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EP1650031B1 - Tintenstrahldüse mit geschlitzter Seitenwand und beweglichem Flügel - Google Patents

Tintenstrahldüse mit geschlitzter Seitenwand und beweglichem Flügel Download PDF

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Publication number
EP1650031B1
EP1650031B1 EP05109756A EP05109756A EP1650031B1 EP 1650031 B1 EP1650031 B1 EP 1650031B1 EP 05109756 A EP05109756 A EP 05109756A EP 05109756 A EP05109756 A EP 05109756A EP 1650031 B1 EP1650031 B1 EP 1650031B1
Authority
EP
European Patent Office
Prior art keywords
ink jet
ink
actuator
jet nozzle
nozzle chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP05109756A
Other languages
English (en)
French (fr)
Other versions
EP1650031A1 (de
Inventor
Kia Silverbrook
Gregory Mcavoy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silverbrook Research Pty Ltd
Original Assignee
Silverbrook Research Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from AUPO7937A external-priority patent/AUPO793797A0/en
Priority claimed from AUPO7947A external-priority patent/AUPO794797A0/en
Priority claimed from AUPO8002A external-priority patent/AUPO800297A0/en
Priority claimed from AUPO8079A external-priority patent/AUPO807997A0/en
Priority claimed from AUPO8043A external-priority patent/AUPO804397A0/en
Priority claimed from AUPO8008A external-priority patent/AUPO800897A0/en
Priority claimed from AUPO8001A external-priority patent/AUPO800197A0/en
Priority claimed from AUPO8042A external-priority patent/AUPO804297A0/en
Priority claimed from AUPO8056A external-priority patent/AUPO805697A0/en
Priority claimed from AUPO8046A external-priority patent/AUPO804697A0/en
Priority claimed from AUPO8052A external-priority patent/AUPO805297A0/en
Priority claimed from AUPO8064A external-priority patent/AUPO806497A0/en
Priority claimed from AUPO8011A external-priority patent/AUPO801197A0/en
Priority claimed from AUPO8034A external-priority patent/AUPO803497A0/en
Priority claimed from AUPO8010A external-priority patent/AUPO801097A0/en
Priority claimed from AUPO8062A external-priority patent/AUPO806297A0/en
Priority claimed from AUPO8074A external-priority patent/AUPO807497A0/en
Priority claimed from AUPO8045A external-priority patent/AUPO804597A0/en
Priority claimed from AUPO8057A external-priority patent/AUPO805797A0/en
Priority claimed from AUPO7951A external-priority patent/AUPO795197A0/en
Priority claimed from AUPO7946A external-priority patent/AUPO794697A0/en
Priority claimed from AUPO8051A external-priority patent/AUPO805197A0/en
Priority claimed from AUPO7943A external-priority patent/AUPO794397A0/en
Priority claimed from AUPO7941A external-priority patent/AUPO794197A0/en
Priority claimed from AUPO8007A external-priority patent/AUPO800797A0/en
Priority claimed from AUPO7952A external-priority patent/AUPO795297A0/en
Priority claimed from AUPO8068A external-priority patent/AUPO806897A0/en
Priority claimed from AUPO8039A external-priority patent/AUPO803997A0/en
Priority claimed from AUPO8033A external-priority patent/AUPO803397A0/en
Priority claimed from AUPO7948A external-priority patent/AUPO794897A0/en
Priority claimed from AUPO8078A external-priority patent/AUPO807897A0/en
Priority claimed from AUPO7933A external-priority patent/AUPO793397A0/en
Priority claimed from AUPO8050A external-priority patent/AUPO805097A0/en
Priority claimed from AUPO7945A external-priority patent/AUPO794597A0/en
Priority claimed from AUPO8006A external-priority patent/AUPO800697A0/en
Priority claimed from AUPO8075A external-priority patent/AUPO807597A0/en
Priority claimed from AUPO8040A external-priority patent/AUPO804097A0/en
Priority claimed from AUPO7944A external-priority patent/AUPO794497A0/en
Priority claimed from AUPO8038A external-priority patent/AUPO803897A0/en
Priority claimed from AUPO8037A external-priority patent/AUPO803797A0/en
Priority claimed from AUPO8503A external-priority patent/AUPO850397A0/en
Priority claimed from AUPO9391A external-priority patent/AUPO939197A0/en
