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ES527815A0 - ALARM AND CONTROL SYSTEM FOR SEMICONDUCTOR MANUFACTURING PLANTS - Google Patents

ALARM AND CONTROL SYSTEM FOR SEMICONDUCTOR MANUFACTURING PLANTS

Info

Publication number
ES527815A0
ES527815A0 ES527815A ES527815A ES527815A0 ES 527815 A0 ES527815 A0 ES 527815A0 ES 527815 A ES527815 A ES 527815A ES 527815 A ES527815 A ES 527815A ES 527815 A0 ES527815 A0 ES 527815A0
Authority
ES
Spain
Prior art keywords
alarm
control system
semiconductor manufacturing
manufacturing plants
plants
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES527815A
Other languages
Spanish (es)
Other versions
ES8505124A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nohmi Bosai Ltd
Original Assignee
Nohmi Bosai Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nohmi Bosai Kogyo Co Ltd filed Critical Nohmi Bosai Kogyo Co Ltd
Publication of ES8505124A1 publication Critical patent/ES8505124A1/en
Publication of ES527815A0 publication Critical patent/ES527815A0/en
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B17/00—Fire alarms; Alarms responsive to explosion
    • G08B17/10—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means
    • G08B17/117—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means by using a detection device for specific gases, e.g. combustion products, produced by the fire

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Emergency Alarm Devices (AREA)
  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Fire Alarms (AREA)
  • Fire-Detection Mechanisms (AREA)
  • Incineration Of Waste (AREA)
ES527815A 1982-11-27 1983-11-25 ALARM AND CONTROL SYSTEM FOR SEMICONDUCTOR MANUFACTURING PLANTS Granted ES527815A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20688982A JPS5998294A (en) 1982-11-27 1982-11-27 Alarm and controller for semiconductor plant or the like

Publications (2)

Publication Number Publication Date
ES8505124A1 ES8505124A1 (en) 1985-04-16
ES527815A0 true ES527815A0 (en) 1985-04-16

Family

ID=16530723

Family Applications (1)

Application Number Title Priority Date Filing Date
ES527815A Granted ES527815A0 (en) 1982-11-27 1983-11-25 ALARM AND CONTROL SYSTEM FOR SEMICONDUCTOR MANUFACTURING PLANTS

Country Status (4)

Country Link
EP (1) EP0112491B1 (en)
JP (1) JPS5998294A (en)
DE (1) DE3381098D1 (en)
ES (1) ES527815A0 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2226813A5 (en) * 1973-04-04 1974-11-15 Cifal Inflammable product fire prevention system - has IR radiation detector injecting cooling fluid and operating alarm
JPS5323195A (en) * 1976-08-16 1978-03-03 Otsuka Kagaku Yakuhin Method of treating flame resistance for inflammable organic material and flame resisting composition
US4069018A (en) * 1976-09-28 1978-01-17 Weyerhaeuser Company Explosive gas monitoring method and apparatus
US4267889A (en) * 1978-12-27 1981-05-19 Williams Robert M Explosion suppression system for fire or explosion susceptible enclosure
NL8003068A (en) * 1980-05-28 1982-01-04 Naarden & Shell Aroma Chem PERFUME COMPOSITIONS AND PERFUMED MATERIALS AND ARTICLES CONTAINING ESTERS OF BICYCLIC MONOTERPEENIC ACIDS AS RAW MATERIAL.

Also Published As

Publication number Publication date
EP0112491A2 (en) 1984-07-04
EP0112491A3 (en) 1987-09-16
EP0112491B1 (en) 1990-01-10
DE3381098D1 (en) 1990-02-15
JPS5998294A (en) 1984-06-06
ES8505124A1 (en) 1985-04-16

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Legal Events

Date Code Title Description
FD1A Patent lapsed

Effective date: 20010402