EP2503032A1 - Procédé pour le nettoyage d'une surface - Google Patents
Procédé pour le nettoyage d'une surface Download PDFInfo
- Publication number
- EP2503032A1 EP2503032A1 EP11159171A EP11159171A EP2503032A1 EP 2503032 A1 EP2503032 A1 EP 2503032A1 EP 11159171 A EP11159171 A EP 11159171A EP 11159171 A EP11159171 A EP 11159171A EP 2503032 A1 EP2503032 A1 EP 2503032A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- droplet
- nanobubbles
- liquid
- solvent
- over
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000004140 cleaning Methods 0.000 title claims abstract description 15
- 239000002101 nanobubble Substances 0.000 claims abstract description 45
- 239000007788 liquid Substances 0.000 claims abstract description 38
- 238000011109 contamination Methods 0.000 claims abstract description 8
- 239000002904 solvent Substances 0.000 claims description 19
- 238000005868 electrolysis reaction Methods 0.000 claims description 11
- 239000011159 matrix material Substances 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 239000000356 contaminant Substances 0.000 claims description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
- 239000003792 electrolyte Substances 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims description 2
- 239000002245 particle Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001900 extreme ultraviolet lithography Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F1/00—Electrolytic cleaning, degreasing, pickling or descaling
Definitions
- the invention relates to a method of cleaning a surface using continuously generated nanobubbles.
- the invention further relates to a system for enabling cleaning a surface using continuously generated nanobubbles.
- a method of cleaning a surface using electrochemically generated nanobubbles is known from Z.Wu et al "Cleaning using nanobubbles: defouling by electrochemical generation of bubbles".
- a surface conceived to be cleaned is submerged in an electrolyte in which nanobubbles are generated.
- the nanobubbles interacting with the surface remove (part of) a thin film layer on the surface and by doing so clean the surface.
- the method of cleaning a surface comprises the steps of:
- the droplet comprises the nanobubbles generated using electrolysis.
- the surface or at least a portion of it must be conductive to form a part of the electrolysis electric circuit.
- electrolysis of water is used.
- the droplet is formed by one or more needle-like electrodes. It will be appreciated, however, that a plurality of droplets may be formed at the same time on the surface using a suitable plurality of electrodes.
- the one or more needle-like electrodes are adapted to conduct the droplet-forming liquid to the surface.
- the droplet comprises the nanobubbles generated by mixing of two solvent liquids.
- nanobubbles especially when the second liquid solvent has a lower gas solubility with respect to the first liquid solvent.
- the first solvent liquid is alcohol
- the second solvent liquid is water
- nanobubbles may be continuously formed at the surface in the controlled way.
- Suitable examples of alcohol are ethanol, propanol, methanol, etc. More details on this embodiment will be given with reference to Figure 2 .
- the droplet comprising the nanobubbles is a droplet of an electrolyte which is displaced over the surface using an electrowetting matrix, the surface forming a part of the electrowetting matrix.
- the droplet (or droplets) formed on the surface may be efficiently and controllably displaced when the surface acts as a first electrode in the electrowetting set-up. More details on this embodiment will be given with reference to Figure 3 .
- the droplet When applying the electrowetting principle, the droplet may be displaced over the surface by applying a sequence of potentials to electrodes forming the electrowetting matrix.
- a further conduit arranged in fluid communication with the droplet may be provided for conducting the liquid away from the surface.
- the contaminants accumulated in the droplet are conducted away from the surface.
- the system for enabling cleaning a surface using continuously generated nanobubbles comprises:
- Figure 1 presents in a schematic way an embodiment 10 wherein water electrolysis is applied for generating nanobubbles and displacing a droplet over the surface.
- the surface 2 may relate to any suitable surface which has to be made substantially free from surface contaminations.
- the surface 2 may relate to a surface of a wafer.
- the method of the invention is suitable for cleaning other surfaces, plain or patterned.
- extreme ultraviolet lithography reticles, glass plates, and other substrates, especially for semiconductor industry: integrated circuit, light emitting diode, flat panel display, photovoltaics, and nanotechnology-produced items may be successfully cleaned.
- a liquid droplet 3 comprising nanobubbles 3a is generated on the surface 2 .
- an electrolysis set-up is used.
- the electrolysis set-up comprises a voltage source 5 adapted to generate voltage between the surface 2 and a working electrode 4.
- the working electrode may be needle formed. It will be appreciated that for realization of the electrolysis set-up the surface 2 should be electrically conductive.
- the working liquid water may be used.
- the water may be supplied by a suitable conduit (not shown), or, alternatively, the working electrode 4 may be provided with a conduit for supplying water to the surface 2.
- the droplet of a suitable liquid for example, water
- the surface 2 will be subject to cleaning.
- the working electrode 4 may be suitably displaced.
- the displacement pattern is pre-programmed.
- a further conduit 4a is provided.
- the further conduit is displaceable in cooperation with the electrode 4.
- the new clean droplets may be generated and the cleaning procedure may be resumed. It will be appreciated that a plurality of individual droplets comprising nanobubbles may be generated and displaced in this way.
