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FI903096A0 - Ljuskaensliga kompositioner innehaollande utvalda fotoaktiva material, och deras anvaendning foer att producera fotoresistbilder med hoeg upploesningsfoermaoga medelst bestraolning, som aer naera ultraviolettljus. - Google Patents

Ljuskaensliga kompositioner innehaollande utvalda fotoaktiva material, och deras anvaendning foer att producera fotoresistbilder med hoeg upploesningsfoermaoga medelst bestraolning, som aer naera ultraviolettljus.

Info

Publication number
FI903096A0
FI903096A0 FI903096A FI903096A FI903096A0 FI 903096 A0 FI903096 A0 FI 903096A0 FI 903096 A FI903096 A FI 903096A FI 903096 A FI903096 A FI 903096A FI 903096 A0 FI903096 A0 FI 903096A0
Authority
FI
Finland
Prior art keywords
utvalda
upploesningsfoermaoga
ultraviolettljus
naera
ljuskaensliga
Prior art date
Application number
FI903096A
Other languages
English (en)
Other versions
FI903096A7 (fi
Inventor
Wayne Edmund Feely
Original Assignee
Rohm & Haas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm & Haas filed Critical Rohm & Haas
Publication of FI903096A0 publication Critical patent/FI903096A0/fi
Publication of FI903096A7 publication Critical patent/FI903096A7/fi

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/12—Nitrogen compound containing
    • Y10S430/121—Nitrogen in heterocyclic ring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/122—Sulfur compound containing
    • Y10S430/123—Sulfur in heterocyclic ring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/126—Halogen compound containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/127—Spectral sensitizer containing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Polymerisation Methods In General (AREA)
FI903096A 1989-06-20 1990-06-19 Valikoituja fotoaktiivisia materiaaleja sisältävät valonherkät koostumukset ja niiden käyttö hyvän erottelukyvyn omaavien fotoresistikuvien tuottamiseksi ultraviolettivaloa lähellä olevalla säteilyllä FI903096A7 (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US36943889A 1989-06-20 1989-06-20

Publications (2)

Publication Number Publication Date
FI903096A0 true FI903096A0 (fi) 1990-06-19
FI903096A7 FI903096A7 (fi) 1990-12-21

Family

ID=23455488

Family Applications (1)

Application Number Title Priority Date Filing Date
FI903096A FI903096A7 (fi) 1989-06-20 1990-06-19 Valikoituja fotoaktiivisia materiaaleja sisältävät valonherkät koostumukset ja niiden käyttö hyvän erottelukyvyn omaavien fotoresistikuvien tuottamiseksi ultraviolettivaloa lähellä olevalla säteilyllä

Country Status (13)

