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EP1921640A1 - Spiralförmiger geschlossener magnetischer Kern und integrierte Microinduktanz mit einem solchen geschlossenen magnetischen Kern - Google Patents

Spiralförmiger geschlossener magnetischer Kern und integrierte Microinduktanz mit einem solchen geschlossenen magnetischen Kern Download PDF

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Publication number
EP1921640A1
EP1921640A1 EP07354060A EP07354060A EP1921640A1 EP 1921640 A1 EP1921640 A1 EP 1921640A1 EP 07354060 A EP07354060 A EP 07354060A EP 07354060 A EP07354060 A EP 07354060A EP 1921640 A1 EP1921640 A1 EP 1921640A1
Authority
EP
European Patent Office
Prior art keywords
magnetic core
branches
inductance
core
spiral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07354060A
Other languages
English (en)
French (fr)
Other versions
EP1921640B1 (de
Inventor
Orlando Bastien
Viala Bernard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique CEA
STMicroelectronics SA
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Publication date
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Publication of EP1921640A1 publication Critical patent/EP1921640A1/de
Application granted granted Critical
Publication of EP1921640B1 publication Critical patent/EP1921640B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/0006—Printed inductances
    • H01F17/0033—Printed inductances with the coil helically wound around a magnetic core
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/04—Fixed inductances of the signal type with magnetic core
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/04—Fixed inductances of the signal type with magnetic core
    • H01F17/045—Fixed inductances of the signal type with magnetic core with core of cylindric geometry and coil wound along its longitudinal axis, i.e. rod or drum core
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/24—Magnetic cores
    • H01F27/25—Magnetic cores made from strips or ribbons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041—Printed circuit coils
    • H01F41/046—Printed circuit coils structurally combined with ferromagnetic material