- Figure 2 presents in a schematic way an embodiment 20 wherein two solvents are used for generating nanobubbles, displacing the droplet over the surface. This particular embodiment is based on the insight that when two solvent liquids having different gas solubility are mixed in a droplet 23, generation of nanobubbles 23a will occur.
- a conduit 24 may be provided which comprises a suitable bifurcation for conducting a first solvent liquid, such as alcohol, and a second solvent liquid, such as water towards the surface 22 conceived to be cleaned.
- a first solvent liquid such as alcohol
- a second solvent liquid such as water
- the first solvent liquid may be conducted using the arm 24a and the second solvent liquid may be conducted using the arm 24b.
- a further conduit 25 is provided for removing particles from the surface .
- the supply conduit 24 and the further conduit 25 are movable in accordance with each other over the surface 22. It will be appreciated that a plurality of individual droplets comprising nanobubbles may be generated and displaced in this way.
- Figure 3 presents in a schematic way an embodiment 30 wherein an electrowetting matrix is used for generating nanobubbles and displacing a droplet over the surface.
- This particular embodiment is based on the insight that electrowetting principle may be used for displacing the droplet over the surface 32, which is conceived to be cleaned.
- a suitable electrolyte such as diluted ammonia may be selected.
- the droplet having surface portions 33a, 33b and comprising nanobubbles 33a', formed between the surface 32 and the matrix 34 may be displaced.
- the matrix 34 may comprise a suitable number of electrode portions 36a, ...36n which can be energized separately by the voltage pulses. It will be also appreciated that a plurality of individual droplets may be generated and displaced over the surface 32 in this way.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP11159171A EP2503032A1 (fr) | 2011-03-22 | 2011-03-22 | Procédé pour le nettoyage d'une surface |
| PCT/NL2012/050174 WO2012128627A1 (fr) | 2011-03-22 | 2012-03-21 | Procédé de nettoyage d'une surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP11159171A EP2503032A1 (fr) | 2011-03-22 | 2011-03-22 | Procédé pour le nettoyage d'une surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP2503032A1 true EP2503032A1 (fr) | 2012-09-26 |
Family
ID=44351645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP11159171A Withdrawn EP2503032A1 (fr) | 2011-03-22 | 2011-03-22 | Procédé pour le nettoyage d'une surface |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP2503032A1 (fr) |
| WO (1) | WO2012128627A1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104475393A (zh) * | 2014-11-24 | 2015-04-01 | 广东省农业科学院蚕业与农产品加工研究所 | 一种果蔬清洗消毒方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106794490B (zh) | 2014-09-05 | 2020-09-11 | 坦南特公司 | 用于供应具有纳米气泡的处理液体的系统和方法 |
| CN113279044B (zh) * | 2021-04-06 | 2023-04-07 | 重庆立道新材料科技有限公司 | 除垢装置及除垢方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009101299A (ja) * | 2007-10-24 | 2009-05-14 | Fuji Xerox Co Ltd | マイクロナノバブル発生方法、マイクロ流路の洗浄方法、マイクロナノバブル発生システム、及び、マイクロリアクター |
| US20090120460A1 (en) * | 2007-11-09 | 2009-05-14 | Tennant Company | Soft floor pre-spray unit utilizing electrochemically-activated water and method of cleaning soft floors |
-
2011
- 2011-03-22 EP EP11159171A patent/EP2503032A1/fr not_active Withdrawn
-
2012
- 2012-03-21 WO PCT/NL2012/050174 patent/WO2012128627A1/fr not_active Ceased
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009101299A (ja) * | 2007-10-24 | 2009-05-14 | Fuji Xerox Co Ltd | マイクロナノバブル発生方法、マイクロ流路の洗浄方法、マイクロナノバブル発生システム、及び、マイクロリアクター |
| US20110168210A1 (en) * | 2007-10-24 | 2011-07-14 | Fuji Xerox Co., Ltd. | Micro-nano bubble generating method, microchannel cleaning method, micro-nano bubble generating system, and microreactor |
| US20090120460A1 (en) * | 2007-11-09 | 2009-05-14 | Tennant Company | Soft floor pre-spray unit utilizing electrochemically-activated water and method of cleaning soft floors |
Non-Patent Citations (2)
| Title |
|---|
| WU Z H ET AL: "Cleaning using nanobubbles: Defouling by electrochemical generation of bubbles", JOURNAL OF COLLOID AND INTERFACE SCIENCE, ACADEMIC PRESS, NEW YORK, NY, US, vol. 328, no. 1, 1 December 2008 (2008-12-01), pages 10 - 14, XP025589341, ISSN: 0021-9797, [retrieved on 20080909], DOI: 10.1016/J.JCIS.2008.08.064 * |
| YANG, SHANGJIONG: "Manipulating surface nanobubbles", DISSERTATION, 9 October 2008 (2008-10-09), Twente, NL, XP002656895, Retrieved from the Internet <URL:http://dx.doi.org/10.3990/1.9789036527286> [retrieved on 20110816] * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104475393A (zh) * | 2014-11-24 | 2015-04-01 | 广东省农业科学院蚕业与农产品加工研究所 | 一种果蔬清洗消毒方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012128627A1 (fr) | 2012-09-27 |
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Effective date: 20130327 |