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FI20060389L - Sensori - Google Patents

Sensori Download PDF

Info

Publication number
FI20060389L
FI20060389L FI20060389A FI20060389A FI20060389L FI 20060389 L FI20060389 L FI 20060389L FI 20060389 A FI20060389 A FI 20060389A FI 20060389 A FI20060389 A FI 20060389A FI 20060389 L FI20060389 L FI 20060389L
Authority
FI
Finland
Prior art keywords
censor
Prior art date
Application number
FI20060389A
Other languages
English (en)
Swedish (sv)
Other versions
FI20060389A0 (fi
FI20060389A7 (fi
Inventor
Mikko Utriainen
Original Assignee
Environics Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Environics Oy filed Critical Environics Oy
Priority to FI20060389A priority Critical patent/FI20060389A7/fi
Publication of FI20060389A0 publication Critical patent/FI20060389A0/fi
Priority to PCT/FI2007/000107 priority patent/WO2007122287A1/en
Priority to US12/226,482 priority patent/US20090312954A1/en
Priority to EP07730576A priority patent/EP2013612A1/en
Publication of FI20060389L publication Critical patent/FI20060389L/fi
Publication of FI20060389A7 publication Critical patent/FI20060389A7/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FI20060389A 2006-04-21 2006-04-21 Sensori FI20060389A7 (fi)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FI20060389A FI20060389A7 (fi) 2006-04-21 2006-04-21 Sensori
PCT/FI2007/000107 WO2007122287A1 (en) 2006-04-21 2007-04-23 Micro hotplate semiconductive gas sensor
US12/226,482 US20090312954A1 (en) 2006-04-21 2007-04-23 Sensor
EP07730576A EP2013612A1 (en) 2006-04-21 2007-04-23 Micro hotplate semiconductive gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20060389A FI20060389A7 (fi) 2006-04-21 2006-04-21 Sensori

Publications (3)

Publication Number Publication Date
FI20060389A0 FI20060389A0 (fi) 2006-04-21
FI20060389L true FI20060389L (fi) 2007-10-22
FI20060389A7 FI20060389A7 (fi) 2007-10-22

Family

ID=36293783

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20060389A FI20060389A7 (fi) 2006-04-21 2006-04-21 Sensori

Country Status (4)

Country Link
US (1) US20090312954A1 (fi)
EP (1) EP2013612A1 (fi)
FI (1) FI20060389A7 (fi)
WO (1) WO2007122287A1 (fi)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7816681B2 (en) * 2008-12-03 2010-10-19 Electronics And Telecommunications Research Institute Capacitive gas sensor and method of fabricating the same
US8410560B2 (en) * 2010-01-21 2013-04-02 Cambridge Cmos Sensors Ltd. Electromigration reduction in micro-hotplates
US8651737B2 (en) 2010-06-23 2014-02-18 Honeywell International Inc. Sensor temperature sensing device
US8480302B2 (en) * 2010-09-28 2013-07-09 International Business Machines Corporation Micro-electro-mechanical-system temperature sensor
MY174926A (en) * 2010-12-10 2020-05-22 Mimos Berhad Micro-hotplate based gas sensor
CN102313761B (zh) * 2011-07-11 2014-05-28 西安交通大学 一种用于氢气检测的阵列化气敏传感器结构
WO2014012948A1 (en) * 2012-07-16 2014-01-23 Sgx Sensortech Sa Micro-hotplate device and sensor comprising such micro-hotplate device
US9178032B2 (en) * 2013-02-15 2015-11-03 Electronics And Telecommunications Research Institute Gas sensor and manufacturing method thereof
EP3004868B1 (en) * 2013-05-30 2022-12-28 Vaisala Oyj A dual gas sensor structure and measurement method
EP2833127A1 (en) * 2013-07-30 2015-02-04 Sensirion AG Integrated resistive-type sensor array arrangement, each sensor comprising a sensitive metal oxide layer each having a different length between the electrodes
EP2833128A1 (en) * 2013-07-30 2015-02-04 Sensirion AG Integrated metal oxide chemical sensor
EP2833129B1 (en) * 2013-07-30 2019-10-09 Sensirion AG Method and apparatus for analyzing a gas by a conductance-type particulate metal-oxide gas sensor
EP2863214B1 (en) * 2013-10-15 2019-12-18 ams international AG A thermal conductivity detector having a multi-layer sensing element, a gas sensor, and a method of gas sensing
DE102013220908B4 (de) * 2013-10-15 2015-09-24 Continental Automotive Gmbh Sensorelement
WO2015066289A1 (en) * 2013-10-30 2015-05-07 Robert Bosch Gmbh Metal oxide semiconductor sensor and method of forming a metal oxide semiconductor sensor using atomic layer deposition
EP3144669A1 (en) * 2015-09-17 2017-03-22 IDT Europe GmbH A single gas sensor for sensing different gases and a method using the gas sensor
CN107167511B (zh) * 2016-03-07 2020-05-26 光宝光电(常州)有限公司 气体传感器
EP3465189B1 (en) * 2016-05-27 2024-05-08 Carrier Corporation Gas detection device and method of manufacturing the same
US11041838B2 (en) 2017-04-26 2021-06-22 Nevada Nanotech Systems Inc. Gas sensors including microhotplates with resistive heaters, and related methods
WO2019108719A1 (en) * 2017-11-29 2019-06-06 Dm3D Technology, Llc Powder mass flow rate measurement apparatus for direct metal deposition
TWI708303B (zh) * 2018-02-22 2020-10-21 國立大學法人大阪大學 基板評價用晶片及基板評價裝置
CN110455869B (zh) * 2018-05-07 2023-07-25 中国石油化工股份有限公司 自带采样电阻的气敏传感监测探头及其应用
GB2575803A (en) 2018-07-23 2020-01-29 Sumitomo Chemical Co Semiconductor gas sensor
US20200096396A1 (en) * 2018-09-26 2020-03-26 Ams Sensors Uk Limited Gas Sensors
US12013363B2 (en) 2018-12-03 2024-06-18 Carrier Corporation Combustible gas sensor
US12442804B2 (en) 2020-09-29 2025-10-14 Arizona Board Of Regents On Behalf Of Arizona State University Noble metal decorated ordered metal oxide nanostructure thin films
EP4455647B1 (en) * 2023-04-26 2025-04-02 Centre Tecnologic De Telecomunicacions De Catalunya (Cttc) Sensor and sensor system for gas detection

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6283641A (ja) * 1985-10-08 1987-04-17 Sharp Corp 電界効果型半導体センサ
US5464966A (en) * 1992-10-26 1995-11-07 The United States Of America As Represented By The Secretary Of Commerce Micro-hotplate devices and methods for their fabrication
US6596236B2 (en) * 1999-01-15 2003-07-22 Advanced Technology Materials, Inc. Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same
KR100305660B1 (ko) * 1999-02-09 2001-09-26 김희용 이중이온빔법을 이용하여 ＣｕＯ를 첨가한 황화합물계 가스 센서
US20040075140A1 (en) * 2000-12-20 2004-04-22 Henry Baltes Microsensor and single chip integrated microsensor system
TW513855B (en) * 2001-01-15 2002-12-11 Matsushita Electric Industrial Co Ltd Saw device and method for manufacturing the device

Also Published As

Publication number Publication date
FI20060389A0 (fi) 2006-04-21
US20090312954A1 (en) 2009-12-17
EP2013612A1 (en) 2009-01-14
FI20060389A7 (fi) 2007-10-22
WO2007122287A1 (en) 2007-11-01

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Legal Events

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