FR2712691B1 - Dispositif de mesure par interférométrie laser. - Google Patents
Dispositif de mesure par interférométrie laser.Info
- Publication number
- FR2712691B1 FR2712691B1 FR9313886A FR9313886A FR2712691B1 FR 2712691 B1 FR2712691 B1 FR 2712691B1 FR 9313886 A FR9313886 A FR 9313886A FR 9313886 A FR9313886 A FR 9313886A FR 2712691 B1 FR2712691 B1 FR 2712691B1
- Authority
- FR
- France
- Prior art keywords
- parallel
- reflecting
- targets
- separating
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005259 measurement Methods 0.000 title abstract 2
- 238000004556 laser interferometry Methods 0.000 title 1
- 230000001427 coherent effect Effects 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02061—Reduction or prevention of effects of tilts or misalignment
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9313886A FR2712691B1 (fr) | 1993-11-19 | 1993-11-19 | Dispositif de mesure par interférométrie laser. |
| PCT/FR1994/001340 WO1995014210A1 (fr) | 1993-11-19 | 1994-11-16 | Dispositif de mesure par interferometrie laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9313886A FR2712691B1 (fr) | 1993-11-19 | 1993-11-19 | Dispositif de mesure par interférométrie laser. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2712691A1 FR2712691A1 (fr) | 1995-05-24 |
| FR2712691B1 true FR2712691B1 (fr) | 1995-12-22 |
Family
ID=9453058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR9313886A Expired - Fee Related FR2712691B1 (fr) | 1993-11-19 | 1993-11-19 | Dispositif de mesure par interférométrie laser. |
Country Status (2)
| Country | Link |
|---|---|
| FR (1) | FR2712691B1 (fr) |
| WO (1) | WO1995014210A1 (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH694343A5 (de) * | 1999-07-28 | 2004-11-30 | Leica Geosystems Ag | Verfahren und Vorrichtung zur Distanzmessung. |
| US8760786B2 (en) * | 2012-06-25 | 2014-06-24 | Oracle International Corporation | Lateral tape motion detector |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1251040B (fr) * | 1967-09-28 | |||
| FR1300514A (fr) * | 1961-09-14 | 1962-08-03 | Zeiss Jena Veb Carl | Dispositif pour la formation d'une valeur expérimentale par interférence, applicable à des installations de mesure et de commande |
| US4278351A (en) * | 1979-05-09 | 1981-07-14 | Nasa | Interferometer |
| DD158187A3 (de) * | 1980-06-30 | 1983-01-05 | Karlheinz Bechstein | Zweistufeninterferometer |
| DE3174649D1 (en) * | 1981-11-25 | 1986-06-19 | Ibm Deutschland | Phase balancing of an optical wave front |
-
1993
- 1993-11-19 FR FR9313886A patent/FR2712691B1/fr not_active Expired - Fee Related
-
1994
- 1994-11-16 WO PCT/FR1994/001340 patent/WO1995014210A1/fr not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO1995014210A1 (fr) | 1995-05-26 |
| FR2712691A1 (fr) | 1995-05-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |