ES531768A0 - Perfeccionamientos en un dispositivo para la deteccion de fallos superficiales. - Google Patents
Perfeccionamientos en un dispositivo para la deteccion de fallos superficiales.Info
- Publication number
- ES531768A0 ES531768A0 ES531768A ES531768A ES531768A0 ES 531768 A0 ES531768 A0 ES 531768A0 ES 531768 A ES531768 A ES 531768A ES 531768 A ES531768 A ES 531768A ES 531768 A0 ES531768 A0 ES 531768A0
- Authority
- ES
- Spain
- Prior art keywords
- detection
- surface faults
- faults
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Manufacturing Optical Record Carriers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3314620 | 1983-04-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| ES531768A0 true ES531768A0 (es) | 1985-05-16 |
| ES8505480A1 ES8505480A1 (es) | 1985-05-16 |
Family
ID=6197080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES531768A Expired ES8505480A1 (es) | 1983-04-22 | 1984-04-18 | Perfeccionamientos en un dispositivo para la deteccion de fallos superficiales. |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4632546A (es) |
| EP (1) | EP0123929B1 (es) |
| JP (2) | JPS6089735A (es) |
| DE (1) | DE3472300D1 (es) |
| ES (1) | ES8505480A1 (es) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3446355C2 (de) * | 1984-12-19 | 1986-11-06 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Optisches Fehlersuchgerät |
| DE3518832A1 (de) * | 1985-05-24 | 1986-11-27 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Oberflaechenbeschaffenheitsfeststellungs-lichtabtastvorrichtung mit einem lichtkonzentrator |
| DE3709500A1 (de) * | 1985-09-24 | 1988-10-06 | Sick Optik Elektronik Erwin | Optische bahnueberwachungseinrichtung mit zeilenkameras mit gerichteter beleuchtung |
| DE3534019A1 (de) * | 1985-09-24 | 1987-04-02 | Sick Optik Elektronik Erwin | Optische bahnueberwachungsvorrichtung |
| DE8700520U1 (de) * | 1987-01-12 | 1987-03-12 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Scanner zur optischen Abtastung von Objekten, insbesondere Aufzeichnungsplatten |
| GB2202627A (en) * | 1987-03-23 | 1988-09-28 | Sick Optik Elektronik Erwin | Optical arrangement in web monitoring device |
| US4868404A (en) * | 1987-04-23 | 1989-09-19 | Hajime Industries, Ltd. | Surface inspection apparatus using a mask system to monitor uneven surfaces |
| NL8802404A (nl) * | 1988-09-30 | 1990-04-17 | Meyn Bv | Werkwijze en inrichting voor het door middel van doorstraling controleren van voedselprodukten. |
| US5027418A (en) * | 1989-02-13 | 1991-06-25 | Matsushita Electric Industrial Co., Ltd. | Electro-optical inspection apparatus for printed-circuit boards with components mounted thereon |
| US4972091A (en) * | 1989-05-16 | 1990-11-20 | Canadian Patents And Development Limited/Societe Canadienne Des Brevets Et D'exploitation Limitee | Method and apparatus for detecting the presence of flaws in a moving sheet of material |
| US4943734A (en) * | 1989-06-30 | 1990-07-24 | Qc Optics, Inc. | Inspection apparatus and method for detecting flaws on a diffractive surface |
| JPH0695075B2 (ja) * | 1990-03-16 | 1994-11-24 | 工業技術院長 | 表面性状検出方法 |
| FR2688064B1 (fr) * | 1992-07-22 | 1997-10-17 | Scanera Sc | Dispositif de detection de defauts de materiaux fibreux |
| US5661561A (en) * | 1995-06-02 | 1997-08-26 | Accu-Sort Systems, Inc. | Dimensioning system |
| DE19528519A1 (de) * | 1995-08-03 | 1997-02-06 | Tzn Forschung & Entwicklung | Vorrichtung zur Detektion streifenförmiger Oberflächenfehler |
| US6853446B1 (en) * | 1999-08-16 | 2005-02-08 | Applied Materials, Inc. | Variable angle illumination wafer inspection system |
| US6596996B1 (en) * | 2001-07-24 | 2003-07-22 | The Board Of Regents For Oklahoma State University | Optical spectral reflectance sensor and controller |
| WO2003010488A1 (en) * | 2001-07-27 | 2003-02-06 | Hamamatsu Metrix Co., Ltd. | Composite optical sensor unit and optical disk inspection device using it |
