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ES497005A0 - Perfeccionamientos en boquillas para depositar en continuo sobre un substrato una capa de materia solida - Google Patents

Perfeccionamientos en boquillas para depositar en continuo sobre un substrato una capa de materia solida

Info

Publication number
ES497005A0
ES497005A0 ES497005A ES497005A ES497005A0 ES 497005 A0 ES497005 A0 ES 497005A0 ES 497005 A ES497005 A ES 497005A ES 497005 A ES497005 A ES 497005A ES 497005 A0 ES497005 A0 ES 497005A0
Authority
ES
Spain
Prior art keywords
nozzles
substrate
layer
solid matter
continuous deposit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES497005A
Other languages
English (en)
Other versions
ES8107052A1 (es
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societa Italiana Vetro SIV SpA
Original Assignee
Societa Italiana Vetro SIV SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societa Italiana Vetro SIV SpA filed Critical Societa Italiana Vetro SIV SpA
Publication of ES497005A0 publication Critical patent/ES497005A0/es
Publication of ES8107052A1 publication Critical patent/ES8107052A1/es
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • C03C17/245Oxides by deposition from the vapour phase
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/211SnO2
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/212TiO2
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/152Deposition methods from the vapour phase by cvd

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Nozzles (AREA)
  • Chemical Vapour Deposition (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
ES497005A 1979-11-21 1980-11-20 Perfeccionamientos en boquillas para depositar en continuo sobre un substrato una capa de materia solida Expired ES8107052A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1037779 1979-11-21

Publications (2)

Publication Number Publication Date
ES497005A0 true ES497005A0 (es) 1981-10-01
ES8107052A1 ES8107052A1 (es) 1981-10-01

Family

ID=4362579

Family Applications (1)

Application Number Title Priority Date Filing Date
ES497005A Expired ES8107052A1 (es) 1979-11-21 1980-11-20 Perfeccionamientos en boquillas para depositar en continuo sobre un substrato una capa de materia solida

Country Status (16)

