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FR3089261B1 - Groupe de pompage - Google Patents

Groupe de pompage Download PDF

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Publication number
FR3089261B1
FR3089261B1 FR1872247A FR1872247A FR3089261B1 FR 3089261 B1 FR3089261 B1 FR 3089261B1 FR 1872247 A FR1872247 A FR 1872247A FR 1872247 A FR1872247 A FR 1872247A FR 3089261 B1 FR3089261 B1 FR 3089261B1
Authority
FR
France
Prior art keywords
vacuum pump
outlet
rotors
roots
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1872247A
Other languages
English (en)
Other versions
FR3089261A1 (fr
Inventor
Serge Brandolin
Mickael Rusconi
Yannick Grenier
Julien Valentin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1872247A priority Critical patent/FR3089261B1/fr
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to TW108141543A priority patent/TW202024482A/zh
Priority to EP19801587.7A priority patent/EP3891399A1/fr
Priority to PCT/EP2019/081556 priority patent/WO2020114754A1/fr
Priority to JP2021531570A priority patent/JP2022514461A/ja
Priority to US17/292,263 priority patent/US11493042B2/en
Priority to CN201980077269.0A priority patent/CN113167277A/zh
Priority to KR1020217020815A priority patent/KR20210095702A/ko
Priority to SG11202103583SA priority patent/SG11202103583SA/en
Publication of FR3089261A1 publication Critical patent/FR3089261A1/fr
Application granted granted Critical
Publication of FR3089261B1 publication Critical patent/FR3089261B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F04C23/003—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle having complementary function
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/10—Stators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/806—Pipes for fluids; Fittings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/10—Geometry of the inlet or outlet
    • F04C2250/102—Geometry of the inlet or outlet of the outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Groupe de pompage L’invention concerne un groupe de pompage comportant : une pompe à vide primaire, une pompe à vide de type Roots (3) comprenant un étage de pompage (7) ayant un stator (9) à l’intérieur duquel deux rotors (5) Roots sont configurés pour tourner de façon synchronisée en sens inverse pour entrainer un gaz à pomper entre un orifice d’entrée (10) et un orifice de sortie (11), une canalisation (13) reliant l’orifice de sortie (11) à une aspiration (12) de la pompe à vide primaire (2), caractérisé en ce que la plus petite distance (d) entre une bordure de l’orifice de sortie (11) et chacun des rotors (5) dans l’étage de pompage (7) est au moins inférieure à trois centimètres. FIGURE : 2
FR1872247A 2018-12-03 2018-12-03 Groupe de pompage Active FR3089261B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR1872247A FR3089261B1 (fr) 2018-12-03 2018-12-03 Groupe de pompage
EP19801587.7A EP3891399A1 (fr) 2018-12-03 2019-11-15 Groupe de pompage
PCT/EP2019/081556 WO2020114754A1 (fr) 2018-12-03 2019-11-15 Groupe de pompage
JP2021531570A JP2022514461A (ja) 2018-12-03 2019-11-15 ポンプユニット
TW108141543A TW202024482A (zh) 2018-12-03 2019-11-15 泵送單元
US17/292,263 US11493042B2 (en) 2018-12-03 2019-11-15 Pumping unit including a rough vacuum pump and a roots vacuum pump
CN201980077269.0A CN113167277A (zh) 2018-12-03 2019-11-15 泵送单元
KR1020217020815A KR20210095702A (ko) 2018-12-03 2019-11-15 펌핑 유닛
SG11202103583SA SG11202103583SA (en) 2018-12-03 2019-11-15 Pumping unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1872247A FR3089261B1 (fr) 2018-12-03 2018-12-03 Groupe de pompage

Publications (2)

Publication Number Publication Date
FR3089261A1 FR3089261A1 (fr) 2020-06-05
FR3089261B1 true FR3089261B1 (fr) 2022-05-13

Family

ID=66530146

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1872247A Active FR3089261B1 (fr) 2018-12-03 2018-12-03 Groupe de pompage

Country Status (9)

Country Link
US (1) US11493042B2 (fr)
EP (1) EP3891399A1 (fr)
JP (1) JP2022514461A (fr)
KR (1) KR20210095702A (fr)
CN (1) CN113167277A (fr)
FR (1) FR3089261B1 (fr)
SG (1) SG11202103583SA (fr)
TW (1) TW202024482A (fr)
WO (1) WO2020114754A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI815068B (zh) * 2020-12-25 2023-09-11 大陸商上海伊萊茨真空技術有限公司 基於冷凝器及羅茨真空泵的真空系統

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59308641D1 (de) * 1992-10-28 1998-07-09 Maag Pump Systems Ag Verfahren und Stufe zur Behandlung einer Thermoplastschmelze mit einer Zahnradpumpe
JP2000274370A (ja) * 1999-03-19 2000-10-03 Aisin Seiki Co Ltd 真空ポンプ装置
JP2004251291A (ja) * 2003-02-17 2004-09-09 Sankei Giken:Kk 制振継手
DE102006004525A1 (de) * 2006-02-01 2007-08-02 Leybold Vacuum Gmbh Wälzkolben-Vakuumpumpe
JP2007321655A (ja) * 2006-06-01 2007-12-13 Anlet Co Ltd ルーツ式真空ポンプ
JP2011163150A (ja) * 2010-02-05 2011-08-25 Toyota Industries Corp 水素ガスの排気方法及び真空ポンプ装置
JP5645229B2 (ja) * 2010-11-17 2014-12-24 株式会社アルバック 真空排気装置の連結構造及び真空排気システム
CN102121475A (zh) * 2010-12-14 2011-07-13 辽宁立天环保工程有限公司 三叶形水冷罗茨真空泵
CN202001304U (zh) * 2011-01-06 2011-10-05 浙江真空设备集团有限公司 中压差罗茨真空泵
DE102011000732B3 (de) * 2011-02-15 2012-08-09 Roediger Vacuum Gmbh Drehkolbenpumpe
GB2500603A (en) * 2012-03-26 2013-10-02 Edwards Ltd Vacuum pump stators and vacuum pumps
CN203867830U (zh) * 2014-05-13 2014-10-08 南通市威士真空设备有限公司 新型闭路循环真空机组
JP6616611B2 (ja) * 2015-07-23 2019-12-04 エドワーズ株式会社 排気システム
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation

Also Published As

Publication number Publication date
EP3891399A1 (fr) 2021-10-13
US20210381509A1 (en) 2021-12-09
CN113167277A (zh) 2021-07-23
SG11202103583SA (en) 2021-05-28
JP2022514461A (ja) 2022-02-14
KR20210095702A (ko) 2021-08-02
TW202024482A (zh) 2020-07-01
US11493042B2 (en) 2022-11-08
FR3089261A1 (fr) 2020-06-05
WO2020114754A1 (fr) 2020-06-11

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