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FR1364467A - Device for preparing rods in semiconductor substance - Google Patents

Device for preparing rods in semiconductor substance

Info

Publication number
FR1364467A
FR1364467A FR942646A FR942646A FR1364467A FR 1364467 A FR1364467 A FR 1364467A FR 942646 A FR942646 A FR 942646A FR 942646 A FR942646 A FR 942646A FR 1364467 A FR1364467 A FR 1364467A
Authority
FR
France
Prior art keywords
semiconductor substance
rods
preparing
preparing rods
substance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR942646A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens and Halske AG
Siemens Corp
Original Assignee
Siemens and Halske AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DES60887A external-priority patent/DE1139812B/en
Priority claimed from DES81031A external-priority patent/DE1220391B/en
Application filed by Siemens and Halske AG, Siemens Corp filed Critical Siemens and Halske AG
Priority to FR942646A priority Critical patent/FR1364467A/en
Application granted granted Critical
Publication of FR1364467A publication Critical patent/FR1364467A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
FR942646A 1958-12-09 1963-07-25 Device for preparing rods in semiconductor substance Expired FR1364467A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR942646A FR1364467A (en) 1958-12-09 1963-07-25 Device for preparing rods in semiconductor substance

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DES60887A DE1139812B (en) 1958-12-09 1958-12-09 Device for obtaining rod-shaped semiconductor bodies and method for operating this device
DES81031A DE1220391B (en) 1958-12-09 1962-08-22 Device for obtaining rod-shaped semiconductor bodies
FR942646A FR1364467A (en) 1958-12-09 1963-07-25 Device for preparing rods in semiconductor substance

Publications (1)

Publication Number Publication Date
FR1364467A true FR1364467A (en) 1964-06-19

Family

ID=27212645

Family Applications (1)

Application Number Title Priority Date Filing Date
FR942646A Expired FR1364467A (en) 1958-12-09 1963-07-25 Device for preparing rods in semiconductor substance

Country Status (1)

Country Link
FR (1) FR1364467A (en)

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