Priority claimed from AUPO9392A external-priority patent/AUPO939297A0/en
Priority claimed from AUPO9390A external-priority patent/AUPO939097A0/en
Priority claimed from AUPO9389A external-priority patent/AUPO938997A0/en
Priority claimed from AUPO9393A external-priority patent/AUPO939397A0/en
Priority claimed from AUPP0891A external-priority patent/AUPP089197A0/en
Priority claimed from AUPP0892A external-priority patent/AUPP089297A0/en
Priority claimed from AUPP0882A external-priority patent/AUPP088297A0/en
Priority claimed from AUPP0875A external-priority patent/AUPP087597A0/en
Priority claimed from AUPP0890A external-priority patent/AUPP089097A0/en
Priority claimed from AUPP0873A external-priority patent/AUPP087397A0/en
Priority claimed from AUPP0888A external-priority patent/AUPP088897A0/en
Priority claimed from AUPP0874A external-priority patent/AUPP087497A0/en
Priority claimed from AUPP0872A external-priority patent/AUPP087297A0/en
Priority claimed from AUPP0894A external-priority patent/AUPP089497A0/en
Priority claimed from AUPP0893A external-priority patent/AUPP089397A0/en
Priority claimed from AUPP0889A external-priority patent/AUPP088997A0/en
Priority claimed from AUPP1396A external-priority patent/AUPP139698A0/en
Priority claimed from AUPP1398A external-priority patent/AUPP139898A0/en
Priority claimed from AUPP2591A external-priority patent/AUPP259198A0/en
Priority claimed from AUPP2592A external-priority patent/AUPP259298A0/en
Priority claimed from AUPP2593A external-priority patent/AUPP259398A0/en
Priority claimed from AUPP3985A external-priority patent/AUPP398598A0/en
Priority claimed from AUPP3983A external-priority patent/AUPP398398A0/en
Priority claimed from AUPP3984A external-priority patent/AUPP398498A0/en
Priority claimed from AUPP3989A external-priority patent/AUPP398998A0/en
Priority claimed from AUPP3986A external-priority patent/AUPP398698A0/en
Priority claimed from AUPP3991A external-priority patent/AUPP399198A0/en
Priority claimed from AUPP3990A external-priority patent/AUPP399098A0/en
Priority claimed from AUPP3987A external-priority patent/AUPP398798A0/en
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Publication of EP1650031A1 publication Critical patent/EP1650031A1/de
Application granted granted Critical
Publication of EP1650031B1 publication Critical patent/EP1650031B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/44—Typewriters or selective printing mechanisms having dual functions or combined with, or coupled to, apparatus performing other functions
    • B41J3/445—Printers integrated in other types of apparatus, e.g. printers integrated in cameras
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1648—Production of print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B41J2/17596—Ink pumps, ink valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2002/041—Electromagnetic transducer

Definitions

  • the present invention relates to the field of ink jet printing systems.
  • US Patent 3596275 by Sweet also discloses a process of a continuous ink jet printing including the step wherein the ink jet stream is modulated by a high frequency electro-static field so as to cause drop separation. This technique is still utilised by several manufacturers including Elmjet and Scitex (see also US Patent No. 3373437 by Sweet et al )
  • Piezo-electric ink jet printers are also one form of commonly utilised ink jet printing device. Piezo-electric systems are disclosed by Kyser et. al. in US Patent No. 3946398 (1970 ) which utilises a diaphragm mode of operation, by Zolten in US Patent 3683272 (1970 ) which discloses a squeeze mode of operation of a piezo electric crystal, Stemme in US Patent No. 3747120 (1972 ) discloses a bend mode of piezo-electric operation, Howkins in US Patent No. 4459601 discloses a Piezo electric push mode actuation of the ink jet stream and Fischbeck in US 4584590 which discloses a sheer mode type of piezo-electric transducer element.
