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ES400839A1 - A semiconductor device for converting mechanical voltage in electrical signals. (Machine-translation by Google Translate, not legally binding) - Google Patents

A semiconductor device for converting mechanical voltage in electrical signals. (Machine-translation by Google Translate, not legally binding)

Info

Publication number
ES400839A1
ES400839A1 ES400839A ES400839A ES400839A1 ES 400839 A1 ES400839 A1 ES 400839A1 ES 400839 A ES400839 A ES 400839A ES 400839 A ES400839 A ES 400839A ES 400839 A1 ES400839 A1 ES 400839A1
Authority
ES
Spain
Prior art keywords
electrical signals
semiconductor device
translation
machine
legally binding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES400839A
Other languages
Spanish (es)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of ES400839A1 publication Critical patent/ES400839A1/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R21/00—Variable-resistance transducers
    • H04R21/02—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/16—Mounting or tensioning of diaphragms or cones
    • H04R7/18—Mounting or tensioning of diaphragms or cones at the periphery
    • H04R7/22—Clamping rim of diaphragm or cone against seating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H10P95/00—

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Recrystallisation Techniques (AREA)

Abstract

A semiconductor device for converting mechanical stresses into electrical signals, said device comprising at least one flat flex spring, of semiconductor material, in which at least one circuit element is provided, which is sensitive to mechanical stresses in the spring of bending, and which is provided with contacts to derive electrical signals from the voltage-sensitive circuit element, characterized in that the semiconductor device comprises a thickened crown or support rim, for the flat flex spring or springs, the crown of which consists of the same semiconductor material as the spring or springs and is integral with the semiconductor material of the spring or springs. (Machine-translation by Google Translate, not legally binding)
ES400839A 1968-11-29 1972-03-16 A semiconductor device for converting mechanical voltage in electrical signals. (Machine-translation by Google Translate, not legally binding) Expired ES400839A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6817089.A NL162254B (en) 1968-11-29 1968-11-29 SEMI-CONDUCTOR DEVICE FOR CONVERSION OF MECHANICAL VOLTAGES INTO ELECTRICAL SIGNALS AND METHOD OF MANUFACTURING THIS.

Publications (1)

Publication Number Publication Date
ES400839A1 true ES400839A1 (en) 1975-02-01

Family

ID=19805282

Family Applications (2)

Application Number Title Priority Date Filing Date
ES373779A Expired ES373779A1 (en) 1968-11-29 1969-11-21 A METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES.
ES400839A Expired ES400839A1 (en) 1968-11-29 1972-03-16 A semiconductor device for converting mechanical voltage in electrical signals. (Machine-translation by Google Translate, not legally binding)

Family Applications Before (1)

Application Number Title Priority Date Filing Date
ES373779A Expired ES373779A1 (en) 1968-11-29 1969-11-21 A METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES.

Country Status (10)

Country Link
AT (1) AT316894B (en)
BE (1) BE742331A (en)
BR (1) BR6914557D0 (en)
CH (1) CH518006A (en)
DE (1) DE1959527C3 (en)
ES (2) ES373779A1 (en)
FR (1) FR2024961A1 (en)
GB (1) GB1295650A (en)
NL (1) NL162254B (en)
SE (2) SE384437B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4071838A (en) 1976-02-09 1978-01-31 Diax Corporation Solid state force transducer and method of making same
US4191057A (en) * 1978-06-28 1980-03-04 Gould Inc. Inversion layer sprain gauge
DE2841312C2 (en) * 1978-09-22 1985-06-05 Robert Bosch Gmbh, 7000 Stuttgart Monolithic semiconductor pressure sensor and process for its manufacture
JPS5550668A (en) * 1978-10-06 1980-04-12 Hitachi Ltd Semiconductor pressure converter
IT1212404B (en) * 1979-02-22 1989-11-22 Rca Corp METHOD OF A SINGLE ATTACK FOR THE FORMATION OF A MESA PRESENTING A MULTIPLE WALL.
ES2035360T3 (en) * 1988-04-21 1993-04-16 Marelli Autronica S.P.A. AN ELECTRIC FORCE AND / OR DEFORMATION SENSOR, PARTICULARLY FOR USE AS A PRESSURE SENSOR.
US4904978A (en) * 1988-04-29 1990-02-27 Solartron Electronics, Inc. Mechanical sensor for high temperature environments
JP2719448B2 (en) * 1991-01-24 1998-02-25 三菱電機株式会社 Semiconductor pressure detector
EP1799446A4 (en) * 2004-08-20 2010-03-03 Semitool Inc SEMICONDUCTOR PARTS SLIMMING SYSTEM
CN113555346B (en) * 2020-08-21 2023-05-23 友达光电股份有限公司 Circuit board and method for measuring strain amount of circuit board

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3270554A (en) * 1961-01-04 1966-09-06 Bell Telephone Labor Inc Diffused layer transducers
US3277698A (en) * 1963-11-15 1966-10-11 Bell Telephone Labor Inc Stress sensing semiconductive devices
NL153947B (en) * 1967-02-25 1977-07-15 Philips Nv PROCEDURE FOR MANUFACTURING SEMICONDUCTOR DEVICES, USING A SELECTIVE ELECTROLYTIC ETCHING PROCESS AND OBTAINING SEMI-CONDUCTOR DEVICE BY APPLICATION OF THE PROCESS.
BE711537A (en) * 1968-03-01 1968-09-02

Also Published As

Publication number Publication date
DE1959527A1 (en) 1970-06-11
DE1959527B2 (en) 1981-03-19
SE384437B (en) 1976-05-03
DE1959527C3 (en) 1981-12-10
AT316894B (en) 1974-07-25
NL162254B (en) 1979-11-15
GB1295650A (en) 1972-11-08
BR6914557D0 (en) 1973-01-02
NL6817089A (en) 1970-06-02
FR2024961A1 (en) 1970-09-04
SE363700B (en) 1974-01-28
CH518006A (en) 1972-01-15
ES373779A1 (en) 1972-05-16
BE742331A (en) 1970-05-27

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