[go: up one dir, main page]

FR2689975B1 - Capteur de pression et son procede de fabrication. - Google Patents

Capteur de pression et son procede de fabrication.

Info

Publication number
FR2689975B1
FR2689975B1 FR939304194A FR9304194A FR2689975B1 FR 2689975 B1 FR2689975 B1 FR 2689975B1 FR 939304194 A FR939304194 A FR 939304194A FR 9304194 A FR9304194 A FR 9304194A FR 2689975 B1 FR2689975 B1 FR 2689975B1
Authority
FR
France
Prior art keywords
manufacturing
pressure sensor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR939304194A
Other languages
English (en)
Other versions
FR2689975A1 (fr
Inventor
Jes Valdemar Vogler
Jurgen Werner Adelhelm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Danfoss AS
Original Assignee
Danfoss AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Danfoss AS filed Critical Danfoss AS
Publication of FR2689975A1 publication Critical patent/FR2689975A1/fr
Application granted granted Critical
Publication of FR2689975B1 publication Critical patent/FR2689975B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
FR939304194A 1992-04-08 1993-04-08 Capteur de pression et son procede de fabrication. Expired - Lifetime FR2689975B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4211816A DE4211816C2 (de) 1992-04-08 1992-04-08 Drucksensor

Publications (2)

Publication Number Publication Date
FR2689975A1 FR2689975A1 (fr) 1993-10-15
FR2689975B1 true FR2689975B1 (fr) 1994-07-01

Family

ID=6456398

Family Applications (1)

Application Number Title Priority Date Filing Date
FR939304194A Expired - Lifetime FR2689975B1 (fr) 1992-04-08 1993-04-08 Capteur de pression et son procede de fabrication.

Country Status (8)

Country Link
US (1) US5333507A (fr)
JP (1) JP2670413B2 (fr)
CH (1) CH684808A5 (fr)
DE (1) DE4211816C2 (fr)
DK (1) DK174311B1 (fr)
FR (1) FR2689975B1 (fr)
GB (1) GB2266152B (fr)
NO (1) NO308921B1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5752918A (en) 1993-06-30 1998-05-19 Medex, Inc. Modular medical pressure transducer
US5868678A (en) 1993-06-30 1999-02-09 Medex, Inc. Two-part medical pressure transducer with diaphragm stand-offs
CH689701A5 (fr) * 1994-03-02 1999-08-31 Suisse Electronique Microtech Procédé de fixation d'un dispositif sensible sur un support et produit obtenu par le procédé.
US5438877A (en) * 1994-06-13 1995-08-08 Motorola, Inc. Pressure sensor package for reducing stress-induced measurement error
US6076409A (en) * 1997-12-22 2000-06-20 Rosemount Aerospace, Inc. Media compatible packages for pressure sensing devices
US6311561B1 (en) 1997-12-22 2001-11-06 Rosemount Aerospace Inc. Media compatible pressure sensor
DE10223588B4 (de) * 2002-05-27 2013-08-01 Endress + Hauser Gmbh + Co. Kg Druckmessgerät und Verfahren zu seiner Herstellung
WO2004053449A1 (fr) * 2002-12-12 2004-06-24 Danfoss A/S Capteur de pression
WO2008061532A2 (fr) * 2006-11-22 2008-05-29 Danfoss A/S Capteur de pression
JP5089468B2 (ja) 2008-04-09 2012-12-05 株式会社Ｐｆｕ 給送装置
FR3012604B1 (fr) * 2013-10-25 2017-03-03 Auxitrol Sa Capteur de pression comprenant une structure de controle d'une couche d'adhesif resistante aux variations de temperatures