Country Link
US (1) US4361284A (es)
EP (1) EP0029809B1 (es)
JP (1) JPS5687451A (es)
KR (2) KR830004448A (es)
AU (1) AU544964B2 (es)
CA (1) CA1150749A (es)
CS (1) CS274255B2 (es)
DD (1) DD154584A5 (es)
DE (1) DE3066643D1 (es)
ES (1) ES8107052A1 (es)
IT (1) IT1134153B (es)
MX (1) MX153336A (es)
PL (1) PL129254B1 (es)
SU (1) SU1187705A3 (es)
TR (1) TR21534A (es)
ZA (1) ZA807242B (es)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH643469A5 (fr) * 1981-12-22 1984-06-15 Siv Soc Italiana Vetro Installation pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide.
US4524718A (en) * 1982-11-22 1985-06-25 Gordon Roy G Reactor for continuous coating of glass
WO1985002418A1 (en) * 1983-12-01 1985-06-06 Shatterproof Glass Corporation Gas distribution system for sputtering cathodes
US4928627A (en) * 1985-12-23 1990-05-29 Atochem North America, Inc. Apparatus for coating a substrate
DE3869793D1 (de) * 1987-01-27 1992-05-14 Asahi Glass Co Ltd Gaszufuehrungsrohr fuer die reaktive abscheidung aus der gasphase.
US4793282A (en) * 1987-05-18 1988-12-27 Libbey-Owens-Ford Co. Distributor beam for chemical vapor deposition on glass
US5136975A (en) * 1990-06-21 1992-08-11 Watkins-Johnson Company Injector and method for delivering gaseous chemicals to a surface
DE4103413C1 (es) * 1991-02-05 1992-11-12 Gunter M. 8918 Diessen De Voss
US6379466B1 (en) * 1992-01-17 2002-04-30 Applied Materials, Inc. Temperature controlled gas distribution plate
FR2724923B1 (fr) * 1994-09-27 1996-12-20 Saint Gobain Vitrage Technique de depot de revetements par pyrolyse de composition de gaz precurseur(s)
JP3836217B2 (ja) * 1997-05-21 2006-10-25 株式会社ベルデックス 封止液供給器具および方法
CN102154628B (zh) * 2004-08-02 2014-05-07 维高仪器股份有限公司 用于化学气相沉积反应器的多气体分配喷射器
DE102006043542B4 (de) * 2006-09-12 2012-05-16 Innovent E.V. Verfahren zum Beschichten von Oberflächen
DE102006043543B4 (de) * 2006-09-12 2012-05-10 Innovent E.V. Homogenisator für der Beschichtung von Oberflächen dienende Gasströme
US8431187B2 (en) * 2006-12-28 2013-04-30 Korea Institute Of Industrial Technology Manufacturing method of filter media available at medium and high temperature exhaust gas using foam coating technology and filter media manufactured thereby
JP5116313B2 (ja) * 2007-02-07 2013-01-09 東洋刃物株式会社 塗布ヘッド
JP5727368B2 (ja) * 2008-05-19 2015-06-03 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニーE.I.Du Pont De Nemours And Company 電子デバイスにおける気相コーティングの装置および方法
EP2688851B1 (en) 2011-03-23 2019-01-23 Pilkington Group Limited Apparatus for depositing thin film coatings and method of deposition utilizing such apparatus
CN102921600B (zh) * 2012-11-30 2016-04-06 贵州贵航汽车零部件股份有限公司 涂油机涂油装置
MY201789A (en) * 2017-10-26 2024-03-18 First Solar Inc Systems and methods for vaporization and vapor distribution
KR102786474B1 (ko) * 2022-03-31 2025-03-27 참엔지니어링(주) 노즐형 증착장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3511703A (en) * 1963-09-20 1970-05-12 Motorola Inc Method for depositing mixed oxide films containing aluminum oxide
GB1282866A (en) 1968-08-16 1972-07-26 Pilkington Brothers Ltd Improvements in or relating to the production of glass having desired surface characteristics
CH544156A (de) 1971-04-16 1973-11-15 Bbc Brown Boveri & Cie Verfahren zur Herstellung von oxydischen Halbleiterschichten und Vorrichtung zur Durchführung des Verfahrens
US3970037A (en) * 1972-12-15 1976-07-20 Ppg Industries, Inc. Coating composition vaporizer
GB1516032A (en) 1976-04-13 1978-06-28 Bfg Glassgroup Coating of glass
US4270702A (en) * 1978-04-26 1981-06-02 Albany International Corp. Adjustable orifice air knife
CH628600A5 (fr) * 1979-02-14 1982-03-15 Siv Soc Italiana Vetro Procede pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide et installation pour la mise en oeuvre de ce procede.

Also Published As

Publication number Publication date
ZA807242B (en) 1981-11-25
JPS6148988B2 (es) 1986-10-27
EP0029809A1 (fr) 1981-06-03
MX153336A (es) 1986-09-22
CS274255B2 (en) 1991-04-11
JPS5687451A (en) 1981-07-16
CS797580A2 (en) 1990-09-12
EP0029809B1 (fr) 1984-02-15
KR830004448A (ko) 1983-07-13
KR860000024Y1 (ko) 1986-01-30
PL227980A1 (es) 1981-09-04
AU6440480A (en) 1981-05-28
PL129254B1 (en) 1984-04-30
IT1134153B (it) 1986-07-31
DE3066643D1 (en) 1984-03-22
IT8025742A0 (it) 1980-11-03
AU544964B2 (en) 1985-06-27
CA1150749A (fr) 1983-07-26
DD154584A5 (de) 1982-04-07
US4361284A (en) 1982-11-30
ES8107052A1 (es) 1981-10-01
TR21534A (tr) 1984-08-22
SU1187705A3 (ru) 1985-10-23

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Legal Events

Date Code Title Description
FD1A Patent lapsed

Effective date: 19970519