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FR1360017A - Semiconductor Manufacturing Improvements - Google Patents

Semiconductor Manufacturing Improvements

Info

Publication number
FR1360017A
FR1360017A FR932774A FR932774A FR1360017A FR 1360017 A FR1360017 A FR 1360017A FR 932774 A FR932774 A FR 932774A FR 932774 A FR932774 A FR 932774A FR 1360017 A FR1360017 A FR 1360017A
Authority
FR
France
Prior art keywords
semiconductor manufacturing
manufacturing improvements
semiconductor
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR932774A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Priority to FR932774A priority Critical patent/FR1360017A/en
Application granted granted Critical
Publication of FR1360017A publication Critical patent/FR1360017A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/401Oxides containing silicon
    • C23C16/402Silicon dioxide
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10P14/24
    • H10P14/274
    • H10P14/2905
    • H10P14/3411
    • H10P14/6309
    • H10P14/6322
    • H10P14/6334
    • H10P14/6682
    • H10P14/69215
    • H10P50/242
    • H10P95/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR932774A 1962-06-11 1963-04-26 Semiconductor Manufacturing Improvements Expired FR1360017A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR932774A FR1360017A (en) 1962-06-11 1963-04-26 Semiconductor Manufacturing Improvements

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US20155662A 1962-06-11 1962-06-11
FR932774A FR1360017A (en) 1962-06-11 1963-04-26 Semiconductor Manufacturing Improvements

Publications (1)

Publication Number Publication Date
FR1360017A true FR1360017A (en) 1964-04-30

Family

ID=26200987

Family Applications (1)

Application Number Title Priority Date Filing Date
FR932774A Expired FR1360017A (en) 1962-06-11 1963-04-26 Semiconductor Manufacturing Improvements

Country Status (1)

Country Link
FR (1) FR1360017A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2027190A1 (en) * 1968-12-27 1970-09-25 Matsushita Electronics Corp

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2027190A1 (en) * 1968-12-27 1970-09-25 Matsushita Electronics Corp

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