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FR1287748A - Method for the pulse control of the beam current of an apparatus for generating beams of electrified particles, and installation for carrying out this method - Google Patents

Method for the pulse control of the beam current of an apparatus for generating beams of electrified particles, and installation for carrying out this method

Info

Publication number
FR1287748A
FR1287748A FR858679A FR858679A FR1287748A FR 1287748 A FR1287748 A FR 1287748A FR 858679 A FR858679 A FR 858679A FR 858679 A FR858679 A FR 858679A FR 1287748 A FR1287748 A FR 1287748A
Authority
FR
France
Prior art keywords
installation
carrying
beam current
pulse control
generating beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR858679A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DEZ7937A external-priority patent/DE1110330B/en
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Priority to FR858679A priority Critical patent/FR1287748A/en
Application granted granted Critical
Publication of FR1287748A publication Critical patent/FR1287748A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR858679A 1960-04-14 1961-04-13 Method for the pulse control of the beam current of an apparatus for generating beams of electrified particles, and installation for carrying out this method Expired FR1287748A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR858679A FR1287748A (en) 1960-04-14 1961-04-13 Method for the pulse control of the beam current of an apparatus for generating beams of electrified particles, and installation for carrying out this method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEZ7937A DE1110330B (en) 1960-04-14 1960-04-14 Method and arrangement for pulse control of the beam current of a charge carrier beam device
FR858679A FR1287748A (en) 1960-04-14 1961-04-13 Method for the pulse control of the beam current of an apparatus for generating beams of electrified particles, and installation for carrying out this method

Publications (1)

Publication Number Publication Date
FR1287748A true FR1287748A (en) 1962-03-16

Family

ID=26003408

Family Applications (1)

Application Number Title Priority Date Filing Date
FR858679A Expired FR1287748A (en) 1960-04-14 1961-04-13 Method for the pulse control of the beam current of an apparatus for generating beams of electrified particles, and installation for carrying out this method

Country Status (1)

Country Link
FR (1) FR1287748A (en)

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