  • the ink jet printing techniques include those disclosed by Endo et al in GB 2007162 (1979 ) and Vaught et al in US Patent 4490728 . Both the aforementioned references disclosed ink jet printing techniques rely upon the activation of an electrothermal actuator which results in the creation of a bubble in a constricted space, such as a nozzle, which thereby causes the ejection of ink from an aperture connected to the confined space onto a relevant print media.
  • Printing devices utilising the electro-thermal actuator are manufactured by manufacturers such as Canon and Hewlett Packard.
  • EP0506232 discloses a valve for a drop on demand ink jet printer employing a lever seal in a housing to control the frequency and quantity of ink delivered to a printing material such as paper.
  • Lever and housing of the chamber are unitary. There is no slit. Ejection is achieved by static pressure.
  • WO9418010 discloses a printhead for an ink jet printer includes a chamber for containing marking fluid fed to the head in use. A plurality of orifices open from the chamber, a marking fluid being emitted in use through the orifices. A corresponding plurality of actuators are provided. Each actuator comprises an arm having at one end means for selectively opening and closing a respective orifice; a magnetic circuit of which the arm forms a side; and one or more coils for selectively inducing a magnetic flux in the circuit in order to move the arm between a position in which it closes the respective orifice and a position in which it opens the orifice.
  • a printing technology should have a number of desirable attributes. These include inexpensive construction and operation, high speed operation, safe and continuous long term operation etc. Each technology may have its own advantages and disadvantages in the areas of cost, speed, quality, reliability, power usage, simplicity of construction operation, durability and consumables.
  • esoteric techniques are also often utilised. These can include electroforming of nickel stage ( Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985) ), electro-discharge machining, laser ablation ( U.S. Patent No. 5,208,604 ), micro-punching, etc.
  • a sacrificial material to build up a mechanical system, within the sacrificial material being subsequently etched away so as to release the required mechanical structure.
  • a suitable common sacrificial material includes silicon dioxide which can be etched away in hydrofluoric acid.
  • MEMS devices are often constructed on silicon wafers having integral electronics such as, for example, using a multi-level metal CMOS layer.
  • the CMOS process includes the construction of multiple layers which may include the utilization of materials which can be attacked by the sacrificial etchant. This often necessitates the construction of passivation layers using extra processing steps so as to protect other layers from possible unwanted attack by a sacrificial etchant.
  • the present invention relates to ink jet printing and in particular, discloses an ink jet nozzle arrangement in accordance with the claims which follow.
  • each nozzle has a nozzle chamber having a slotted side wall through which is formed an actuator mechanism attached to a vane within the nozzle chamber such that the actuator can be activated to move the vane within the nozzle chamber to thereby cause ejection of ink from the nozzle chamber.
  • FIG. 332 an example of an ink jet nozzle arrangement 3301 as constructed in accordance with an embodiment.
  • the nozzle arrangement includes a nozzle chamber 3302 normally filled with ink and an actuator mechanism 3303 for actuating a vane 3304 for the ejection of ink from the nozzle chamber 3302 via an ink ejection port 3305.
  • Fig. 332 is a perspective view of the ink jet nozzle arrangement of an embodiment in its idle or quiescent in position.
  • Fig. 333 illustrates a perspective view after actuation of the actuator 3303.
  • the actuator 3303 includes two arms 3306, 3307.
  • the two arms can be formed from titanium di-boride (TiB 2 ) which has a high Young's modulus and therefore provides a large degree of bending strength.