Definitions

  • the invention relates to a closed magnetic core for integrated micro-inductance.
  • the invention is part of the theme of integrated micro-inductors for applications in power electronics. It can, more generally, apply to all inductive systems (inductors, transformers, magnetic recording heads, actuators, sensors, etc.) requiring a high density of electrical power.
  • Micro-inductances of various types have existed for many years, using coils of the spiral or solenoid type.
  • the discrete components remain very predominantly used in applications using high power densities because they offer a better compromise between inductance and saturation current.
  • a spiral winding with magnetic plane is easy to integrate and allows to work with strong currents.
  • this type of device becomes very cumbersome when one targets high values of inductance (L of the order of ⁇ H), because it takes a number of high spiral turns.
  • the resistance of such devices is important.
  • Toroidal integrated micro-inductors with solenoid windings as well as their meander improvements (see the article “Integrated Electroplated Micromachined Magnetic Devices Using Low Temperature Manufacturing Processes” by JYPark et. al., IEEE Transactions on Electronics Packaging Manufacturing, Vol. 23, No. 1, 2000 ), are directly inspired by discrete components and offer the best possible compromise between resistance and inductance level, because we approach the ideal case of the infinite solenoid.
  • simulations show that the magnetic flux inside the nucleus is distributed very inhomogeneously. The magnetic field is more intense along the shorter field lines.
  • the zones of the magnetic core subjected to the most intense fields are very quickly saturated, causing a decrease of the inductance from weak currents, whereas other zones are subjected to much weaker fields and participate little or not in inductive phenomenon, that is to say they have no contribution to the value of the inductance.
  • the useful areas of the magnetic core are therefore very quickly saturated while other areas remain unsolicited.
  • the maximum power passing through an inductor is determined by the volume of magnetic material used in the case of an integrated component. This volume is determined by the thickness of magnetic material (thicknesses less than 100 microns for integrated components) and the area occupied by this magnetic core.
  • Transformers and inductors with E-shaped or E-1 magnetic core are widely used in electrical engineering, mainly in discrete transformers (and in discrete DC / DC type devices) to facilitate assembly and winding of inductors , or to be able to play on the conversion factors between the three windings of each branch, or on the effects of mutual inductances between the separate windings of each branch (see the article «New Magnetic Structures for Switching Converters by S.Cuk, IEEE Transactions on Magnetics, Vol. MAG-19, No. 2, 1983 ). In these devices, the winding is not continuous from one branch to the other, but made by separate wires.
  • micro-inductances used on the market are discrete components manufactured by micromechanical processes of micro-machining, gluing, micro-winding, etc. These processes are heavy to implement, individual treatment, not very flexible in terms of design and greatly limit the miniaturization of power circuits.
  • the thickness of the discrete micro-inductors (typically greater than 0.5 mm) does not allow appropriate packaging in the power supply circuits currently used for mobile telephony, for example.
  • the manufacturing techniques used in microelectronics allow a much greater flexibility in the implementation of different designs, provide a collective treatment and are compatible with the idea of miniaturization because the thickness (including substrate) can easily be less than 300 ⁇ m). However, they are poorly suited to deposition of high thicknesses (greater than 10 ⁇ m ) of conductive, magnetic or dielectric materials and to their etching after photolithography.
  • the integrated micro-inductors generally have an inductance which decreases greatly when the current applied to the turns of the micro-inductor is increased, even for weak currents, which makes it necessary to use unintegrated discrete inductors in certain cases.
  • the object of the invention is to increase the compactness of a core of an integrated micro-inductance and, for a given size, to increase the value of the inductance.
  • this object is achieved by a magnetic core according to the appended claims and more particularly by the fact that the magnetic core has a spiral shape having two ends connected to one another by a closing segment.
  • the invention also aims an integrated micro-inductance comprising a magnetic core according to the invention.
  • the magnetic core 1, shown in Figure 1 has a spiral shape.
  • the spiral has two ends 2 connected to each other by a closing segment 3. Thus, the magnetic core 1 is closed.
  • the magnetic core 1 consists of a first set 4 of five parallel branches and a second set of four parallel branches, substantially perpendicular to the branches of the first set 4.
  • the spiral constituted by all the branches of the two sets 4 and 5 is thus rectangular.
  • the connection constituted by the closing segment 3 is added to the spiral to form the magnetic core 1.
  • the magnetic core 1 makes it possible to maximize the occupation of the space in the center of the core 1 and the corresponding micro-inductance.
  • An annular inductor according to the prior art, shown in Figure 2, adapts particularly well to a square-shaped chip.
  • the length of the developed ring depends on the outer perimeter of the chip. This geometry does not exploit the central part of the chip.
  • FIG. 3 represents an improvement in the annular inductance, the meandering inductance described in the aforementioned Park article.
  • the meandering inductance makes it possible to use the central zone by stretching one of the four branches of the ring so as to constitute one or more meanders covering the central part.
  • This solution makes it possible to increase the length I of the constant surface core.
  • the occupation of the central zone by the meandering core (FIG. 3) makes it possible to obtain a gain on the length I of the core of the order of 33%, with respect to the annular core ( Figure 2).
  • By increasing the number N of turns according to the length I of the core a compromise is obtained with a gain on the inductance L of about 20% and a gain on the saturation current I sat of about 10%.
  • the meandering inductance is optimal only in special cases where the width of the ring and the width of the branches satisfy certain geometry conditions. Indeed, the central zone must be large enough to allow the insertion of an integer number of meanders.
  • the core has an overall width T
  • the branches have a width W
  • the spacing between two adjacent branches must be greater than a minimum spacing S.
  • the width T global of the core must fulfill the condition: T ⁇ 2 ⁇ W + nm * 2 ⁇ W + ( 2 ⁇ nm + 1 ) * S .
  • T 2 ⁇ W + nm * 2 ⁇ W + ( 2 ⁇ nm + 1 ) * S .
  • the branches and the closure segment 3 have a preferential direction of propagation of the magnetic flux in dynamics.
  • the magnetic axes of the branches and the closing segment 3 are oriented relative to the other, so as to obtain a flow in the form of a closed loop as represented in FIG. 4 by the arrows 6.
  • the branches can be arranged in different parallel planes.
  • the first set of parallel branches is arranged in a first plane and the second set of parallel branches is arranged in a second plane, parallel to the first plane and greater than the first plane in FIG.
  • the branches can have different thicknesses.
  • the branches of the first set 4 are less thick than the branches of the second set 5. This makes it possible in particular to adapt the core to the local constraints of the chip used and the adjacent electronic components.
  • One or more air gaps may optionally cut the magnetic core 1 to increase the reluctance of the magnetic circuit.
  • the magnetic core 1 shown in FIG. 6 comprises several air gaps 11 of small size (at least a factor 1/10 between the dimension of the gap and the total length of the magnetic circuit).
  • the gaps can be arranged in one or more branches.
  • the branches constitute a spiral of rectangular type, or at least substantially rectangular, having two turns forming part of two concentric rectangles.
  • the forms involved may be arbitrary, for example the geometry of the spiral is rectangular, round, square or octagonal.
  • the person skilled in the art determines the particular form by using simulation software such as the Flux software from Cedrat or the Maxwell software from Ansoft.
  • FIG. 7 illustrates a micro-inductance comprising the magnetic core 1 according to the invention.
  • a plurality of disjointed turns 9 constitute a winding around the magnetic core 1.
  • All the branches of the core may comprise winding turns.
  • the turns envelop substantially all of the surface of the magnetic core 1, a minimum isolation gap separating the adjacent turns.
  • Each turn may comprise a lower plane section in a lower plane, an upper plane section in an upper plane and two rising sections.
  • the winding preferably comprises a single electrical input and a single electrical output.
  • the closing segment 3 preferably has no turns 9.
  • micro-inductance presents no additional manufacturing difficulties compared to conventional pre-existing systems.
  • high permeability magnetic materials typically iron (Fe) and / or nickel (Ni) and / or cobalt (Co) alloys, which can contain one or more of aluminum, Al, Si, Tantalum, Hf, N, O, and B
  • the core may be heterogeneous and consist of several ferromagnetic and conductive or dielectric (non-magnetic) or antiferromagnetic layers.
  • the core may consist of an alternation of magnetic layers and intermediate layers, for example a stack comprising two magnetic layers separated by an intermediate layer.
  • the intermediate layers may, for example, be metal (Cu copper, titanium Ti or ruthenium Ru, for example) or an insulating material such as silicon oxide SiO 2 or aluminum oxide Al 2 O 3 , for example.
  • the intermediate layers may also consist of antiferromagnetic materials such as nickel oxide NiO or alloys of manganese (Mn) comprising nickel (NiMn), iridium (IrMn) or platinum (PtMn).
  • the micro-inductance is not limited in its frequency of use, and may be suitable for high frequency uses, which always demand more power.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Switches That Are Operated By Magnetic Or Electric Fields (AREA)
EP07354060A 2006-11-07 2007-11-06 Spiralförmiger geschlossener magnetischer Kern und integrierte Microinduktanz mit einem solchen geschlossenen magnetischen Kern Not-in-force EP1921640B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0609714A FR2908231B1 (fr) 2006-11-07 2006-11-07 Noyau magnetique ferme en forme de spirale et micro-inductance integree comportant un tel noyau magnetique ferme

