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FI20125014A7 - Arrangemang och motsvarande förfarande för optiska mätningar - Google Patents

Arrangemang och motsvarande förfarande för optiska mätningar

Info

Publication number
FI20125014A7
FI20125014A7 FI20125014A FI20125014A FI20125014A7 FI 20125014 A7 FI20125014 A7 FI 20125014A7 FI 20125014 A FI20125014 A FI 20125014A FI 20125014 A FI20125014 A FI 20125014A FI 20125014 A7 FI20125014 A7 FI 20125014A7
Authority
FI
Finland
Prior art keywords
corresponding method
optical measurements
measurements
optical
Prior art date
Application number
FI20125014A
Other languages
English (en)
Finnish (fi)
Other versions
FI125320B (sv
Inventor
Heimo Keraenen
Petri Lehtonen
Original Assignee
Teknologian Tutkimuskeskus Vtt Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teknologian Tutkimuskeskus Vtt Oy filed Critical Teknologian Tutkimuskeskus Vtt Oy
Priority to FI20125014A priority Critical patent/FI125320B/sv
Priority to ES12813838T priority patent/ES2875052T3/es
Priority to CN201280066177.0A priority patent/CN104040287B/zh
Priority to PL12813838T priority patent/PL2800946T3/pl
Priority to PCT/EP2012/076345 priority patent/WO2013102572A1/en
Priority to JP2014550675A priority patent/JP6291418B2/ja
Priority to EP12813838.5A priority patent/EP2800946B1/en
Priority to US14/370,547 priority patent/US9423245B2/en
Publication of FI20125014A7 publication Critical patent/FI20125014A7/sv
Application granted granted Critical
Publication of FI125320B publication Critical patent/FI125320B/sv

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C11/00Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying
    • G01C11/04Interpretation of pictures
    • G01C11/06Interpretation of pictures by comparison of two or more pictures of the same area
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/062LED's

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Multimedia (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
FI20125014A 2012-01-05 2012-01-05 Arrangemang och motsvarande förfarande för optiska mätningar FI125320B (sv)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FI20125014A FI125320B (sv) 2012-01-05 2012-01-05 Arrangemang och motsvarande förfarande för optiska mätningar
ES12813838T ES2875052T3 (es) 2012-01-05 2012-12-20 Disposición para mediciones ópticas y método relacionado
CN201280066177.0A CN104040287B (zh) 2012-01-05 2012-12-20 用于光学测量的设备及相关方法
PL12813838T PL2800946T3 (pl) 2012-01-05 2012-12-20 Układ do pomiarów optycznych i powiązany sposób
PCT/EP2012/076345 WO2013102572A1 (en) 2012-01-05 2012-12-20 Arrangement for optical measurements and related method
JP2014550675A JP6291418B2 (ja) 2012-01-05 2012-12-20 光学測定用配置および関連方法
EP12813838.5A EP2800946B1 (en) 2012-01-05 2012-12-20 Arrangement for optical measurements and related method
US14/370,547 US9423245B2 (en) 2012-01-05 2012-12-20 Arrangement for optical measurements and related method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20125014 2012-01-05
FI20125014A FI125320B (sv) 2012-01-05 2012-01-05 Arrangemang och motsvarande förfarande för optiska mätningar

Publications (2)

Publication Number Publication Date
FI20125014A7 true FI20125014A7 (sv) 2013-07-06
FI125320B FI125320B (sv) 2015-08-31

Family

ID=47557081

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20125014A FI125320B (sv) 2012-01-05 2012-01-05 Arrangemang och motsvarande förfarande för optiska mätningar

Country Status (8)

Country Link
US (1) US9423245B2 (sv)
EP (1) EP2800946B1 (sv)
JP (1) JP6291418B2 (sv)
CN (1) CN104040287B (sv)
ES (1) ES2875052T3 (sv)
FI (1) FI125320B (sv)
PL (1) PL2800946T3 (sv)
WO (1) WO2013102572A1 (sv)

Cited By (1)

* Cited by examiner, † Cited by third party
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CN113383207A (zh) * 2018-10-04 2021-09-10 杜·普雷兹·伊萨克 光学表面编码器

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Also Published As

Publication number Publication date
CN104040287B (zh) 2017-11-24
WO2013102572A1 (en) 2013-07-11
JP2015508499A (ja) 2015-03-19
FI125320B (sv) 2015-08-31
EP2800946B1 (en) 2021-03-24
ES2875052T3 (es) 2021-11-08
EP2800946A1 (en) 2014-11-12
JP6291418B2 (ja) 2018-03-14
US9423245B2 (en) 2016-08-23
PL2800946T3 (pl) 2021-10-25
US20140376003A1 (en) 2014-12-25
CN104040287A (zh) 2014-09-10

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