  • a current is passed along the arms 3306, 3307 with the arm 3307 having a substantially thicker portion along most of its length.
  • the arm 3307 is stiff but for in the area of thinned portion 3308 and hence the bending moment is concentrated in the area 3308.
  • the thinned arm 3306 is of a thinner form and is heated by means of resistive heating of a current passing through the arms 3306,3307.
  • the arms 3306, 3307 are interconnected to electrical circuitry via connections 3310, 3311.
  • the arm 3306 Upon heating of the arm 3306, the arm 3306 is expanded with the bending of the arm 3307 being concentrated in the area 3308. This results in movement of the end of the actuator mechanism 3303 which proceeds through a slot in the wall nozzle chamber 3302. The bending further causes movement of vane 3304 so as to increase the pressure of the ink within the nozzle chamber and thereby cause its subsequent ejection from ink ejection nozzle 3305.
  • the nozzle chamber 3302 is refilled via an ink channel 3313 ( Fig. 334 ) formed in the wafer substrate 3314. After movement of the vane 3304, so as to cause the ejection of ink, the current to arm 3306 is turned off which results in a corresponding back movement of the end vane 3304.
  • the ink within nozzle chamber 3302 is then replenished by means of wafer ink supply channel 3313 which is attached to an ink supply formed on the back of wafer 3314.
  • the refill can be by means of a surface tension reduction effects of the ink within nozzle chamber 3302 across ink ejection port 3305.
  • Fig. 334 illustrates an exploded perspective view of the components of the ink jet nozzle arrangement.
  • an embodiment can be constructed utilising semiconductor processing techniques in addition to micro machining and micro fabrication process technology (MEMS) and a full familiarity with these technologies is hereinafter assumed.
  • MEMS micro machining and micro fabrication process technology
  • MEMS micro-electro mechanical system
  • the nozzles can preferably be constructed by constructing a large array of nozzles on a single silicon wafer at a time.
  • the array of nozzles can be divided into multiple print heads, with each print head itself having nozzles grouped into multiple colours to provide for full colour image reproduction.
  • the arrangement can be constructed via the utilisation of a standard silicon wafer substrate 33-14 upon which is deposited an electrical circuitry layer 3316 which can comprise a standard CMOS circuitry layer.
  • the CMOS layer can include an etched portion defining pit 3317.
  • a protective layer (not shown) which comprise silicon nitride or the like.
  • a sacrificial material which is initially suitably etched so as to form cavities for the portion of the thermal actuator 3303 and bottom portion of the vane 3304, in addition to the bottom rim of nozzle chamber 3302. These cavities can then be filled with titanium di-boride.
  • a similar process is used to form the glass portions of the actuator.
  • a further layer of sacrificial material is deposited and suitably etched so as to form the rest of the vane 3304 in addition to a portion of the nozzle chamber walls to the same height of vane 3304.
  • a further sacrificial layer is deposited and etched in a suitable manner so as to form the rest of the nozzle chamber 3302.
  • the top surface of the nozzle chamber is further etched so as to form the nozzle rim rounding the ejection port 3305.
  • the sacrificial material is etched away so as to release the construction of an embodiment. It will be readily evident to those skilled in the art that other MEMS processing steps could be utilized.
  • the thermal actuator and vane portions 3303 and 3304 in addition to the nozzle chamber 3305 are constructed from titanium di-boride.
  • the utilisation of titanium di-boride is standard in the construction of semiconductor systems and, in addition, its material properties, including a high Young's modulus, is utilised to advantage in the construction of the thermal actuator 3303.
  • the actuator 3303 is covered with a hydrophobic material, such as Teflon, so as to prevent any leaking of the liquid out of the slot 3319.
  • the ink channel can be etched through the wafer utilising a high anisotropic silicon wafer etchers. This can be done as an anisotropic crystallographic silicon etch, or an anisotropic dry etch.
