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FI20120169A7 - Coating and material manufacturing method - Google Patents

Coating and material manufacturing method Download PDF

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Publication number
FI20120169A7
FI20120169A7 FI20120169A FI20120169A FI20120169A7 FI 20120169 A7 FI20120169 A7 FI 20120169A7 FI 20120169 A FI20120169 A FI 20120169A FI 20120169 A FI20120169 A FI 20120169A FI 20120169 A7 FI20120169 A7 FI 20120169A7
Authority
FI
Finland
Prior art keywords
coating
space
material manufacturing
fiber
femto
Prior art date
Application number
FI20120169A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI20120169L (en
Inventor
Petteri Kinnunen
Jari Ruuttu
Original Assignee
Arctic Ip Invest Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arctic Ip Invest Ab filed Critical Arctic Ip Invest Ab
Priority to FI20120169A priority Critical patent/FI20120169A7/en
Priority to EP13794641.4A priority patent/EP2852968A4/en
Priority to PCT/FI2013/000025 priority patent/WO2013175052A1/en
Publication of FI20120169L publication Critical patent/FI20120169L/en
Publication of FI20120169A7 publication Critical patent/FI20120169A7/en

Links

Classifications

    • H10P14/6329—
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/122—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in a liquid, e.g. underwater
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/1224—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/32—Bonding taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/34—Laser welding for purposes other than joining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/361—Removing material for deburring or mechanical trimming
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/18—Sheet panels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laser Beam Processing (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Keksintö kohdistuu pinnoitus- ja materiaalin valmistusmenetelmään, joka perustuu piko-, femto- tai attosekuntilaserpulssien käyttämiseen a) tyhjössä, b) kaasupaineessa, c) nesteessä tai d) puhdastilassa; pulssien toistotaajuus on 100 kHz ja 10 GHz välissä, kuituvahvisteisella tai puolijohdelaserilla, jotka toimivat UV-näkyvä-IR valon aallonpituuksilla. Lasersäteet on johdettu erilliseen tilaan a-d) optisella kuidulla tai kollimoituna säteenä ja vasta tilan sisällä fokusoitu itsestään puhdistuvalla optiikalla höyrystettävään/prosessoitavaan materiaaliin.The invention relates to a coating and material manufacturing method based on the use of pico-, femto- or attosecond laser pulses in a) vacuum, b) gas pressure, c) liquid or d) clean space; the pulse repetition frequency is between 100 kHz and 10 GHz, with a fiber-gained or semiconductor laser operating at UV-visible-IR wavelengths. The laser beams are guided into a separate space a-d) by an optical fiber or as a collimated beam and only within the space are focused on the material to be vaporized/processed by self-cleaning optics.

FI20120169A 2012-05-22 2012-05-22 Coating and material manufacturing method FI20120169A7 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FI20120169A FI20120169A7 (en) 2012-05-22 2012-05-22 Coating and material manufacturing method
EP13794641.4A EP2852968A4 (en) 2012-05-22 2013-05-22 METHOD FOR COATING AND PRODUCTION OF MATERIAL
PCT/FI2013/000025 WO2013175052A1 (en) 2012-05-22 2013-05-22 Coating and material method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20120169A FI20120169A7 (en) 2012-05-22 2012-05-22 Coating and material manufacturing method

Publications (2)

Publication Number Publication Date
FI20120169L FI20120169L (en) 2014-01-14
FI20120169A7 true FI20120169A7 (en) 2014-01-14

Family

ID=49623211

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20120169A FI20120169A7 (en) 2012-05-22 2012-05-22 Coating and material manufacturing method

Country Status (3)

Country Link
EP (1) EP2852968A4 (en)
FI (1) FI20120169A7 (en)
WO (1) WO2013175052A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014015951A1 (en) * 2014-10-20 2016-04-21 4Jet Technologies Gmbh Method for processing an electrically non-conductive or semiconductive material
CN110605481B (en) * 2019-09-23 2024-06-11 广东工业大学 A laser manufacturing system and laser manufacturing method for FPC circuit

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1465435A (en) * 1965-08-27 1967-01-13 Manufacturing process of thin-film electronic components and integrated circuits by vaporization by means of laser and corresponding apparatus
US5097793A (en) * 1989-05-11 1992-03-24 Mitsubishi Denki Kabushiki Kaisha Thin film vacuum evaporation device
US20090169868A1 (en) * 2002-01-29 2009-07-02 Vanderbilt University Methods and apparatus for transferring a material onto a substrate using a resonant infrared pulsed laser
US7608308B2 (en) 2006-04-17 2009-10-27 Imra America, Inc. P-type semiconductor zinc oxide films process for preparation thereof, and pulsed laser deposition method using transparent substrates
KR101317534B1 (en) 2007-01-12 2013-10-15 엘지전자 주식회사 A hinge apparatus
EP2411124A1 (en) * 2009-03-27 2012-02-01 DH Technologies Development Pte. Ltd Heated optical components
US20120113513A1 (en) * 2010-10-22 2012-05-10 The Regents Of The University Of Colorado, A Body Corporate Self-cleaning of optical surfaces in low-pressure reactive gas environments in advanced optical systems

Also Published As

Publication number Publication date
EP2852968A1 (en) 2015-04-01
EP2852968A4 (en) 2016-02-24
WO2013175052A1 (en) 2013-11-28
FI20120169L (en) 2014-01-14

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