Publications (2)

Publication Number Publication Date
EP1921640A1 true EP1921640A1 (de) 2008-05-14
EP1921640B1 EP1921640B1 (de) 2009-08-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP07354060A Not-in-force EP1921640B1 (de) 2006-11-07 2007-11-06 Spiralförmiger geschlossener magnetischer Kern und integrierte Microinduktanz mit einem solchen geschlossenen magnetischen Kern

Country Status (6)

Country Link
US (1) US20080106364A1 (de)
EP (1) EP1921640B1 (de)
JP (1) JP2008187166A (de)
AT (1) ATE441193T1 (de)
DE (1) DE602007002139D1 (de)
FR (1) FR2908231B1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150061815A1 (en) 2013-09-04 2015-03-05 International Business Machines Corporation Planar inductors with closed magnetic loops
US10290414B2 (en) * 2015-08-31 2019-05-14 Qualcomm Incorporated Substrate comprising an embedded inductor and a thin film magnetic core
US10600566B2 (en) 2016-10-13 2020-03-24 International Business Machines Corporation Method for forming a planar, closed loop magnetic structure

Citations (2)

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Publication number Priority date Publication date Assignee Title
DE3016067A1 (de) * 1980-04-25 1981-10-29 Siemens AG, 1000 Berlin und 8000 München Hybridschaltung und verfahren zu deren herstellung
US6114937A (en) * 1996-08-23 2000-09-05 International Business Machines Corporation Integrated circuit spiral inductor

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JPS61196505A (ja) * 1985-02-26 1986-08-30 Nec Corp インダクタンス構造体
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JPH07220932A (ja) * 1994-02-04 1995-08-18 Mitsubishi Electric Corp コイル素子およびそのモジュール
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US5815062A (en) * 1995-06-30 1998-09-29 Hitachi Metal, Ltd. Magnetic core
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JAE YEONG PARK ET AL: "Integrated Electroplated Micromachined Magnetic Devices Using Low Temperature Fabrication Processes", IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING, IEEE, PISCATAWAY, NY, US, vol. 23, no. 1, January 2000 (2000-01-01), XP011020016, ISSN: 1521-334X *
S.CUK: "New Magnetic Structures for Switching Converters", IEEE TRANSACTIONS ON MAGNETICS, vol. 19, no. 2, 1983

Also Published As

Publication number Publication date
ATE441193T1 (de) 2009-09-15
EP1921640B1 (de) 2009-08-26
DE602007002139D1 (de) 2009-10-08
US20080106364A1 (en) 2008-05-08
FR2908231A1 (fr) 2008-05-09
JP2008187166A (ja) 2008-08-14
FR2908231B1 (fr) 2009-01-23

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