  • a dry etch system capable of high aspect ratio deep silicon trench etching such as the Surface Technology Systems (STS) Advance Silicon Etch (ASE) system is recommended for volume production, as the chip size can be reduced over a wet etch.
  • STS Surface Technology Systems
  • ASE Advance Silicon Etch
  • the wet etch is suitable for small volume production where a suitable plasma etch system is not available. Altema-tively, but undesirably, ink access can be around the sides of the print head chips.
  • ink access is through the wafer higher ink flow is possible, and there is less requirement for high accuracy assembly. If ink access is around the edge of the chip, ink flow is severely limited, and the print head chips must be carefully assembled onto ink channel chips. This latter process is difficult due to the possibility of damaging the fragile nozzle plate. If plasma etching is used, the chips can be effectively diced at the same time. Separating the chips by plasma etching allows them to be spaced as little as 35 micron apart, increasing the number of chips on a wafer.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Claims (10)

  1. Tintenstrahldüsenanordnung, umfassend:
    eine Düsenkammer (3302) mit einer durchbrochenen Seitenwand in einer ersten Oberfläche und einer Tintenausstoßöffnung (3305), die in einer zweiten Oberfläche von dieser ausgebildet ist;
    einen mit der Düsenkammer verbundenen Tintenzufuhrkanal, um der Düsenkammer Tinte zuzuführen;
    eine bewegbare Lamelle (3304), die in der Düsenkammer angeordnet ist und so bewegt werden kann, dass das Ausstoßen von Tinte aus der Düsenkammer herbeigeführt wird; und
    ein Stellorgan (3303), das außerhalb der Düsenkammer angeordnet ist und mit der bewegbaren Lamelle durch die durchbrochene Seitenwand hindurch verbunden ist.
  2. Tintenstrahldüsenanordnung nach Anspruch 1, wobei die bewegbare Lamelle in ihrer Ruheposition im Wesentlichen angrenzend an ein erstes Ende des Durchbruchs angeordnet ist, und das Stellorgan betätigt wird, um die bewegbare Lamelle vom ersten Ende des Durchbruchs zu einem zweiten Ende des Durchbruchs zu bewegen.
  3. Tintenstrahldüsenanordnung nach Anspruch 1 oder 2, wobei das Stellorgan ein thermisches Stellorgan umfasst, das mittels eines elektrischen Stroms betätigt wird, der durch das thermische Stellorgan geschickt wird, was zu einer widerstandsbedingten Erwärmung des Stellorgans führt.
  4. Tintenstrahldüsenanordnung nach Anspruch 3, wobei das thermische Stellorgan aus einem leitfähigen Material mit einem hohen Elastizitätsmodul aufgebaut ist.
  5. Tintenstrahldüsenanordnung nach Anspruch 3, wobei das thermische Stellorgan einen ersten (3306) und einen zweiten Arm (3307) umfasst, wobei der erste Arm eine widerstandsbedingte Erwärmung durchmacht, um dadurch seine Verbiegung hervorzurufen, was zu einer Betätigung durch das thermische Stellorgan führt.
  6. Tintenstrahldüsenanordnung nach Anspruch 5, wobei der erste Arm relativ zum zweiten Arm gesehen einen dünner ausgelegten Querschnitt hat.
  7. Tintenstrahldüsenanordnung nach Anspruch 5, wobei die Arme an einem Ende an einem Trägermaterial angebracht sind.
  8. Tintenstrahldüsenanordnung nach einem der vorhergehenden Ansprüche, wobei die Stellorganvorrichtung in einer Umgebungsatmosphäre arbeitet.
  9. Tintenstrahldüsenanordnung nach einem der vorhergehenden Ansprüche, wobei die angrenzend an den Außenbereich der durchbrochenen Seitenwand befindlichen Abschnitte des Stellorgans mit einem hydrophoben Material beschichtet sind.
