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FR2611085B1 - Procede de gravure des ouvertures de contact dans un circuit integre - Google Patents

Procede de gravure des ouvertures de contact dans un circuit integre

Info

Publication number
FR2611085B1
FR2611085B1 FR8701867A FR8701867A FR2611085B1 FR 2611085 B1 FR2611085 B1 FR 2611085B1 FR 8701867 A FR8701867 A FR 8701867A FR 8701867 A FR8701867 A FR 8701867A FR 2611085 B1 FR2611085 B1 FR 2611085B1
Authority
FR
France
Prior art keywords
integrated circuit
contact openings
engraving contact
engraving
openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8701867A
Other languages
English (en)
Other versions
FR2611085A1 (fr
Inventor
Didier-Nee-
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thomson Semiconducteurs SA
Original Assignee
Thomson Semiconducteurs SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson Semiconducteurs SA filed Critical Thomson Semiconducteurs SA
Priority to FR8701867A priority Critical patent/FR2611085B1/fr
Publication of FR2611085A1 publication Critical patent/FR2611085A1/fr
Application granted granted Critical
Publication of FR2611085B1 publication Critical patent/FR2611085B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H10W20/081—
    • H10P50/242—
FR8701867A 1987-02-13 1987-02-13 Procede de gravure des ouvertures de contact dans un circuit integre Expired FR2611085B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8701867A FR2611085B1 (fr) 1987-02-13 1987-02-13 Procede de gravure des ouvertures de contact dans un circuit integre

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8701867A FR2611085B1 (fr) 1987-02-13 1987-02-13 Procede de gravure des ouvertures de contact dans un circuit integre

Publications (2)

Publication Number Publication Date
FR2611085A1 FR2611085A1 (fr) 1988-08-19
FR2611085B1 true FR2611085B1 (fr) 1989-11-10

Family

ID=9347910

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8701867A Expired FR2611085B1 (fr) 1987-02-13 1987-02-13 Procede de gravure des ouvertures de contact dans un circuit integre

Country Status (1)

Country Link
FR (1) FR2611085B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2746077B2 (ja) * 1993-09-02 1998-04-28 日本電気株式会社 半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2449731A1 (de) * 1973-12-03 1975-06-05 Hewlett Packard Co Aetzverfahren

Also Published As

Publication number Publication date
FR2611085A1 (fr) 1988-08-19

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Legal Events

Date Code Title Description
ST Notification of lapse