[go: up one dir, main page]

ES2012420A6 - Acelerometro capacitivo y metodo de fabricacion del mismo. - Google Patents

Acelerometro capacitivo y metodo de fabricacion del mismo.

Info

Publication number
ES2012420A6
ES2012420A6 ES8803392A ES8803392A ES2012420A6 ES 2012420 A6 ES2012420 A6 ES 2012420A6 ES 8803392 A ES8803392 A ES 8803392A ES 8803392 A ES8803392 A ES 8803392A ES 2012420 A6 ES2012420 A6 ES 2012420A6
Authority
ES
Spain
Prior art keywords
centre electrode
electrode
centre
body element
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
ES8803392A
Other languages
English (en)
Inventor
Ari Lehto
Kalervo Jappinen
Anna-Maija Karkkainen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vaisala Oy
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of ES2012420A6 publication Critical patent/ES2012420A6/es
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)

Abstract

ACELEROMETRO CAPACITIVO Y METODO DE FABRICACION DEL MISMO. EL ACELEROMETRO COMPRENDE DOS ELECTRODOS LATERALES (15) CON ELECTRODOS FIJOS (4, 6'') Y UN ELECTRODO CENTRAL (16) DISPUESTO ENTRE LOS ELECTRODOS FIJOS (15), EL CUAL POSEE UN ELECTRODO CENTRAL (17). EL ELECTRODO (16) COMPRENDE UN CUERPO PLANO (3) ALINEADO CON LOS ELECTRODOS (15), EN CUYO ELEMENTO, LA SECCION QUE PERMANECE ENTRE LOS ELECTRODOS LATERALES (15) LLEVA UNA RANURA QUE PENETRA EN EL ELEMENTO (3) EN FORMA DE U Y QUE DELINEA UN ELECTRODO CENTRAL (17) EN FORMA DE BRAZO EN VOLADIZO PARALELO AL CUERPO (3) DE MANERA QUE LA PUNTA (1) DEL ELECTRODO (17) ES MAS DELGADA QUE EL CUERPO (3) DE MANERA QUE SE FORMAN INTERSTICIOS (7) ENTRE LOS ELECTRODOS LATERALES (4, 6'') Y EL ELECTRODO CENTRAL (17).
ES8803392A 1987-11-09 1988-11-08 Acelerometro capacitivo y metodo de fabricacion del mismo. Expired - Fee Related ES2012420A6 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI874942A FI81915C (fi) 1987-11-09 1987-11-09 Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.

Publications (1)

Publication Number Publication Date
ES2012420A6 true ES2012420A6 (es) 1990-03-16

Family

ID=8525381

Family Applications (1)

Application Number Title Priority Date Filing Date
ES8803392A Expired - Fee Related ES2012420A6 (es) 1987-11-09 1988-11-08 Acelerometro capacitivo y metodo de fabricacion del mismo.

Country Status (10)

Country Link
JP (1) JPH01259265A (es)
KR (1) KR890008569A (es)
CN (1) CN1022136C (es)
DE (1) DE3837883A1 (es)
ES (1) ES2012420A6 (es)
FI (1) FI81915C (es)
FR (1) FR2622975B1 (es)
GB (1) GB2212274A (es)
IT (1) IT1224301B (es)
SE (1) SE468067B (es)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4983485A (en) * 1988-04-13 1991-01-08 Shikoku Chemicals Corporation Positively chargeable toner
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion
US6864677B1 (en) 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
JPH03210478A (ja) * 1990-01-12 1991-09-13 Nissan Motor Co Ltd 半導体加速度センサ
DE4000903C1 (es) * 1990-01-15 1990-08-09 Robert Bosch Gmbh, 7000 Stuttgart, De
JP2786321B2 (ja) * 1990-09-07 1998-08-13 株式会社日立製作所 半導体容量式加速度センサ及びその製造方法
US5421213A (en) 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
DE4222472C2 (de) * 1992-07-09 1998-07-02 Bosch Gmbh Robert Beschleunigungssensor
JP2533272B2 (ja) * 1992-11-17 1996-09-11 住友電気工業株式会社 半導体デバイスの製造方法
FR2698447B1 (fr) * 1992-11-23 1995-02-03 Suisse Electronique Microtech Cellule de mesure micro-usinée.
DE10117630B4 (de) * 2001-04-09 2005-12-29 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
EP1243930A1 (de) 2001-03-08 2002-09-25 EADS Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
DE10111149B4 (de) * 2001-03-08 2011-01-05 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
DE10117257A1 (de) * 2001-04-06 2002-10-17 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
RU2207658C2 (ru) * 2001-07-09 2003-06-27 ФГУП "НИИ физических измерений" Способ изготовления микромеханического инерциального чувствительного элемента емкостного типа
JP2005077349A (ja) * 2003-09-03 2005-03-24 Mitsubishi Electric Corp 加速度センサ
WO2007104289A1 (de) 2006-03-10 2007-09-20 Conti Temic Microelectronic Gmbh Mikromechanischer drehratensensor
EP2259018B1 (en) * 2009-05-29 2017-06-28 Infineon Technologies AG Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system
CN104395842A (zh) * 2012-04-30 2015-03-04 惠普发展公司，有限责任合伙企业 基于用户敲击的命令的控制信号
CN106771361B (zh) * 2016-12-15 2023-04-25 西安邮电大学 双电容式微机械加速度传感器及基于其的温度自补偿系统
CN117368525A (zh) * 2017-04-06 2024-01-09 中国工程物理研究院电子工程研究所 石英摆式加速度计