  10. Tintenstrahldüsenanordnung nach einem der vorhergehenden Ansprüche, wobei die Anordnung auf einem Siliziumwafer gebildet ist und der Tintenzufuhrkanal durch Ätzen eines Kanals durch den Siliziumwafer gebildet ist.
EP05109756A 1997-07-15 1998-07-15 Tintenstrahldüse mit geschlitzter Seitenwand und beweglichem Flügel Expired - Lifetime EP1650031B1 (de)

Applications Claiming Priority (72)

Application Number Priority Date Filing Date Title
AUPO8037A AUPO803797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ27)
AUPO8038A AUPO803897A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ18)
AUPO8002A AUPO800297A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ20)
AUPO8079A AUPO807997A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM18)
AUPO8043A AUPO804397A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ28)
AUPO8008A AUPO800897A0 (en) 1997-07-15 1997-07-15 A device (MEMS04)
AUPO8001A AUPO800197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ17)
AUPO8042A AUPO804297A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ29)
AUPO8056A AUPO805697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ10)
AUPO8046A AUPO804697A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM30)
AUPO8052A AUPO805297A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM20)
AUPO8064A AUPO806497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ30)
AUPO8011A AUPO801197A0 (en) 1997-07-15 1997-07-15 A device (MEMS06)
AUPO8034A AUPO803497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ23)
AUPO8010A AUPO801097A0 (en) 1997-07-15 1997-07-15 A device (MEMS05)
AUPO8062A AUPO806297A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ22)
AUPO8074A AUPO807497A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM23)
AUPO8045A AUPO804597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM28)
AUPO8057A AUPO805797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ09)
AUPO7951A AUPO795197A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM22)
AUPO7946A AUPO794697A0 (en) 1997-07-15 1997-07-15 A device (MEMS10)
AUPO8051A AUPO805197A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM27)
AUPO7943A AUPO794397A0 (en) 1997-07-15 1997-07-15 A device (MEMS01)
AUPO7941A AUPO794197A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM24)
AUPO8007A AUPO800797A0 (en) 1997-07-15 1997-07-15 A device (MEMS03)
AUPO7952A AUPO795297A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM29)
AUPO8068A AUPO806897A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ21)
AUPO8039A AUPO803997A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ24)
AUPO8033A AUPO803397A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ19)
AUPO7948A AUPO794897A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM21)
AUPO8078A AUPO807897A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM09)
AUPO7947A AUPO794797A0 (en) 1997-07-15 1997-07-15 A device (MEMS07)
AUPO8050A AUPO805097A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM19)
AUPO7945A AUPO794597A0 (en) 1997-07-15 1997-07-15 A device (MEMS08)
AUPO8006A AUPO800697A0 (en) 1997-07-15 1997-07-15 A device (MEMS02)
AUPO8075A AUPO807597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM17)
AUPO8040A AUPO804097A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ03)
AUPO7944A AUPO794497A0 (en) 1997-07-15 1997-07-15 A device (MEMS09)
AUPO7937A AUPO793797A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM03)
AUPO7933A AUPO793397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation_apparatus (IJM10)
AUPO8503A AUPO850397A0 (en) 1997-08-11 1997-08-11 A method of manufacture of an image creation apparatus (ijm30a)
