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FR2575335B1 - CAPACITIVE ELEMENT INTEGRATED ON AN INTEGRATED CIRCUIT PELLET, AND METHOD FOR PRODUCING THE CAPACITIVE ELEMENT - Google Patents

CAPACITIVE ELEMENT INTEGRATED ON AN INTEGRATED CIRCUIT PELLET, AND METHOD FOR PRODUCING THE CAPACITIVE ELEMENT

Info

Publication number
FR2575335B1
FR2575335B1 FR8419647A FR8419647A FR2575335B1 FR 2575335 B1 FR2575335 B1 FR 2575335B1 FR 8419647 A FR8419647 A FR 8419647A FR 8419647 A FR8419647 A FR 8419647A FR 2575335 B1 FR2575335 B1 FR 2575335B1
Authority
FR
France
Prior art keywords
capacitive element
integrated
producing
integrated circuit
circuit pellet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8419647A
Other languages
French (fr)
Other versions
FR2575335A1 (en
Inventor
Thierry Girma
Paul Jay
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR8419647A priority Critical patent/FR2575335B1/en
Priority to EP85402518A priority patent/EP0188946B1/en
Priority to DE8585402518T priority patent/DE3568112D1/en
Priority to JP60286825A priority patent/JPS61174757A/en
Publication of FR2575335A1 publication Critical patent/FR2575335A1/en
Application granted granted Critical
Publication of FR2575335B1 publication Critical patent/FR2575335B1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
FR8419647A 1984-12-21 1984-12-21 CAPACITIVE ELEMENT INTEGRATED ON AN INTEGRATED CIRCUIT PELLET, AND METHOD FOR PRODUCING THE CAPACITIVE ELEMENT Expired FR2575335B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR8419647A FR2575335B1 (en) 1984-12-21 1984-12-21 CAPACITIVE ELEMENT INTEGRATED ON AN INTEGRATED CIRCUIT PELLET, AND METHOD FOR PRODUCING THE CAPACITIVE ELEMENT
EP85402518A EP0188946B1 (en) 1984-12-21 1985-12-17 Integrated capacitive element on an integrated-circuit chip, and method for making this capacitive element
DE8585402518T DE3568112D1 (en) 1984-12-21 1985-12-17 Integrated capacitive element on an integrated-circuit chip, and method for making this capacitive element
JP60286825A JPS61174757A (en) 1984-12-21 1985-12-19 Capacitive element integrated on ic chip and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8419647A FR2575335B1 (en) 1984-12-21 1984-12-21 CAPACITIVE ELEMENT INTEGRATED ON AN INTEGRATED CIRCUIT PELLET, AND METHOD FOR PRODUCING THE CAPACITIVE ELEMENT

Publications (2)

Publication Number Publication Date
FR2575335A1 FR2575335A1 (en) 1986-06-27
FR2575335B1 true FR2575335B1 (en) 1987-06-19

Family

ID=9310882

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8419647A Expired FR2575335B1 (en) 1984-12-21 1984-12-21 CAPACITIVE ELEMENT INTEGRATED ON AN INTEGRATED CIRCUIT PELLET, AND METHOD FOR PRODUCING THE CAPACITIVE ELEMENT

Country Status (4)

Country Link
EP (1) EP0188946B1 (en)
JP (1) JPS61174757A (en)
DE (1) DE3568112D1 (en)
FR (1) FR2575335B1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2766294B1 (en) 1997-07-18 2001-01-19 St Microelectronics Sa METHOD FOR MANUFACTURING METAL-METAL CAPACITY WITHIN AN INTEGRATED CIRCUIT, AND CORRESPONDING INTEGRATED CIRCUIT
GB2333894B (en) * 1998-01-23 2002-11-20 Mitel Corp Method of fabricating capacitors in semiconductor devices
DE10034003A1 (en) * 2000-07-07 2002-01-24 Infineon Technologies Ag Trench capacitor with insulation collar and corresponding manufacturing process
DE102004044619B4 (en) 2004-09-13 2009-07-16 Infineon Technologies Ag Capacitor structure in trench structures of semiconductor devices and semiconductor devices with such capacitor structures and method for making the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58137212A (en) * 1982-02-09 1983-08-15 Nippon Telegr & Teleph Corp <Ntt> Correcting of deflection distorsion in charged beam exposure apparatus
FR2526225B1 (en) * 1982-04-30 1985-11-08 Radiotechnique Compelec METHOD FOR PRODUCING AN INTEGRATED CAPACITOR, AND DEVICE THUS OBTAINED
FR2530077A1 (en) * 1982-07-09 1984-01-13 Radiotechnique Compelec METHOD FOR PRODUCING INTEGRATED CAPACITORS IN A MICROELECTRONIC STRUCTURE
JPS59161860A (en) * 1983-03-07 1984-09-12 Hitachi Ltd semiconductor memory device
JPH0666436B2 (en) * 1983-04-15 1994-08-24 株式会社日立製作所 Semiconductor integrated circuit device

Also Published As

Publication number Publication date
EP0188946A1 (en) 1986-07-30
FR2575335A1 (en) 1986-06-27
EP0188946B1 (en) 1989-02-01
DE3568112D1 (en) 1989-03-09
JPS61174757A (en) 1986-08-06

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Legal Events

Date Code Title Description
CL Concession to grant licences
ST Notification of lapse