| DE10137340A1 (de) * | 2001-07-31 | 2003-02-20 | Heidelberger Druckmasch Ag | Verfahren und Vorrichtung zur Erkennung von Fremdkörpern und Oberflächendefekten auf einer transparenten Vorlage sowie zur Korrektur von dadurch verursachten Bildfehlern einer Abbildung der Vorlage |
| JP2003247957A (ja) * | 2002-02-26 | 2003-09-05 | Matsushita Electric Ind Co Ltd | 表面異物検査装置 |
| US7130036B1 (en) | 2003-09-16 | 2006-10-31 | Kla-Tencor Technologies Corp. | Methods and systems for inspection of an entire wafer surface using multiple detection channels |
| GB2429764A (en) * | 2005-08-30 | 2007-03-07 | Imp College Innovations Ltd | A scanning device using a first optical system with a first focal length and a second optical system with a second focal length |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3474254A (en) * | 1968-02-26 | 1969-10-21 | Sick Erwin | Photoelectronic apparatus for scanning textile material |
| DE2200222A1 (de) * | 1972-01-04 | 1973-07-12 | Ibm Deutschland | Vorrichtung zur bestimmung der oberflaechenguete |
| DE2211654A1 (de) * | 1972-03-10 | 1973-09-20 | Paul Lippke | Einrichtung zum pruefen bewegter bahnen aus papier, kunststoff- oder metallfolien und dgl |
| US3790286A (en) * | 1972-04-21 | 1974-02-05 | Phillips Petroleum Co | Carbon black testing by analyzing non-specularly reflected polarized light |
| JPS5611894B2 (es) * | 1973-09-26 | 1981-03-17 | ||
| JPS5637499B2 (es) * | 1973-11-15 | 1981-09-01 | ||
| DE2611539C3 (de) * | 1976-03-18 | 1982-09-09 | Agfa-Gevaert Ag, 5090 Leverkusen | Verfahren zum Erkennen und Orten von sich in Längsrichtung einer laufenden Materialbahn erstreckenden Fehlern |
| US4030835A (en) * | 1976-05-28 | 1977-06-21 | Rca Corporation | Defect detection system |
| DE2627609A1 (de) * | 1976-06-19 | 1977-12-29 | Ibm Deutschland | Interferometrisches verfahren |
| US4180830A (en) * | 1977-06-28 | 1979-12-25 | Rca Corporation | Depth estimation system using diffractive effects of the grooves and signal elements in the grooves |
| JPS5414789A (en) * | 1977-07-05 | 1979-02-03 | Mitsubishi Electric Corp | Surface inspecting apparatus |
| US4197011A (en) * | 1977-09-22 | 1980-04-08 | Rca Corporation | Defect detection and plotting system |
| DE2800351B2 (de) * | 1978-01-04 | 1979-11-15 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Optische Vorrichtung zur Bestimmung des Lichtaustrittswinkels bei einer mit einem Lichtfleck abgetasteten Materialbahn |
| JPS5594145A (en) * | 1979-01-12 | 1980-07-17 | Hitachi Ltd | Method of and device for inspecting surface of article |
| JPS5587907A (en) * | 1978-12-27 | 1980-07-03 | Fuji Photo Film Co Ltd | Device for continuously inspecting surface of object |
| US4352564A (en) * | 1980-05-30 | 1982-10-05 | Rca Corporation | Missing order defect detection apparatus |
| JPS6038592B2 (ja) * | 1980-06-16 | 1985-09-02 | 石川島播磨重工業株式会社 | 高速回転機器の従動機器側シ−ル構造 |
| US4395122A (en) * | 1981-04-29 | 1983-07-26 | Rca Corporation | Defect detection system |
-
1984
- 1984-03-30 DE DE8484103553T patent/DE3472300D1/de not_active Expired
- 1984-03-30 EP EP84103553A patent/EP0123929B1/de not_active Expired
- 1984-04-13 US US06/599,890 patent/US4632546A/en not_active Expired - Fee Related
- 1984-04-16 JP JP59076406A patent/JPS6089735A/ja active Pending
- 1984-04-18 ES ES531768A patent/ES8505480A1/es not_active Expired
-
1992
- 1992-11-24 JP JP080727U patent/JPH064655U/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE3472300D1 (en) | 1988-07-28 |
| EP0123929B1 (de) | 1988-06-22 |
| EP0123929A2 (de) | 1984-11-07 |
| EP0123929A3 (en) | 1985-12-04 |
| JPH064655U (ja) | 1994-01-21 |
| ES8505480A1 (es) | 1985-05-16 |
| US4632546A (en) | 1986-12-30 |
| JPS6089735A (ja) | 1985-05-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FD1A | Patent lapsed |
Effective date: 19970612 |