AUPO9392A AUPO939297A0 (en) 1997-09-23 1997-09-23 A method of manufacture of an image creation apparatus (IJM32)
AUPO9390A AUPO939097A0 (en) 1997-09-23 1997-09-23 A method of manufacture of an image creation apparatus (IJM31)
AUPO9389A AUPO938997A0 (en) 1997-09-23 1997-09-23 Image creation method and apparatus (IJ31)
AUPO9393A AUPO939397A0 (en) 1997-09-23 1997-09-23 A device and method (MEMS11)
AUPO9391A AUPO939197A0 (en) 1997-09-23 1997-09-23 Image creation method and apparatus (IJ32)
AUPP0889A AUPP088997A0 (en) 1997-12-12 1997-12-12 A method of manufacture of an image creation apparatus (IJM35)
AUPP0892A AUPP089297A0 (en) 1997-12-12 1997-12-12 Image creation method and apparatus (IJ38)
AUPP0891A AUPP089197A0 (en) 1997-12-12 1997-12-12 Image creation method and apparatus (IJ34)
AUPP0875A AUPP087597A0 (en) 1997-12-12 1997-12-12 A device (MEMS12)
AUPP0890A AUPP089097A0 (en) 1997-12-12 1997-12-12 Image creation method and apparatus (IJ35)
AUPP0873A AUPP087397A0 (en) 1997-12-12 1997-12-12 Image creation method and apparatus (IJ36)
AUPP0888A AUPP088897A0 (en) 1997-12-12 1997-12-12 Image creation method and apparatus (IJ33)
AUPP0874A AUPP087497A0 (en) 1997-12-12 1997-12-12 A method of manufacture of an image creation apparatus (IJM38)
AUPP0872A AUPP087297A0 (en) 1997-12-12 1997-12-12 Image creation method and apparatus (IJM36)
AUPP0894A AUPP089497A0 (en) 1997-12-12 1997-12-12 An interconnection system (MEMS13)
AUPP0893A AUPP089397A0 (en) 1997-12-12 1997-12-12 Image creation method and apparatus (IJ37)
AUPP0882A AUPP088297A0 (en) 1997-12-12 1997-12-12 A method of manufacture of an image creation apparatus (IJM37)
AUPP1396A AUPP139698A0 (en) 1998-01-19 1998-01-19 A method of manufacture of an image creation apparatus (ijm39)
AUPP1398A AUPP139898A0 (en) 1998-01-19 1998-01-19 An image creation method and apparatus (ij39)
AUPP2591A AUPP259198A0 (en) 1998-03-25 1998-03-25 Image creation method and apparatus (IJM41)
AUPP2592A AUPP259298A0 (en) 1998-03-25 1998-03-25 Image creation method and apparatus (IJ40)
AUPP2593A AUPP259398A0 (en) 1998-03-25 1998-03-25 Image creation method and apparatus (IJ41)
AUPP3986A AUPP398698A0 (en) 1998-06-09 1998-06-09 A method of manufacture of an image creation apparatus (ijm43)
AUPP3987A AUPP398798A0 (en) 1998-06-09 1998-06-09 Image creation method and apparatus (ij43)
AUPP3984A AUPP398498A0 (en) 1998-06-09 1998-06-09 A method of manufacture of an image creation apparatus (ijm44)
AUPP3989A AUPP398998A0 (en) 1998-06-09 1998-06-09 A method of manufacture of an image creation apparatus (ijm40)
AUPP3985A AUPP398598A0 (en) 1998-06-09 1998-06-09 Image creation method and apparatus (ij44)
AUPP3991A AUPP399198A0 (en) 1998-06-09 1998-06-09 Image creation method and apparatus (ij42)
AUPP3990A AUPP399098A0 (en) 1998-06-09 1998-06-09 A method of manufacture of image creation apparatus (ijm42)
AUPP3983A AUPP398398A0 (en) 1998-06-09 1998-06-09 Image creation method and apparatus (ij45)
EP98933352A EP0999934B1 (de) 1997-07-15 1998-07-15 Thermisch betätigter tintenstrahl

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EP1650031B1 true EP1650031B1 (de) 2008-02-20

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EP05109756A Expired - Lifetime EP1650031B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit geschlitzter Seitenwand und beweglichem Flügel
EP98933352A Expired - Lifetime EP0999934B1 (de) 1997-07-15 1998-07-15 Thermisch betätigter tintenstrahl
