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FR1488038A - Process for manufacturing epitaxial layers from semiconductor compounds - Google Patents

Process for manufacturing epitaxial layers from semiconductor compounds

Info

Publication number
FR1488038A
FR1488038A FR71411A FR71411A FR1488038A FR 1488038 A FR1488038 A FR 1488038A FR 71411 A FR71411 A FR 71411A FR 71411 A FR71411 A FR 71411A FR 1488038 A FR1488038 A FR 1488038A
Authority
FR
France
Prior art keywords
epitaxial layers
semiconductor compounds
manufacturing epitaxial
manufacturing
compounds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR71411A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens and Halske AG
Siemens Corp
Original Assignee
Siemens and Halske AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DES98675A external-priority patent/DE1289830B/en
Application filed by Siemens and Halske AG, Siemens Corp filed Critical Siemens and Halske AG
Priority to FR71411A priority Critical patent/FR1488038A/en
Application granted granted Critical
Publication of FR1488038A publication Critical patent/FR1488038A/en
Expired legal-status Critical Current

Links

Classifications

    • H10P14/2911—
    • H10P14/24—
    • H10P14/3421—
FR71411A 1965-08-05 1966-07-29 Process for manufacturing epitaxial layers from semiconductor compounds Expired FR1488038A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR71411A FR1488038A (en) 1965-08-05 1966-07-29 Process for manufacturing epitaxial layers from semiconductor compounds

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DES98675A DE1289830B (en) 1965-08-05 1965-08-05 Process for producing epitaxial growth layers from semiconducting A B compounds
FR71411A FR1488038A (en) 1965-08-05 1966-07-29 Process for manufacturing epitaxial layers from semiconductor compounds

Publications (1)

Publication Number Publication Date
FR1488038A true FR1488038A (en) 1967-07-07

Family

ID=25998202

Family Applications (1)

Application Number Title Priority Date Filing Date
FR71411A Expired FR1488038A (en) 1965-08-05 1966-07-29 Process for manufacturing epitaxial layers from semiconductor compounds

Country Status (1)

Country Link
FR (1) FR1488038A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114060723A (en) * 2021-11-18 2022-02-18 季华实验室 A safety protection pressure relief system for epitaxial process equipment and epitaxial process equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114060723A (en) * 2021-11-18 2022-02-18 季华实验室 A safety protection pressure relief system for epitaxial process equipment and epitaxial process equipment

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