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FR2864795B1 - Procede de traitement des gaz par des decharges hautes frequence - Google Patents

Procede de traitement des gaz par des decharges hautes frequence

Info

Publication number
FR2864795B1
FR2864795B1 FR0450016A FR0450016A FR2864795B1 FR 2864795 B1 FR2864795 B1 FR 2864795B1 FR 0450016 A FR0450016 A FR 0450016A FR 0450016 A FR0450016 A FR 0450016A FR 2864795 B1 FR2864795 B1 FR 2864795B1
Authority
FR
France
Prior art keywords
high frequency
treating gases
frequency discharges
discharges
gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0450016A
Other languages
English (en)
Other versions
FR2864795A1 (fr
Inventor
Michel Moisan
Jean Christophe Rostaing
Martine Carre
Khan Chi Tran
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0450016A priority Critical patent/FR2864795B1/fr
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to PCT/FR2004/050751 priority patent/WO2005075058A1/fr
Priority to JP2006548334A priority patent/JP2007517650A/ja
Priority to EP04816598A priority patent/EP1703961A1/fr
Priority to KR1020067013582A priority patent/KR20060128905A/ko
Priority to US10/585,170 priority patent/US20070284242A1/en
Priority to SG200804063-6A priority patent/SG143278A1/en
Publication of FR2864795A1 publication Critical patent/FR2864795A1/fr
Application granted granted Critical
Publication of FR2864795B1 publication Critical patent/FR2864795B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B01D2257/2066—Fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
FR0450016A 2004-01-06 2004-01-06 Procede de traitement des gaz par des decharges hautes frequence Expired - Fee Related FR2864795B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR0450016A FR2864795B1 (fr) 2004-01-06 2004-01-06 Procede de traitement des gaz par des decharges hautes frequence
JP2006548334A JP2007517650A (ja) 2004-01-06 2004-12-23 高周波放電によるガス処理方法
EP04816598A EP1703961A1 (fr) 2004-01-06 2004-12-23 Procede de traitement des gaz par des decharges haute frequence
KR1020067013582A KR20060128905A (ko) 2004-01-06 2004-12-23 고주파 방전을 사용한 가스 처리 방법
PCT/FR2004/050751 WO2005075058A1 (fr) 2004-01-06 2004-12-23 Procede de traitement des gaz par des decharges haute frequence
US10/585,170 US20070284242A1 (en) 2004-01-06 2004-12-23 Method For Treating Gases By High Frequency Discharges
SG200804063-6A SG143278A1 (en) 2004-01-06 2004-12-23 Method for the treatment of gases using high-frequency discharges

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0450016A FR2864795B1 (fr) 2004-01-06 2004-01-06 Procede de traitement des gaz par des decharges hautes frequence

Publications (2)

Publication Number Publication Date
FR2864795A1 FR2864795A1 (fr) 2005-07-08
FR2864795B1 true FR2864795B1 (fr) 2008-04-18

Family

ID=34673923

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0450016A Expired - Fee Related FR2864795B1 (fr) 2004-01-06 2004-01-06 Procede de traitement des gaz par des decharges hautes frequence

Country Status (7)