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
JPS6197572A (ja) * 1984-10-19 1986-05-16 Nissan Motor Co Ltd 半導体加速度センサの製造方法
US4744249A (en) * 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
DE3625411A1 (de) * 1986-07-26 1988-02-04 Messerschmitt Boelkow Blohm Kapazitiver beschleunigungssensor
DE3703793A1 (de) * 1987-02-07 1988-08-18 Messerschmitt Boelkow Blohm Detektorelement

Also Published As

Publication number Publication date
IT1224301B (it) 1990-10-04
FR2622975A1 (fr) 1989-05-12
FR2622975B1 (fr) 1991-07-12
FI81915C (fi) 1990-12-10
CN1022136C (zh) 1993-09-15
GB2212274A (en) 1989-07-19
FI81915B (fi) 1990-08-31
KR890008569A (ko) 1989-07-12
CN1033110A (zh) 1989-05-24
GB8826263D0 (en) 1988-12-14
JPH01259265A (ja) 1989-10-16
IT8848532A0 (it) 1988-11-08
SE468067B (sv) 1992-10-26
FI874942L (fi) 1989-05-10
SE8804039D0 (sv) 1988-11-08
DE3837883A1 (de) 1989-05-18
FI874942A0 (fi) 1987-11-09

Similar Documents

Publication Publication Date Title
ES2012420A6 (es) Acelerometro capacitivo y metodo de fabricacion del mismo.
US7267006B2 (en) Accelerometer
FI74350B (fi) Kapacitiv absoluttryckgivare.
GB1525781A (en) Piezoelectric transducer unit and hydrophone assembly
IT1179644B (it) Dispositivo sensore elettrico di inclinazione e procedimento per la sua fabbricazione
WO2003036305A3 (en) Accelerometer
US5103279A (en) Field effect transistor with acceleration dependent gain
DE69233641D1 (de) Herstellungsverfahren für integrierte ausgerichtete Tunnelspitzenpaare
GB1507251A (en) Accelerometer transducer
WO1989012830A3 (en) Micro-machined accelerometer
CA2066261A1 (en) Micromechanical switch
DE3675519D1 (de) Kraftmesswandler mit dehnungsmessstreifen.
US5840597A (en) Method of making a semiconductor device force and/or acceleration sensor
WO1991014185A1 (en) Differential capacitive transducer and method of making
GB8729742D0 (en) Resonator pressure transducer structure & method of manufacture
EP0322093A3 (en) Rectilinearly deflectable element fabricated from a single wafer
ATE126075T1 (de) Aktivitätsdetektor, besonders für herzschrittmacher.
GB1534276A (en) Force transducers
US3995247A (en) Transducers employing gap-bridging shim members
GB1257393A (es)
JPH01163669A (ja) 平面振子構造の加速度センサ
ES8307063A1 (es) "perfeccionamientos en los transductores de fuerza".
SU1809392A1 (en) Piezoelectric acceleration transducer
JPS6459075A (en) Semiconductor acceleration sensor
GB1372030A (en) Transducers

Legal Events

Date Code Title Description
SA6 Expiration date (snapshot 920101)

Free format text: 2008-11-08

FD1A Patent lapsed

Effective date: 20081110