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FR2950441B1 - Capteur optique dote de champ lateral pour la numerisation 3d - Google Patents

Capteur optique dote de champ lateral pour la numerisation 3d

Info

Publication number
FR2950441B1
FR2950441B1 FR0904528A FR0904528A FR2950441B1 FR 2950441 B1 FR2950441 B1 FR 2950441B1 FR 0904528 A FR0904528 A FR 0904528A FR 0904528 A FR0904528 A FR 0904528A FR 2950441 B1 FR2950441 B1 FR 2950441B1
Authority
FR
France
Prior art keywords
scanning
optical sensor
lateral field
lateral
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0904528A
Other languages
English (en)
Other versions
FR2950441A1 (fr
Inventor
Sabban Youssef Cohen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sciences Et Techniques Industrielles de la Lum Fr
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=41395513&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=FR2950441(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Individual filed Critical Individual
Priority to FR0904528A priority Critical patent/FR2950441B1/fr
Publication of FR2950441A1 publication Critical patent/FR2950441A1/fr
Application granted granted Critical
Publication of FR2950441B1 publication Critical patent/FR2950441B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR0904528A 2009-09-23 2009-09-23 Capteur optique dote de champ lateral pour la numerisation 3d Active FR2950441B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0904528A FR2950441B1 (fr) 2009-09-23 2009-09-23 Capteur optique dote de champ lateral pour la numerisation 3d

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0904528A FR2950441B1 (fr) 2009-09-23 2009-09-23 Capteur optique dote de champ lateral pour la numerisation 3d

Publications (2)

Publication Number Publication Date
FR2950441A1 FR2950441A1 (fr) 2011-03-25
FR2950441B1 true FR2950441B1 (fr) 2012-05-18

Family

ID=41395513

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0904528A Active FR2950441B1 (fr) 2009-09-23 2009-09-23 Capteur optique dote de champ lateral pour la numerisation 3d

Country Status (1)

Country Link
FR (1) FR2950441B1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103196568B (zh) * 2012-01-05 2017-05-24 株式会社三丰 波长检测器及使用波长检测器的接触探头
CN107063127A (zh) * 2015-12-03 2017-08-18 欧姆龙株式会社 光学测量装置
CN109073369A (zh) * 2016-03-25 2018-12-21 Fogale 纳米技术公司 用于以可变空间分辨率对晶片等对象进行2d/3d检测的共焦色差装置和方法
CN109073368A (zh) * 2016-03-25 2018-12-21 Fogale 纳米技术公司 用于晶片等对象的2d/3d检测的色差共焦装置和方法

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2489722B (en) 2011-04-06 2017-01-18 Precitec Optronik Gmbh Apparatus and method for determining a depth of a region having a high aspect ratio that protrudes into a surface of a semiconductor wafer
DE102011051146B3 (de) 2011-06-17 2012-10-04 Precitec Optronik Gmbh Prüfverfahren zum Prüfen einer Verbindungsschicht zwischen waferförmigen Proben
EP2667151A1 (fr) 2012-05-21 2013-11-27 Sysmelec SA Convertisseur chromatique d'altimétrie
DE102012111008B4 (de) 2012-11-15 2014-05-22 Precitec Optronik Gmbh Optisches Messverfahren und optische Messvorrichtung zum Erfassen einer Oberflächentopographie
AT514500B1 (de) * 2013-06-17 2018-06-15 Precitec Optronik Gmbh Optische Messvorrichtung und optisches Messverfahren
US10591279B2 (en) 2014-12-09 2020-03-17 Asentys Sas Integrated optical device for contactless measurement of altitudes and thicknesses
DE102015112769B4 (de) 2015-08-04 2022-09-08 Carl Zeiss Ag Vorrichtung und Verfahren zur optischen Probenuntersuchung
US10317344B2 (en) 2016-09-07 2019-06-11 Kla-Tencor Corporation Speed enhancement of chromatic confocal metrology
US10260941B2 (en) 2016-10-04 2019-04-16 Precitec Optronik Gmbh Chromatic confocal distance sensor
DE102016221630A1 (de) 2016-11-04 2018-05-09 Carl Zeiss Industrielle Messtechnik Gmbh Konfokal chromatischer Sensor zur Bestimmung von Koordinaten eines Messobjekts
US10234265B2 (en) 2016-12-12 2019-03-19 Precitec Optronik Gmbh Distance measuring device and method for measuring distances
DE102017126310A1 (de) 2017-11-09 2019-05-09 Precitec Optronik Gmbh Abstandsmessvorrichtung
DE102018201211B4 (de) 2018-01-26 2021-08-12 Carl Zeiss Industrielle Messtechnik Gmbh Chromatisch konfokaler Multispotsensor zur Bestimmung von Koordinaten eines Messobjekts
EP3567339A1 (fr) * 2018-05-10 2019-11-13 Nanovea, Inc. Dispositif et procédé de chromatisme axial de lumière blanche de balayage de surface 3d
DE102018118290A1 (de) * 2018-07-27 2020-01-30 Carl Zeiss Industrielle Messtechnik Gmbh Sensor zur Bestimmung von geometrischen Eigenschaften eines Messobjekts
DE102018130901A1 (de) 2018-12-04 2020-06-04 Precitec Optronik Gmbh Optische Messeinrichtung
KR20230011403A (ko) 2020-06-19 2023-01-20 프레시텍 옵트로닉 게엠베하 크로마틱 공초점 측정장치
US11997248B2 (en) 2020-12-18 2024-05-28 Yoed Abraham Fiber-optic 3D imaging
US11162783B1 (en) * 2020-12-18 2021-11-02 Yoed Abraham Fiber-optic 3D imaging
DE102022207032A1 (de) * 2022-07-11 2024-01-11 Micro-Epsilon Optronic Gmbh Einrichtung, Vorrichtung und Verfahren zur konfokal-chromatischen Abstands- und/ oder Dickenmessung
CN115950364B (zh) * 2023-02-27 2026-01-20 珠海横琴华辰微科技有限公司 一种光谱黑洞共焦测量装置及测量方法
CN116625246A (zh) * 2023-05-04 2023-08-22 中国工程物理研究院激光聚变研究中心 一种新型多模式轴向色差共焦传感器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1245987B1 (fr) * 1988-07-13 2008-01-23 Optiscan Pty Ltd Microscope confocal à balayage
FR2738343B1 (fr) * 1995-08-30 1997-10-24 Cohen Sabban Joseph Dispositif de microstratigraphie optique
US7450243B2 (en) * 2006-07-10 2008-11-11 The Board Of Trustees Of The University Of Illinois Volumetric endoscopic coherence microscopy using a coherent fiber bundle

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103196568B (zh) * 2012-01-05 2017-05-24 株式会社三丰 波长检测器及使用波长检测器的接触探头
CN107063127A (zh) * 2015-12-03 2017-08-18 欧姆龙株式会社 光学测量装置
CN107063127B (zh) * 2015-12-03 2020-06-30 欧姆龙株式会社 光学测量装置
CN109073369A (zh) * 2016-03-25 2018-12-21 Fogale 纳米技术公司 用于以可变空间分辨率对晶片等对象进行2d/3d检测的共焦色差装置和方法
CN109073368A (zh) * 2016-03-25 2018-12-21 Fogale 纳米技术公司 用于晶片等对象的2d/3d检测的色差共焦装置和方法

Also Published As

Publication number Publication date
FR2950441A1 (fr) 2011-03-25

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Owner name: SCIENCES ET TECHNIQUES INDUSTRIELLES DE LA LUM, FR

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