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FR2795821B1 - CHEMICAL SENSOR OF METAL OXIDE GAS AND MANUFACTURING METHOD THEREOF - Google Patents

CHEMICAL SENSOR OF METAL OXIDE GAS AND MANUFACTURING METHOD THEREOF

Info

Publication number
FR2795821B1
FR2795821B1 FR9908749A FR9908749A FR2795821B1 FR 2795821 B1 FR2795821 B1 FR 2795821B1 FR 9908749 A FR9908749 A FR 9908749A FR 9908749 A FR9908749 A FR 9908749A FR 2795821 B1 FR2795821 B1 FR 2795821B1
Authority
FR
France
Prior art keywords
manufacturing
metal oxide
chemical sensor
oxide gas
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9908749A
Other languages
French (fr)
Other versions
FR2795821A1 (en
Inventor
Celine Nayral
Bruno Chaudret
Andre Maisonnat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microchemical Systems SA
Original Assignee
Microchemical Systems SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microchemical Systems SA filed Critical Microchemical Systems SA
Priority to FR9908749A priority Critical patent/FR2795821B1/en
Priority to DE60004843T priority patent/DE60004843T2/en
Priority to PCT/CH2000/000349 priority patent/WO2001002844A1/en
Priority to EP00936588A priority patent/EP1192452B1/en
Publication of FR2795821A1 publication Critical patent/FR2795821A1/en
Application granted granted Critical
Publication of FR2795821B1 publication Critical patent/FR2795821B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
FR9908749A 1999-07-02 1999-07-02 CHEMICAL SENSOR OF METAL OXIDE GAS AND MANUFACTURING METHOD THEREOF Expired - Fee Related FR2795821B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR9908749A FR2795821B1 (en) 1999-07-02 1999-07-02 CHEMICAL SENSOR OF METAL OXIDE GAS AND MANUFACTURING METHOD THEREOF
DE60004843T DE60004843T2 (en) 1999-07-02 2000-06-28 METAL OXIDE CHEMICAL GAS SENSOR AND RELATED PRODUCTION METHOD
PCT/CH2000/000349 WO2001002844A1 (en) 1999-07-02 2000-06-28 Metal oxide chemical gas sensor and method for making same
EP00936588A EP1192452B1 (en) 1999-07-02 2000-06-28 Metal oxide chemical gas sensor and method for making same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9908749A FR2795821B1 (en) 1999-07-02 1999-07-02 CHEMICAL SENSOR OF METAL OXIDE GAS AND MANUFACTURING METHOD THEREOF

Publications (2)

Publication Number Publication Date
FR2795821A1 FR2795821A1 (en) 2001-01-05
FR2795821B1 true FR2795821B1 (en) 2001-09-14

Family

ID=9547793

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9908749A Expired - Fee Related FR2795821B1 (en) 1999-07-02 1999-07-02 CHEMICAL SENSOR OF METAL OXIDE GAS AND MANUFACTURING METHOD THEREOF

Country Status (1)

Country Link
FR (1) FR2795821B1 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345213A (en) * 1992-10-26 1994-09-06 The United States Of America, As Represented By The Secretary Of Commerce Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation
GB2321336B (en) * 1997-01-15 2001-07-25 Univ Warwick Gas-sensing semiconductor devices

Also Published As

Publication number Publication date
FR2795821A1 (en) 2001-01-05

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Legal Events

Date Code Title Description
TQ Partial transmission of property
ST Notification of lapse
AU Other act affecting the ownership or exploitation of an industrial property right