Country Link
US (1) US5391465A (fi)
EP (1) EP0404499A3 (fi)
JP (1) JP3026503B2 (fi)
KR (1) KR0155990B1 (fi)
CN (1) CN1048931A (fi)
AU (1) AU5764390A (fi)
BR (1) BR9002906A (fi)
CA (1) CA2017338A1 (fi)
FI (1) FI903096A7 (fi)
IE (1) IE902217A1 (fi)
IL (1) IL94799A (fi)
NO (1) NO902666L (fi)
ZA (1) ZA904704B (fi)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69032077T2 (de) * 1989-10-17 1998-12-03 Shipley Co., Inc., Newton, Mass. Fotoresist für nahes U.V.
EP0462391B1 (en) * 1990-06-19 1999-10-06 Shipley Company Inc. Acid hardened photoresists
EP0599779A1 (de) * 1992-10-29 1994-06-01 OCG Microelectronic Materials AG Hochauflösender negativ arbeitender Photoresist mit grossem Prozessspielraum
EP0733665B1 (de) * 1995-03-23 1998-07-29 Siemens Aktiengesellschaft Verfahren zur Herstellung von Polybenzoxazol-Vorstufen und entsprechender Resistlösungen
JP3433017B2 (ja) * 1995-08-31 2003-08-04 株式会社東芝 感光性組成物
US5763134A (en) 1996-05-13 1998-06-09 Imation Corp Composition comprising photochemical acid progenitor and specific squarylium dye
US7147983B1 (en) * 1996-10-07 2006-12-12 Shipley Company, L.L.C. Dyed photoresists and methods and articles of manufacture comprising same
US6376149B2 (en) 1999-05-26 2002-04-23 Yale University Methods and compositions for imaging acids in chemically amplified photoresists using pH-dependent fluorophores
US6468712B1 (en) 2000-02-25 2002-10-22 Massachusetts Institute Of Technology Resist materials for 157-nm lithography
EP1275666A4 (en) * 2000-04-04 2007-10-24 Daikin Ind Ltd NEW FLUOROPOLYMER WITH ACID-ACTIVE GROUP AND CHEMICALLY REINFORCED PHOTORESIST COMPOSITIONS THAT CONTAIN THEM
US20040192876A1 (en) * 2002-11-18 2004-09-30 Nigel Hacker Novolac polymer planarization films with high temparature stability
US7910223B2 (en) * 2003-07-17 2011-03-22 Honeywell International Inc. Planarization films for advanced microelectronic applications and devices and methods of production thereof
US20050202352A1 (en) * 2004-03-11 2005-09-15 Worcester Polytechnic Institute Systems and methods for sub-wavelength imaging
US7638877B2 (en) * 2006-06-30 2009-12-29 Intel Corporation Alternative to desmear for build-up roughening and copper adhesion promotion
KR20130067332A (ko) * 2011-11-16 2013-06-24 삼성디스플레이 주식회사 노광용 마스크 및 그 마스크를 사용한 기판 제조 방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL16065C (fi) * 1924-04-24
US4343885A (en) * 1978-05-09 1982-08-10 Dynachem Corporation Phototropic photosensitive compositions containing fluoran colorformer
JPS54153889A (en) * 1978-05-24 1979-12-04 Toyo Ink Mfg Co Ltd Photosetting coating composition
US4442197A (en) * 1982-01-11 1984-04-10 General Electric Company Photocurable compositions
US4491628A (en) * 1982-08-23 1985-01-01 International Business Machines Corporation Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone
DE3248246A1 (de) * 1982-12-28 1984-06-28 Basf Ag, 6700 Ludwigshafen Positiv arbeitendes verfahren zur herstellung von relief- und druckformen
JPS59147001A (ja) * 1983-02-07 1984-08-23 ゼネラル・エレクトリツク・カンパニイ 光硬化性組成物
GB2137626B (en) * 1983-03-31 1986-10-15 Sericol Group Ltd Water based photopolymerisable compositions and their use
GB2139369B (en) * 1983-05-06 1987-01-21 Sericol Group Ltd Photosensitive systems showing visible indication of exposure
DE3584316D1 (de) * 1984-06-01 1991-11-14 Rohm & Haas Lichtempfindliche beschichtungszusammensetzung, aus diesem hergestellte thermisch stabile beschichtungen und verfahren zur herstellung von thermisch stabilen polymerbildern.
US4632891A (en) * 1984-10-04 1986-12-30 Ciba-Geigy Corporation Process for the production of images
US5034304A (en) * 1986-01-13 1991-07-23 Rohm And Haas Company Photosensitive compounds and thermally stable and aqueous developable negative images
CA1307695C (en) * 1986-01-13 1992-09-22 Wayne Edmund Feely Photosensitive compounds and thermally stable and aqueous developablenegative images
DE3710281A1 (de) * 1987-03-28 1988-10-06 Hoechst Ag Photopolymerisierbares gemisch und daraus hergestelltes aufzeichnungsmaterial

Also Published As

Publication number Publication date
EP0404499A3 (en) 1992-03-18
CA2017338A1 (en) 1990-12-20
BR9002906A (pt) 1991-08-20
JPH0387748A (ja) 1991-04-12
IL94799A (en) 1994-02-27
IE902217L (en) 1990-12-20
CN1048931A (zh) 1991-01-30
NO902666D0 (no) 1990-06-15
KR910001455A (ko) 1991-01-30
KR0155990B1 (ko) 1998-11-16
US5391465A (en) 1995-02-21
NO902666L (no) 1990-12-21
IE902217A1 (en) 1991-01-16
JP3026503B2 (ja) 2000-03-27
IL94799A0 (en) 1991-04-15
EP0404499A2 (en) 1990-12-27
AU5764390A (en) 1991-01-03
ZA904704B (en) 1991-03-27
FI903096A7 (fi) 1990-12-21

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Legal Events

Date Code Title Description
FA Application withdrawn [patent]

Owner name: ROHM AND HAAS CO