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3712143A (en) * 1971-12-21 1973-01-23 Honeywell Inc Differential pressure responsive apparatus
US4322980A (en) * 1979-11-08 1982-04-06 Hitachi, Ltd. Semiconductor pressure sensor having plural pressure sensitive diaphragms and method
DE3137219A1 (de) * 1981-09-18 1983-04-07 Robert Bosch Gmbh, 7000 Stuttgart Kapazitiver drucksensor und verfahren zu seiner herstellung
JPS58180927A (ja) * 1982-04-16 1983-10-22 Toshiba Corp 半導体感圧素子の保護装置
US4502335A (en) * 1983-05-04 1985-03-05 Honeywell Inc. Fluid pressure transmitter assembly
EP0140992B1 (fr) * 1983-11-10 1988-05-25 Kristal Instrumente AG Elément transducteur, méthode de sa fabrication et utilisation pour un capteur de pression
JPS62203381A (ja) * 1986-03-03 1987-09-08 Mitsubishi Electric Corp 半導体圧力検出装置
FI84401C (fi) * 1987-05-08 1991-11-25 Vaisala Oy Kapacitiv tryckgivarkonstruktion.
DE3777188D1 (de) * 1987-11-27 1992-04-09 Kristal Instr Ag Messzelle, insbesondere fuer relativ- und differenzdruckmessungen.
DE3937522A1 (de) * 1989-11-10 1991-05-16 Texas Instruments Deutschland Mit einem traegerelement verbundener halbleiter-drucksensor
US5186055A (en) * 1991-06-03 1993-02-16 Eaton Corporation Hermetic mounting system for a pressure transducer

Also Published As

Publication number Publication date
GB2266152A (en) 1993-10-20
US5333507A (en) 1994-08-02
JP2670413B2 (ja) 1997-10-29
CH684808A5 (de) 1994-12-30
GB9307120D0 (en) 1993-05-26
NO931051L (no) 1993-10-11
JPH0618344A (ja) 1994-01-25
NO308921B1 (no) 2000-11-13
GB2266152B (en) 1996-01-24
DE4211816C2 (de) 1995-08-31
DK174311B1 (da) 2002-12-02
DK37793A (da) 1993-10-09
FR2689975A1 (fr) 1993-10-15
DE4211816A1 (de) 1993-10-14
NO931051D0 (no) 1993-03-23
DK37793D0 (da) 1993-03-31

Similar Documents

Publication Publication Date Title
FR2732467B1 (fr) Capteur d'acceleration et procede de fabrication d'un tel capteur
FR2745090B1 (fr) Capteur de quantite physique en semi-conducteur et son procede de fabrication
EP1329960A4 (fr) Capteur de pression et son procede de fabrication
FR2694641B1 (fr) Materiau photodispersant et son procede de fabrication.
FR2704949B1 (fr) Procédé pour la fabrication de capteurs et capteur fabriqué selon ce procédé.
FR2746919B1 (fr) Capteur a jauge de contrainte utilisant l'effet piezoresistif et son procede de fabrication
EP1055920A4 (fr) Capteur de pression a semi-conducteurs et son procede de fabrication
FR2650892B1 (fr) Capteur d'humidite capacitif et procede de fabrication d'un tel capteur
FR2764113B1 (fr) Dispositif capteur et son procede de fabrication
DE59001567D1 (de) Drucksensor und dessen herstellverfahren.
FR2679466B1 (fr) Membrane de filtration et procede de fabrication.
EP0770862A4 (fr) Element de capteur de temperature, capteur de temperature comportant cet element et procede de fabrication dudit element de capteur de temperature
KR950700354A (ko) 압감성 막 및 이것의 제조 방법(Pressure sensitive Membrane and Method Therefor)
FR2674627B1 (fr) Capteur de pression resonant.
EP0965826A4 (fr) Capteur de temperature et procede de fabrication
EP0618435A3 (fr) Capteur de pression capacitif.
FR2689975B1 (fr) Capteur de pression et son procede de fabrication.
EP0767501A4 (fr) Capteur de pression a semi-conducteur et procede de production de ce dernier
FR2643148B1 (fr) Capteur de pression du type semiconducteur sur isolant
FR2742230B1 (fr) Accelerometre et procede de fabrication
FI934266L (fi) Impedanssianturi, etenkin radiosondikäyttöön, sekä menetelmä anturin valmistamiseksi
FR2691802B1 (fr) Capteur mixte de pression et de temperature.
EP0637736A3 (fr) Palpeur piézoélectrique de pression et méthode de sa fabrication.
FR2759458B1 (fr) Capteur accelerometrique de cliquetis et son procede de fabrication
FR2686692B1 (fr) Capteur de pression a base de semi-conducteur et procede de fabrication.