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FR2896515B1 - METHOD OF NITRIDING BY IONIC IMPLANTATION OF A METAL PART AND DEVICE FOR IMPLEMENTING THE METHOD - Google Patents

METHOD OF NITRIDING BY IONIC IMPLANTATION OF A METAL PART AND DEVICE FOR IMPLEMENTING THE METHOD

Info

Publication number
FR2896515B1
FR2896515B1 FR0701023A FR0701023A FR2896515B1 FR 2896515 B1 FR2896515 B1 FR 2896515B1 FR 0701023 A FR0701023 A FR 0701023A FR 0701023 A FR0701023 A FR 0701023A FR 2896515 B1 FR2896515 B1 FR 2896515B1
Authority
FR
France
Prior art keywords
nitriding
implementing
metal part
ionic implantation
implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0701023A
Other languages
French (fr)
Other versions
FR2896515A1 (en
Inventor
Frederic Guernalec
Denis Busardo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ionics France SA
Original Assignee
Quertech Ingenierie SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR0401047A external-priority patent/FR2876390A1/en
Application filed by Quertech Ingenierie SA filed Critical Quertech Ingenierie SA
Priority to FR0701023A priority Critical patent/FR2896515B1/en
Publication of FR2896515A1 publication Critical patent/FR2896515A1/en
Application granted granted Critical
Publication of FR2896515B1 publication Critical patent/FR2896515B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
FR0701023A 2004-02-04 2007-02-13 METHOD OF NITRIDING BY IONIC IMPLANTATION OF A METAL PART AND DEVICE FOR IMPLEMENTING THE METHOD Active FR2896515B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0701023A FR2896515B1 (en) 2004-02-04 2007-02-13 METHOD OF NITRIDING BY IONIC IMPLANTATION OF A METAL PART AND DEVICE FOR IMPLEMENTING THE METHOD

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0401047A FR2876390A1 (en) 2004-02-04 2004-02-04 Aluminium alloy component ion implantation system for nitriding uses electronic cyclotronic resonance source producing multi-energy ions
FR0701023A FR2896515B1 (en) 2004-02-04 2007-02-13 METHOD OF NITRIDING BY IONIC IMPLANTATION OF A METAL PART AND DEVICE FOR IMPLEMENTING THE METHOD

Publications (2)

Publication Number Publication Date
FR2896515A1 FR2896515A1 (en) 2007-07-27
FR2896515B1 true FR2896515B1 (en) 2008-06-13

Family

ID=38282907

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0701023A Active FR2896515B1 (en) 2004-02-04 2007-02-13 METHOD OF NITRIDING BY IONIC IMPLANTATION OF A METAL PART AND DEVICE FOR IMPLEMENTING THE METHOD

Country Status (1)

Country Link
FR (1) FR2896515B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2949236B1 (en) 2009-08-19 2011-10-28 Aircelle Sa ION IMPLANTATION METHOD FOR PRODUCING A HYDROPHOBIC SURFACE
FR2962138B1 (en) * 2010-07-02 2013-12-27 Valois Sas METHOD FOR SURFACE TREATMENT OF A FLUID PRODUCT DISPENSING DEVICE
EP2588642A2 (en) * 2010-07-02 2013-05-08 Aptar France SAS Method for the surface treatment of a fluid product dispensing device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60211061A (en) * 1984-04-05 1985-10-23 Toyota Central Res & Dev Lab Inc Ion-nitrifying method of aluminum material
JPS61295371A (en) * 1985-06-24 1986-12-26 Nippon Light Metal Co Ltd Method for manufacturing aluminum material with aluminum nitride layer
FR2718568B1 (en) * 1994-04-06 1996-07-05 France Telecom High energy implantation method from a low or medium current type implanter and corresponding devices.
JP3284886B2 (en) * 1996-06-20 2002-05-20 株式会社日立製作所 Ion source and ion implanter
WO2000026431A1 (en) * 1998-11-03 2000-05-11 Epion Corporation Gas cluster ion beams for formation of nitride films
EP1288329A1 (en) * 2001-09-03 2003-03-05 C C R GmbH Beschichtungstechnologie Process for fabricating of thin nitride- or oxide layers

Also Published As

Publication number Publication date
FR2896515A1 (en) 2007-07-27

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Legal Events

Date Code Title Description
RN Application for restoration

Effective date: 20120109

FC Decision of inpi director general to approve request for restoration

Effective date: 20120124

PLFP Fee payment

Year of fee payment: 12

CA Change of address

Effective date: 20150212

CD Change of name or company name

Owner name: QUERTECH, FR

Effective date: 20150212

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Year of fee payment: 13

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