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FR2979151B1 - Capteur de pression couple de maniere electrostatique - Google Patents

Capteur de pression couple de maniere electrostatique

Info

Publication number
FR2979151B1
FR2979151B1 FR1257804A FR1257804A FR2979151B1 FR 2979151 B1 FR2979151 B1 FR 2979151B1 FR 1257804 A FR1257804 A FR 1257804A FR 1257804 A FR1257804 A FR 1257804A FR 2979151 B1 FR2979151 B1 FR 2979151B1
Authority
FR
France
Prior art keywords
pressure sensor
electrostatically coupled
coupled pressure
electrostatically
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1257804A
Other languages
English (en)
Other versions
FR2979151A1 (fr
Inventor
Frederick James Barr
Stig Rune Lennart Tenghamn
Anders Goran Mattsson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PGS Geophysical AS
Original Assignee
PGS Geophysical AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PGS Geophysical AS filed Critical PGS Geophysical AS
Publication of FR2979151A1 publication Critical patent/FR2979151A1/fr
Application granted granted Critical
Publication of FR2979151B1 publication Critical patent/FR2979151B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/004—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by the use of counterbalancing forces
    • G01L11/008—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by the use of counterbalancing forces electrostatic or electromagnetic counterbalancing forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/186—Hydrophones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/20—Arrangements of receiving elements, e.g. geophone pattern
    • G01V1/201—Constructional details of seismic cables, e.g. streamers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Acoustics & Sound (AREA)
  • Environmental & Geological Engineering (AREA)
  • Geology (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geophysics (AREA)
  • Electromagnetism (AREA)
  • Measuring Fluid Pressure (AREA)
  • Geophysics And Detection Of Objects (AREA)
FR1257804A 2011-08-15 2012-08-14 Capteur de pression couple de maniere electrostatique Expired - Fee Related FR2979151B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/209,940 US8650963B2 (en) 2011-08-15 2011-08-15 Electrostatically coupled pressure sensor

Publications (2)

Publication Number Publication Date
FR2979151A1 FR2979151A1 (fr) 2013-02-22
FR2979151B1 true FR2979151B1 (fr) 2015-08-28

Family

ID=47427367

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1257804A Expired - Fee Related FR2979151B1 (fr) 2011-08-15 2012-08-14 Capteur de pression couple de maniere electrostatique

Country Status (6)

Country Link
US (1) US8650963B2 (fr)
AU (1) AU2012205212B2 (fr)
BR (1) BR102012020522A2 (fr)
FR (1) FR2979151B1 (fr)
GB (1) GB2493838B (fr)
NO (1) NO344623B1 (fr)

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US8299826B2 (en) * 2009-08-25 2012-10-30 Sitime Corporation Phase locked loop circuitry having switched resistor loop filter circuitry, and methods of operating same
US9927455B2 (en) * 2013-01-22 2018-03-27 Mingqiang Yi MEMS chip for wind speed measurements
US9321630B2 (en) 2013-02-20 2016-04-26 Pgs Geophysical As Sensor with vacuum-sealed cavity
US10591622B2 (en) 2013-10-30 2020-03-17 Pgs Geophysical As Reconfigurable seismic sensor cable
US9726143B2 (en) * 2014-04-07 2017-08-08 University Of Manitoba Ocean wave energy harvesting with a piezoelectric coupled buoy
US9645029B2 (en) * 2014-04-07 2017-05-09 Infineon Technology Ag Force feedback loop for pressure sensors
US10564306B2 (en) 2014-08-29 2020-02-18 Pgs Geophysical As Methods and systems to evaluate noise content in seismic data
DE102015212669B4 (de) 2015-07-07 2018-05-03 Infineon Technologies Ag Kapazitive mikroelektromechanische Vorrichtung und Verfahren zum Ausbilden einer kapazitiven mikroelektromechanischen Vorrichtung
CN106404158A (zh) * 2016-08-31 2017-02-15 北京越音速科技有限公司 水听器及换能方法、水听装置
US10557749B2 (en) 2016-10-19 2020-02-11 Pgs Geophysical As Isolating a portion of electric potentials generated by a hydrophone indicative of particle motion or pressure
WO2019118956A1 (fr) * 2017-12-15 2019-06-20 Pgs Geophysical As Mesure de pression et d'accélération sismique
WO2019234222A1 (fr) * 2018-06-08 2019-12-12 Pgs Geophysical As Réseau linéaire de transducteurs piézoélectriques pour flûtes marines remorquées
WO2020072904A1 (fr) 2018-10-05 2020-04-09 Knowles Electronics, Llc Transducteurs acoustiques à zone basse pression et diaphragmes comprenant une conformité améliorée
DE112019004979B4 (de) 2018-10-05 2025-10-02 Knowles Electronics, Llc Verfahren zur Herstellung von MEMS-Membranen, die Wellungen umfassen
DE112019004970T5 (de) 2018-10-05 2021-06-24 Knowles Electronics, Llc Mikrofonvorrichtung mit Eindringschutz
RU2717263C1 (ru) * 2019-06-13 2020-03-19 Федеральное Государственное Унитарное Предприятие "Всероссийский Научно-Исследовательский Институт Автоматики Им.Н.Л.Духова" (Фгуп "Внииа") Устройство для измерения инфразвуковых колебаний среды
CN111024213B (zh) * 2019-12-27 2021-03-30 安徽芯淮电子有限公司 柔性电容式振动传感器及其制作方法
US12240748B2 (en) 2021-03-21 2025-03-04 Knowles Electronics, Llc MEMS die and MEMS-based sensor
US11528546B2 (en) 2021-04-05 2022-12-13 Knowles Electronics, Llc Sealed vacuum MEMS die
US11540048B2 (en) 2021-04-16 2022-12-27 Knowles Electronics, Llc Reduced noise MEMS device with force feedback
US11649161B2 (en) 2021-07-26 2023-05-16 Knowles Electronics, Llc Diaphragm assembly with non-uniform pillar distribution
US11772961B2 (en) 2021-08-26 2023-10-03 Knowles Electronics, Llc MEMS device with perimeter barometric relief pierce
US11780726B2 (en) 2021-11-03 2023-10-10 Knowles Electronics, Llc Dual-diaphragm assembly having center constraint
CN115454279A (zh) * 2022-09-22 2022-12-09 深圳市汇顶科技股份有限公司 触控板及电子设备

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Also Published As

Publication number Publication date
BR102012020522A2 (pt) 2013-10-29
FR2979151A1 (fr) 2013-02-22
NO20120873A1 (no) 2013-02-18
NO344623B1 (no) 2020-02-10
GB201214528D0 (en) 2012-09-26
GB2493838A (en) 2013-02-20
AU2012205212B2 (en) 2015-11-26
AU2012205212A1 (en) 2013-03-07
US20130042695A1 (en) 2013-02-21
GB2493838B (en) 2016-09-14
US8650963B2 (en) 2014-02-18

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