FR1360017A - Semiconductor Manufacturing Improvements - Google Patents
Semiconductor Manufacturing ImprovementsInfo
- Publication number
- FR1360017A FR1360017A FR932774A FR932774A FR1360017A FR 1360017 A FR1360017 A FR 1360017A FR 932774 A FR932774 A FR 932774A FR 932774 A FR932774 A FR 932774A FR 1360017 A FR1360017 A FR 1360017A
- Authority
- FR
- France
- Prior art keywords
- semiconductor manufacturing
- manufacturing improvements
- semiconductor
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/02—Manufacture or treatment characterised by using material-based technologies
- H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
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- H10P14/24—
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- H10P14/274—
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- H10P14/2905—
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- H10P14/3411—
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- H10P14/6309—
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- H10P14/6322—
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- H10P14/6334—
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- H10P14/6682—
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- H10P14/69215—
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- H10P50/242—
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- H10P95/00—
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR932774A FR1360017A (en) | 1962-06-11 | 1963-04-26 | Semiconductor Manufacturing Improvements |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US20155662A | 1962-06-11 | 1962-06-11 | |
| FR932774A FR1360017A (en) | 1962-06-11 | 1963-04-26 | Semiconductor Manufacturing Improvements |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR1360017A true FR1360017A (en) | 1964-04-30 |
Family
ID=26200987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR932774A Expired FR1360017A (en) | 1962-06-11 | 1963-04-26 | Semiconductor Manufacturing Improvements |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR1360017A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2027190A1 (en) * | 1968-12-27 | 1970-09-25 | Matsushita Electronics Corp |
-
1963
- 1963-04-26 FR FR932774A patent/FR1360017A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2027190A1 (en) * | 1968-12-27 | 1970-09-25 | Matsushita Electronics Corp |
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