FI20145044A7 - Parannettu paineanturi - Google Patents

Parannettu paineanturi

Info

Publication number: FI20145044A7
Authority: FI; Finland
Prior art keywords: pressure sensor; improved pressure; improved; sensor; pressure
Prior art date: 2014-01-17

Application number

FI20145044A

Other languages

English (en)

Swedish (sv)

Other versions

FI126999B (fi

Inventor

Heikki Kuisma

Koichi Yoshida

Original Assignee

Murata Manufacturing Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2014-01-17

Filing date

2014-01-17

Publication date

2015-07-18

2014-01-17 Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co

2014-01-17 Priority to FI20145044A priority Critical patent/FI126999B/fi

2015-01-13 Priority to CN201580004485.4A priority patent/CN105917205B/zh

2015-01-13 Priority to JP2016546981A priority patent/JP6256619B2/ja

2015-01-13 Priority to KR1020167021967A priority patent/KR101848226B1/ko

2015-01-13 Priority to PCT/IB2015/050241 priority patent/WO2015107453A1/en

2015-01-15 Priority to TW104101296A priority patent/TWI648527B/zh

2015-01-20 Priority to US14/600,240 priority patent/US9829405B2/en

2015-07-18 Publication of FI20145044A7 publication Critical patent/FI20145044A7/fi

2017-09-15 Application granted granted Critical

2017-09-15 Publication of FI126999B publication Critical patent/FI126999B/fi

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Measuring Fluid Pressure (AREA)
Micromachines (AREA)
Pressure Sensors (AREA)

FI20145044A 2014-01-17 2014-01-17 Parannettu paineanturi FI126999B (fi)

Priority Applications (7)

Application Number	Priority Date	Filing Date	Title
FI20145044A FI126999B (fi)	2014-01-17	2014-01-17	Parannettu paineanturi
CN201580004485.4A CN105917205B (zh)	2014-01-17	2015-01-13	改进的压力传感器结构
JP2016546981A JP6256619B2 (ja)	2014-01-17	2015-01-13	改良された圧力センサ構造
KR1020167021967A KR101848226B1 (ko)	2014-01-17	2015-01-13	향상된 압력 센서 구조
PCT/IB2015/050241 WO2015107453A1 (en)	2014-01-17	2015-01-13	An improved pressure sensor structure
TW104101296A TWI648527B (zh)	2014-01-17	2015-01-15	改良的壓力感測器結構
US14/600,240 US9829405B2 (en)	2014-01-17	2015-01-20	Micromechanical pressure sensor structure having a side wall layer

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FI20145044A FI126999B (fi)	2014-01-17	2014-01-17	Parannettu paineanturi

Publications (2)

Publication Number	Publication Date
FI20145044A7 true FI20145044A7 (fi)	2015-07-18
FI126999B FI126999B (fi)	2017-09-15

Family

ID=52574193

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FI20145044A FI126999B (fi)	2014-01-17	2014-01-17	Parannettu paineanturi

Country Status (7)

Country	Link
US (1)	US9829405B2 (fi)
JP (1)	JP6256619B2 (fi)
KR (1)	KR101848226B1 (fi)
CN (1)	CN105917205B (fi)
FI (1)	FI126999B (fi)
TW (1)	TWI648527B (fi)
WO (1)	WO2015107453A1 (fi)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FI125958B (fi) *	2013-05-10	2016-04-29	Murata Manufacturing Co	Parannettu paineanturi
FI125960B (fi) *	2013-05-28	2016-04-29	Murata Manufacturing Co	Parannettu paineanturi
FI125447B (fi) *	2013-06-04	2015-10-15	Murata Manufacturing Co	Parannettu paineanturi
US11284808B2 (en)	2014-10-11	2022-03-29	Linet Spol. S.R.O.	Device and method for measurement of vital functions, including intracranial pressure, and system and method for collecting data
CA2930995C (en) *	2015-05-25	2018-07-24	2266170 Ontario Inc.	Apparatus and method for the detection of leaks in a sealed container
JP6486866B2 (ja) *	2016-05-27	2019-03-20	日立オートモティブシステムズ株式会社	物理量測定装置およびその製造方法ならびに物理量測定素子
US20200085328A1 (en) *	2016-06-22	2020-03-19	Linet Spol S.R.O.	Device for Monitoring of Patient's Vital Signs
JP2020003211A (ja) *	2016-09-29	2020-01-09	株式会社村田製作所	容量測定回路及び容量測定システム
KR102039577B1 (ko) *	2017-12-05	2019-11-01	삼성중공업 주식회사	액화수소 저장탱크 누출 감지 장치
JP6922798B2 (ja) *	2018-03-15	2021-08-18	オムロン株式会社	静電容量式圧力センサ
JP6922797B2 (ja) *	2018-03-15	2021-08-18	オムロン株式会社	静電容量式圧力センサ
FR3065291B1 (fr) *	2018-05-25	2021-04-23	Autoliv Dev	Dispositif de detection de presence d'un occupant a l'interieur de l'habitacle d'un vehicule
CN113557419A (zh) *	2019-03-13	2021-10-26	株式会社村田制作所	压力传感器
WO2022009604A1 (ja) *	2020-07-06	2022-01-13	株式会社村田製作所	圧力センサ素子、圧力センサモジュールおよびその信号補正方法
WO2022019167A1 (ja) *	2020-07-21	2022-01-27	株式会社村田製作所	圧力センサ構造、圧力センサ装置および圧力センサ構造の製造方法
JP7388568B2 (ja) *	2020-08-28	2023-11-29	株式会社村田製作所	センサ装置
WO2022080038A1 (ja) *	2020-10-12	2022-04-21	株式会社村田製作所	圧力センサ用チップ及び圧力センサ
US11940336B2 (en) *	2021-03-26	2024-03-26	Sporian Microsystems, Inc.	Driven-shield capacitive pressure sensor
WO2023058660A1 (ja) *	2021-10-05	2023-04-13	株式会社村田製作所	圧力センサ構造および圧力センサ装置
KR102677450B1 (ko)	2022-03-25	2024-06-20	삼성전자주식회사	광학 기반 힘 추정 장치 및 방법
CN119492420A (zh) *	2025-01-16	2025-02-21	新乡北方车辆仪表有限公司	一种拆装简单抗干扰长电缆型温湿度传感器

