[go: up one dir, main page]

ES546383A0 - Dispositivo de circuito integrado. - Google Patents

Dispositivo de circuito integrado.

Info

Publication number
ES546383A0
ES546383A0 ES546383A ES546383A ES546383A0 ES 546383 A0 ES546383 A0 ES 546383A0 ES 546383 A ES546383 A ES 546383A ES 546383 A ES546383 A ES 546383A ES 546383 A0 ES546383 A0 ES 546383A0
Authority
ES
Spain
Prior art keywords
integrated circuit
circuit device
integrated
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES546383A
Other languages
English (en)
Other versions
ES8704038A1 (es
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
American Telephone and Telegraph Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Telephone and Telegraph Co Inc filed Critical American Telephone and Telegraph Co Inc
Publication of ES546383A0 publication Critical patent/ES546383A0/es
Publication of ES8704038A1 publication Critical patent/ES8704038A1/es
Expired legal-status Critical Current

Links

Classifications

    • H10W20/425—
ES546383A 1984-08-27 1985-08-23 Dispositivo de circuito integrado. Expired ES8704038A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US64445984A 1984-08-27 1984-08-27

Publications (2)

Publication Number Publication Date
ES546383A0 true ES546383A0 (es) 1987-03-01
ES8704038A1 ES8704038A1 (es) 1987-03-01

Family

ID=24585000

Family Applications (1)

Application Number Title Priority Date Filing Date
ES546383A Expired ES8704038A1 (es) 1984-08-27 1985-08-23 Dispositivo de circuito integrado.

Country Status (8)

Country Link
EP (1) EP0192646B1 (es)
JP (1) JPH065733B2 (es)
KR (1) KR920009916B1 (es)
CA (1) CA1241457A (es)
DE (1) DE3574528D1 (es)
ES (1) ES8704038A1 (es)
IE (1) IE56850B1 (es)
WO (1) WO1986001640A1 (es)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE43936T1 (de) * 1985-04-11 1989-06-15 Siemens Ag Integrierte halbleiterschaltung mit einer aus aluminium oder einer aluminiumlegierung bestehenden kontaktleiterbahnebene und einer als diffusionsbarriere wirkenden tantalsilizidzwischenschicht.
JPH081950B2 (ja) * 1986-11-21 1996-01-10 株式会社東芝 半導体装置の製造方法
JPH01298765A (ja) * 1988-05-27 1989-12-01 Fujitsu Ltd 半導体装置及びその製造方法
KR920005242A (ko) * 1990-08-20 1992-03-28 김광호 게이트-절연체-반도체의 구조를 가지는 트랜지스터의 제조방법
KR0126457B1 (ko) * 1992-01-08 1997-12-26 기타오카 다카시 집적회로, 그 제조방법 및 그 박막형성장치
US6081034A (en) 1992-06-12 2000-06-27 Micron Technology, Inc. Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer
KR0147626B1 (ko) * 1995-03-30 1998-11-02 김광호 타이타늄 카본 나이트라이드 게이트전극 형성방법
US5663088A (en) * 1995-05-19 1997-09-02 Micron Technology, Inc. Method of forming a Ta2 O5 dielectric layer with amorphous diffusion barrier layer and method of forming a capacitor having a Ta2 O5 dielectric layer and amorphous diffusion barrier layer
JP2675775B2 (ja) * 1996-08-08 1997-11-12 株式会社東芝 半導体装置
US5942799A (en) * 1997-11-20 1999-08-24 Novellus Systems, Inc. Multilayer diffusion barriers
US6051879A (en) * 1997-12-16 2000-04-18 Micron Technology, Inc. Electrical interconnection for attachment to a substrate
US6534404B1 (en) 1999-11-24 2003-03-18 Novellus Systems, Inc. Method of depositing diffusion barrier for copper interconnect in integrated circuit

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3906540A (en) * 1973-04-02 1975-09-16 Nat Semiconductor Corp Metal-silicide Schottky diode employing an aluminum connector
JPS5877257A (ja) * 1981-11-04 1983-05-10 Hitachi Ltd 超高信頼性電極

Also Published As

Publication number Publication date
JPH065733B2 (ja) 1994-01-19
EP0192646B1 (en) 1989-11-29
KR920009916B1 (ko) 1992-11-06
KR860700312A (ko) 1986-08-01
DE3574528D1 (de) 1990-01-04
ES8704038A1 (es) 1987-03-01
WO1986001640A1 (en) 1986-03-13
IE56850B1 (en) 1992-01-01
JPS62500060A (ja) 1987-01-08
IE852091L (en) 1986-02-27
EP0192646A1 (en) 1986-09-03
CA1241457A (en) 1988-08-30

Similar Documents

Publication Publication Date Title
BR8500354A (pt) Dispositivo de circuito eletronico
DE3587715D1 (de) Integrierte Schaltung.
NO854061L (no) Koblingsanordning.
DE3751376D1 (de) Schaltungselement.
DE3577754D1 (de) Verbindungsvorrichtung.
DE3583127D1 (de) Fixiervorrichtung.
ES546363A0 (es) Unidad de circuito
DE3584799D1 (de) Halbleitervorrichtung.
DE3581370D1 (de) Halbleitervorrichtung.
FI850853A7 (fi) Liitäntälaite.
DE3585404D1 (de) Fokusservovorrichtung.
DE3674671D1 (de) Loetvorrichtung.
NO850262L (no) Stroemlinjet t-formet intrauterininnretning
DE3586568D1 (de) Halbleitereinrichtung.
NO163268C (no) Siktinnretning.
IT8224720A0 (it) Circuito demultiplatore.
NL193475B (nl) Microprocessorinrichting.
ES546383A0 (es) Dispositivo de circuito integrado.
DE3778212D1 (de) Elektronisches handetikettiergeraet.
BR8504840A (pt) Circuito de pre-acentuacao
DE3781601D1 (de) Elektronisches handetikettiergeraet.
IT1206117B (it) Circuito demultiplatore.
DE3676531D1 (de) Elektronisches geraet.
DE3584102D1 (de) Integrierte halbleiterschaltungsvorrichtung.
NO853416L (no) Koblingsanordning.