon fibres in a carbon matrix
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/52—Constituents or additives characterised by their shapes
    • C04B2235/5208—Fibers
    • C04B2235/5216—Inorganic
    • C04B2235/524—Non-oxidic, e.g. borides, carbides, silicides or nitrides
    • C04B2235/5244—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/52—Constituents or additives characterised by their shapes
    • C04B2235/5208—Fibers
    • C04B2235/5216—Inorganic
    • C04B2235/524—Non-oxidic, e.g. borides, carbides, silicides or nitrides
    • C04B2235/5248—Carbon, e.g. graphite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/52—Constituents or additives characterised by their shapes
    • C04B2235/5208—Fibers
    • C04B2235/5252—Fibers having a specific pre-form
    • C04B2235/5256—Two-dimensional, e.g. woven structures
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/614—Gas infiltration of green bodies or pre-forms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
    • F16D69/00—Friction linings; Attachment thereof; Selection of coacting friction substances or surfaces
    • F16D69/02—Composition of linings ; Methods of manufacturing
    • F16D69/023—Composite materials containing carbon and carbon fibres or fibres made of carbonizable material

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Composite Materials (AREA)
  • General Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Procédé d’infiltration ou de dépôt chimique en phase vapeur La présente invention concerne un procédé d’infiltration ou de dépôt chimique en phase vapeur, comprenant au moins :- la formation de pyrocarbone dans la porosité d’un substrat poreux ou sur une surface d’un substrat, le substrat étant placé dans une enceinte réactionnelle et le pyrocarbone étant formé à partir d’une phase gazeuse introduite dans l’enceinte réactionnelle, cette phase gazeuse comprenant au moins composé précurseur de pyrocarbone et du dioxyde de carbone.
FR1872948A 2018-12-14 2018-12-14 Procédé d’infiltration ou de dépôt chimique en phase vapeur Active FR3090011B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1872948A FR3090011B1 (fr) 2018-12-14 2018-12-14 Procédé d’infiltration ou de dépôt chimique en phase vapeur
PCT/FR2019/052794 WO2020120857A1 (fr) 2018-12-14 2019-11-25 Procede d'infiltration ou de depot chimique en phase vapeur
EP19842373.3A EP3894611A1 (fr) 2018-12-14 2019-11-25 Procede d'infiltration ou de depot chimique en phase vapeur
CN201980082857.3A CN113242914A (zh) 2018-12-14 2019-11-25 化学气相渗透或化学气相沉积方法
US17/413,296 US20220041513A1 (en) 2018-12-14 2019-11-25 Chemical vapour infiltration or deposition process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1872948A FR3090011B1 (fr) 2018-12-14 2018-12-14 Procédé d’infiltration ou de dépôt chimique en phase vapeur

Publications (2)

Publication Number Publication Date
FR3090011A1 FR3090011A1 (fr) 2020-06-19
FR3090011B1 true FR3090011B1 (fr) 2021-01-01

Family

ID=66676666

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1872948A Active FR3090011B1 (fr) 2018-12-14 2018-12-14 Procédé d’infiltration ou de dépôt chimique en phase vapeur

Country Status (5)

Country Link
US (1) US20220041513A1 (fr)
EP (1) EP3894611A1 (fr)
CN (1) CN113242914A (fr)
FR (1) FR3090011B1 (fr)
WO (1) WO2020120857A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3113049B1 (fr) 2020-07-30 2022-10-21 Safran Ceram Procédé de recyclage de sous-produits carbonés
FR3132717B1 (fr) * 2022-02-16 2024-02-16 Safran Landing Systems Outillage des plateaux multipiles pour un flux semi-forcé

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1158637A (en) * 1966-08-25 1969-07-16 Atomic Energy Authority Uk Improvements in or relating to Processes involving the Pyrolytic Deposition of Carbon or other Substances from a Gas or Vapour
FR2711646B1 (fr) * 1993-10-27 1996-02-09 Europ Propulsion Procédé d'infiltration chimique en phase vapeur d'une matrice pyrocarbone au sein d'un substrat poreux avec établissement d'un gradient de température dans le substrat.
FR2726013B1 (fr) 1994-10-20 1997-01-17 Carbone Ind Procede de realisation d'un substrat fibreux par superposition de couches fibreuses et substrat ainsi obtenu
FR2741634B1 (fr) 1995-11-27 1998-04-17 Europ Propulsion Procede pour la realisation de preformes fibreuses destinees a la fabrication de pieces annulaires en materiau composite
FR2824084B1 (fr) 2001-04-30 2003-08-01 Messier Bugatti Alimentation aiguilleteuse par bande spirale continue
FR2854168B1 (fr) * 2003-04-28 2007-02-09 Messier Bugatti Commande ou modelisation de procede d'infiltration chimique en phase vapeur pour la densification de substrats poreux par du carbone
US20050158468A1 (en) * 2004-01-20 2005-07-21 John Gaffney Method for manufacturing carbon composites
FR2886640B1 (fr) * 2005-06-02 2007-08-24 Snecma Propulsion Solide Sa Procede et preforme pour la realisation de pieces en materiau composite par densification cvi et pieces obtenues
FR2887601B1 (fr) 2005-06-24 2007-10-05 Snecma Moteurs Sa Piece mecanique et procede de fabrication d'une telle piece

Also Published As

Publication number Publication date
US20220041513A1 (en) 2022-02-10
CN113242914A (zh) 2021-08-10
EP3894611A1 (fr) 2021-10-20
FR3090011A1 (fr) 2020-06-19
WO2020120857A1 (fr) 2020-06-18

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