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FR1451749A - Method and device for forming thin films on a support by means of ionic radiation sputtering - Google Patents

Method and device for forming thin films on a support by means of ionic radiation sputtering

Info

Publication number
FR1451749A
FR1451749A FR36212A FR36212A FR1451749A FR 1451749 A FR1451749 A FR 1451749A FR 36212 A FR36212 A FR 36212A FR 36212 A FR36212 A FR 36212A FR 1451749 A FR1451749 A FR 1451749A
Authority
FR
France
Prior art keywords
sputtering
support
thin films
forming thin
ionic radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR36212A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HERMSDORF KERAMIK VEB
Keramische Werke Hermsdorf VEB
Original Assignee
HERMSDORF KERAMIK VEB
Keramische Werke Hermsdorf VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HERMSDORF KERAMIK VEB, Keramische Werke Hermsdorf VEB filed Critical HERMSDORF KERAMIK VEB
Priority to FR36212A priority Critical patent/FR1451749A/en
Application granted granted Critical
Publication of FR1451749A publication Critical patent/FR1451749A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR36212A 1965-10-26 1965-10-26 Method and device for forming thin films on a support by means of ionic radiation sputtering Expired FR1451749A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR36212A FR1451749A (en) 1965-10-26 1965-10-26 Method and device for forming thin films on a support by means of ionic radiation sputtering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR36212A FR1451749A (en) 1965-10-26 1965-10-26 Method and device for forming thin films on a support by means of ionic radiation sputtering

Publications (1)

Publication Number Publication Date
FR1451749A true FR1451749A (en) 1966-01-07

Family

ID=8591202

Family Applications (1)

Application Number Title Priority Date Filing Date
FR36212A Expired FR1451749A (en) 1965-10-26 1965-10-26 Method and device for forming thin films on a support by means of ionic radiation sputtering

Country Status (1)

Country Link
FR (1) FR1451749A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2422729A1 (en) * 1978-04-13 1979-11-09 Litton Systems Inc MULTI-LAYER OPTICAL COATING PROCESS

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2422729A1 (en) * 1978-04-13 1979-11-09 Litton Systems Inc MULTI-LAYER OPTICAL COATING PROCESS

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