Country Link
US (1) US20070284242A1 (fr)
EP (1) EP1703961A1 (fr)
JP (1) JP2007517650A (fr)
KR (1) KR20060128905A (fr)
FR (1) FR2864795B1 (fr)
SG (1) SG143278A1 (fr)
WO (1) WO2005075058A1 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2888519B1 (fr) * 2005-07-12 2007-10-19 Air Liquide Procede de traitement, par plasma, d'effluents gazeux
EP1904664A2 (fr) * 2005-07-12 2008-04-02 Air Liquide Electronics Systems Procede de traitement par plasma d'effluents gazeux
RU2435874C2 (ru) * 2006-04-14 2011-12-10 СИЛИКА ТЕК, ЭлЭлСи Установка плазменного осаждения и способ изготовления солнечных элементов
EP2173268B1 (fr) * 2007-06-29 2011-09-28 Spinealign Medical, Inc. Dispositifs permettant de stabiliser un os compatible pour une utilisation avec des vis à os
WO2012028187A1 (fr) * 2010-09-02 2012-03-08 Jean-Michel Beaudouin Dispositif et procédé de traitement d'un milieu gazeux et utilisation du dispositif pour le traitement d'un milieu gazeux, d'un liquide, d'un solide, d'une surface ou d'une de leurs associations
GB2497273B (en) * 2011-11-19 2017-09-13 Edwards Ltd Apparatus for treating a gas stream
US9279722B2 (en) 2012-04-30 2016-03-08 Agilent Technologies, Inc. Optical emission system including dichroic beam combiner
CN103237402B (zh) * 2013-05-14 2015-10-21 哈尔滨工业大学 大气等离子体加工装置
CN103237405B (zh) * 2013-05-14 2015-05-06 哈尔滨工业大学 一体化等离子体发生装置
KR101418358B1 (ko) * 2013-05-15 2014-07-09 주식회사 케이피씨 스크러버의 하이브리드 연소챔버
KR101448449B1 (ko) * 2014-01-13 2014-10-13 주식회사 테라텍 고밀도 구속 플라즈마 소스를 이용한 과불화탄소 및 유해 가스 분해 장치
CN103953474B (zh) * 2014-04-22 2016-11-23 中国科学院西安光学精密机械研究所 定向自旋等离子体助燃系统
US10187966B2 (en) * 2015-07-24 2019-01-22 Applied Materials, Inc. Method and apparatus for gas abatement
WO2017018930A1 (fr) * 2015-07-29 2017-02-02 Semb-Eco R&D Pte Ltd. Procédé et système pour appliquer une onde électromagnétique à fréquence temporellement variable superposée à un objet ou une région cible
CN110519904B (zh) * 2019-08-16 2020-09-29 中国地质大学（武汉） 一种基于集磁器的icp等离子源形成装置及方法
CN114682064B (zh) * 2022-04-08 2023-02-17 武汉大学 一种sf6废气的射频放电降解方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4883570A (en) * 1987-06-08 1989-11-28 Research-Cottrell, Inc. Apparatus and method for enhanced chemical processing in high pressure and atmospheric plasmas produced by high frequency electromagnetic waves
JPH01297141A (ja) * 1988-05-25 1989-11-30 Canon Inc マイクロ波プラズマ処理装置
US5187344A (en) * 1988-11-10 1993-02-16 Agency Of Industrial Science And Technology Apparatus for decomposing halogenated organic compound
US5256854A (en) * 1990-12-18 1993-10-26 Massachusetts Institute Of Technology Tunable plasma method and apparatus using radio frequency heating and electron beam irradiation
JP3877082B2 (ja) * 1995-08-10 2007-02-07 東京エレクトロン株式会社 研磨装置及び研磨方法
EP0792091B1 (fr) * 1995-12-27 2002-03-13 Nippon Telegraph And Telephone Corporation Procédé d'analyse élémentaire
FR2751565B1 (fr) * 1996-07-26 1998-09-04 Air Liquide Procede et installation de traitement de gaz perfluores et hydrofluorocarbones en vue de leur destruction
US6277347B1 (en) * 1997-02-24 2001-08-21 Applied Materials, Inc. Use of ozone in process effluent abatement
FR2764163B1 (fr) * 1997-05-30 1999-08-13 Centre Nat Rech Scient Torche a plasma inductif a injecteur de reactif
SE516336C2 (sv) * 1999-04-28 2001-12-17 Hana Barankova Apparat för plasmabehandling av ytor
US6303007B1 (en) * 1999-11-15 2001-10-16 Archimedes Technology Group, Inc. Plasma injector
AU3926901A (en) * 2000-02-24 2001-09-03 Ccr Gmbh Beschichtungstechnologie High frequency plasma source
US6620394B2 (en) * 2001-06-15 2003-09-16 Han Sup Uhm Emission control for perfluorocompound gases by microwave plasma torch
DE10159152A1 (de) * 2001-12-01 2003-06-12 Mtu Aero Engines Gmbh Verfahren zur Gasreinigung

Also Published As

Publication number Publication date
JP2007517650A (ja) 2007-07-05
EP1703961A1 (fr) 2006-09-27
FR2864795A1 (fr) 2005-07-08
US20070284242A1 (en) 2007-12-13
WO2005075058A1 (fr) 2005-08-18
SG143278A1 (en) 2008-06-27
KR20060128905A (ko) 2006-12-14

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20140930