[go: up one dir, main page]

FR2712691B1 - Dispositif de mesure par interférométrie laser. - Google Patents

Dispositif de mesure par interférométrie laser.

Info

Publication number
FR2712691B1
FR2712691B1 FR9313886A FR9313886A FR2712691B1 FR 2712691 B1 FR2712691 B1 FR 2712691B1 FR 9313886 A FR9313886 A FR 9313886A FR 9313886 A FR9313886 A FR 9313886A FR 2712691 B1 FR2712691 B1 FR 2712691B1
Authority
FR
France
Prior art keywords
parallel
reflecting
targets
separating
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9313886A
Other languages
English (en)
Other versions
FR2712691A1 (fr
Inventor
Bernard Fondeur
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR9313886A priority Critical patent/FR2712691B1/fr
Priority to PCT/FR1994/001340 priority patent/WO1995014210A1/fr
Publication of FR2712691A1 publication Critical patent/FR2712691A1/fr
Application granted granted Critical
Publication of FR2712691B1 publication Critical patent/FR2712691B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056Passive reduction of errors
    • G01B9/02061Reduction or prevention of effects of tilts or misalignment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR9313886A 1993-11-19 1993-11-19 Dispositif de mesure par interférométrie laser. Expired - Fee Related FR2712691B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9313886A FR2712691B1 (fr) 1993-11-19 1993-11-19 Dispositif de mesure par interférométrie laser.
PCT/FR1994/001340 WO1995014210A1 (fr) 1993-11-19 1994-11-16 Dispositif de mesure par interferometrie laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9313886A FR2712691B1 (fr) 1993-11-19 1993-11-19 Dispositif de mesure par interférométrie laser.

Publications (2)

Publication Number Publication Date
FR2712691A1 FR2712691A1 (fr) 1995-05-24
FR2712691B1 true FR2712691B1 (fr) 1995-12-22

Family

ID=9453058

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9313886A Expired - Fee Related FR2712691B1 (fr) 1993-11-19 1993-11-19 Dispositif de mesure par interférométrie laser.

Country Status (2)

Country Link
FR (1) FR2712691B1 (fr)
WO (1) WO1995014210A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH694343A5 (de) * 1999-07-28 2004-11-30 Leica Geosystems Ag Verfahren und Vorrichtung zur Distanzmessung.
US8760786B2 (en) * 2012-06-25 2014-06-24 Oracle International Corporation Lateral tape motion detector

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1251040B (fr) * 1967-09-28
FR1300514A (fr) * 1961-09-14 1962-08-03 Zeiss Jena Veb Carl Dispositif pour la formation d'une valeur expérimentale par interférence, applicable à des installations de mesure et de commande
US4278351A (en) * 1979-05-09 1981-07-14 Nasa Interferometer
DD158187A3 (de) * 1980-06-30 1983-01-05 Karlheinz Bechstein Zweistufeninterferometer
DE3174649D1 (en) * 1981-11-25 1986-06-19 Ibm Deutschland Phase balancing of an optical wave front

Also Published As

Publication number Publication date
WO1995014210A1 (fr) 1995-05-26
FR2712691A1 (fr) 1995-05-24

Similar Documents

Publication Publication Date Title
US5552883A (en) Noncontact position measurement system using optical sensors
US5106192A (en) Polarization insensitive absolute interferometeric method and apparatus for measuring position angular bearing and optical paths
US20130083323A1 (en) Photoelectric autocollimation method and apparatus based on beam drift compensation
JP2755757B2 (ja) 変位及び角度の測定方法
ES374972A1 (es) Sensor de movimiento sin contacto.
EP0657713A3 (fr) Interféromètre et réfractomètre combinés
US4093338A (en) Apparatus for piecewise generation of grating-like patterns
FR2712691B1 (fr) Dispositif de mesure par interférométrie laser.
GB1471386A (en) Interferometer for testing telescope optics
KR920008494A (ko) 실제 대지 속도 감지기
US4586821A (en) Optical angular/linear motion detector
GB1463983A (en) Laser doppler velocimeter
US4687332A (en) Self-referencing scan-shear interferometer
US3419331A (en) Single and double beam interferometer means
ATE131927T1 (de) Verfahren und vorrichtung zur determination des oberflächenprofils von diffus-reflektierenden objekten
GB1468839A (en) Device for measuring the angular deviation of a reflected laser beam using heterodyne detection
JPS60205383A (ja) 距離測定装置における測定対象定点追尾方法
GB1183492A (en) Improvements in or relating to Laser Detector Systems
SU909637A1 (ru) Устройство дл интерферометрического измерени высоких скоростей смещени поверхности
JPS6454403A (en) Beam splitter
SU879289A1 (ru) Интерферометр
ATE136364T1 (de) Vorrichtung zum messen der rauhigkeit eines sich bewegenden metallerzeugnisses
Wissinger Sensing and control for large optical systems
GB1512037A (en) Optical focusing system
SU1730531A1 (ru) Двухкоординатный измеритель перемещений

Legal Events

Date Code Title Description
ST Notification of lapse