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JP2000307127A (ja) *	1999-04-26	2000-11-02	Omron Corp	静電容量型センサ
JP2001255225A (ja) *	2000-03-10	2001-09-21	Anelva Corp	静電容量型真空センサ
JP3771425B2 (ja) *	2000-07-04	2006-04-26	株式会社山武	容量式圧力センサおよびその製造方法
JP2002181648A (ja) *	2000-12-19	2002-06-26	Fujikura Ltd	圧力センサ
US6720777B2 (en) *	2002-02-15	2004-04-13	Rosemount Inc.	Bridged capacitor sensor measurement circuit
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JP3930862B2 (ja) *	2004-02-13	2007-06-13	東京エレクトロン株式会社	容量型センサ
DE102004011144B4 (de) *	2004-03-08	2013-07-04	Infineon Technologies Ag	Drucksensor und Verfahren zum Betreiben eines Drucksensors
JP2007057247A (ja) *	2005-08-22	2007-03-08	Hosiden Corp	静電容量型センサ
JP2007057394A (ja) *	2005-08-24	2007-03-08	Epson Toyocom Corp	圧力センサ、及びその製造方法
JP2007278716A (ja) *	2006-04-03	2007-10-25	Epson Toyocom Corp	容量変化型圧力センサ
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2014
- 2014-01-17 FI FI20145044A patent/FI126999B/fi active IP Right Grant
2015
- 2015-01-13 CN CN201580004485.4A patent/CN105917205B/zh active Active
- 2015-01-13 WO PCT/IB2015/050241 patent/WO2015107453A1/en not_active Ceased
- 2015-01-13 KR KR1020167021967A patent/KR101848226B1/ko active Active
- 2015-01-13 JP JP2016546981A patent/JP6256619B2/ja active Active
- 2015-01-15 TW TW104101296A patent/TWI648527B/zh active
- 2015-01-20 US US14/600,240 patent/US9829405B2/en active Active

Also Published As

Publication number	Publication date
US20150204744A1 (en)	2015-07-23
FI126999B (fi)	2017-09-15
CN105917205A (zh)	2016-08-31
JP2017506329A (ja)	2017-03-02
KR101848226B1 (ko)	2018-05-28
US9829405B2 (en)	2017-11-28
KR20160108471A (ko)	2016-09-19
JP6256619B2 (ja)	2018-01-10
WO2015107453A1 (en)	2015-07-23
TW201531682A (zh)	2015-08-16
CN105917205B (zh)	2019-03-19
TWI648527B (zh)	2019-01-21

Publication	Publication Date	Title
FI20145044A7 (fi)	2015-07-18	Parannettu paineanturi
GB2526440B (en)	2018-03-21	Sensor arrangements
DK3349000T3 (da)	2020-02-17	Sensorindretning
GB201403389D0 (en)	2014-04-09	Sensor
GB201405713D0 (en)	2014-05-14	Fluid sensor
FI20145680A7 (fi)	2016-01-19	Anturijärjestely
EP3094246C0 (en)	2024-03-06	IMPLANTABLE SENSOR
TWI563254B (en)	2016-12-21	Sensor
EP3307149C0 (en)	2024-09-25	PRESSURE SENSOR
DK3111130T3 (da)	2023-02-27	Trykbeholder
DK3380822T3 (da)	2019-10-14	Optisk tryksensor
HUE052374T2 (hu)	2021-04-28	Irányított nyomáskülönbség érzékelõ
DK3117245T3 (da)	2022-01-31	Seismisk sensor
DK3169992T3 (da)	2023-01-23	Sensorarray
DE112017005112A5 (de)	2019-06-27	Sensor
DK3124938T3 (da)	2019-05-13	Tryksensor
EP3224820C0 (en)	2023-07-26	DUAL STEREOSCOPIC SENSOR
DK3205888T3 (da)	2020-04-27	Fluidtrykstyringsanordning
EP3230727C0 (en)	2024-08-21	Acoustic sensor
DK3099940T3 (da)	2020-01-02	Trykakkumulator
DK3032247T3 (da)	2020-01-27	Gassensorelement
EP3348162A4 (en)	2019-04-10	PUSH BUTTON
GB2553156B (en)	2020-05-20	Pressure sensor
DE102017000616A8 (de)	2017-09-14	Sensor
GB201412136D0 (en)	2014-08-20	Sensor

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