EP05109701A Expired - Lifetime EP1640162B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüsenanordnung mit Paddeln als Teil der Wandung
EP05109707A Expired - Lifetime EP1650030B1 (de) 1997-07-15 1998-07-15 Düsenkammer mit Paddelschaufel und externem thermischen Betätigungselement
EP05109700A Expired - Lifetime EP1637330B1 (de) 1997-07-15 1998-07-15 Thermisches Betätigungselement mit gezahntem Heizelement

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EP05109701A Expired - Lifetime EP1640162B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüsenanordnung mit Paddeln als Teil der Wandung
EP05109707A Expired - Lifetime EP1650030B1 (de) 1997-07-15 1998-07-15 Düsenkammer mit Paddelschaufel und externem thermischen Betätigungselement
EP05109700A Expired - Lifetime EP1637330B1 (de) 1997-07-15 1998-07-15 Thermisches Betätigungselement mit gezahntem Heizelement

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Families Citing this family (91)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7334874B2 (en) * 1997-07-15 2008-02-26 Silverbrook Research Pty Ltd Inkjet nozzle chamber with electrostatically attracted plates
AUPP654598A0 (en) 1998-10-16 1998-11-05 Silverbrook Research Pty Ltd Micromechanical device and method (ij46h)
US7753491B2 (en) 1997-07-15 2010-07-13 Silverbrook Research Pty Ltd Printhead nozzle arrangement incorporating a corrugated electrode
US7468139B2 (en) 1997-07-15 2008-12-23 Silverbrook Research Pty Ltd Method of depositing heater material over a photoresist scaffold
US7527357B2 (en) * 1997-07-15 2009-05-05 Silverbrook Research Pty Ltd Inkjet nozzle array with individual feed channel for each nozzle
US6188415B1 (en) 1997-07-15 2001-02-13 Silverbrook Research Pty Ltd Ink jet printer having a thermal actuator comprising an external coil spring
US6648453B2 (en) 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
US7195339B2 (en) 1997-07-15 2007-03-27 Silverbrook Research Pty Ltd Ink jet nozzle assembly with a thermal bend actuator
US6488361B2 (en) * 1997-07-15 2002-12-03 Silverbrook Research Pty Ltd. Inkjet printhead that incorporates closure mechanisms
US7465030B2 (en) 1997-07-15 2008-12-16 Silverbrook Research Pty Ltd Nozzle arrangement with a magnetic field generator
US6682174B2 (en) 1998-03-25 2004-01-27 Silverbrook Research Pty Ltd Ink jet nozzle arrangement configuration
US6935724B2 (en) 1997-07-15 2005-08-30 Silverbrook Research Pty Ltd Ink jet nozzle having actuator with anchor positioned between nozzle chamber and actuator connection point
US7207654B2 (en) * 1997-07-15 2007-04-24 Silverbrook Research Pty Ltd Ink jet with narrow chamber
US6712453B2 (en) 1997-07-15 2004-03-30 Silverbrook Research Pty Ltd. Ink jet nozzle rim
US7234795B2 (en) * 1997-07-15 2007-06-26 Silverbrook Research Pty Ltd Inkjet nozzle with CMOS compatible actuator voltage
US7410243B2 (en) 1997-07-15 2008-08-12 Silverbrook Research Pty Ltd Inkjet nozzle with resiliently biased ejection actuator
US7337532B2 (en) 1997-07-15 2008-03-04 Silverbrook Research Pty Ltd Method of manufacturing micro-electromechanical device having motion-transmitting structure
US20040130599A1 (en) * 1997-07-15 2004-07-08 Silverbrook Research Pty Ltd Ink jet printhead with amorphous ceramic chamber
US7556356B1 (en) 1997-07-15 2009-07-07 Silverbrook Research Pty Ltd Inkjet printhead integrated circuit with ink spread prevention
US7328975B2 (en) * 1997-07-15 2008-02-12 Silverbrook Research Pty Ltd Injet printhead with thermal bend arm exposed to ink flow
US7360871B2 (en) * 1997-07-15 2008-04-22 Silverbrook Research Pty Ltd Inkjet chamber with ejection actuator between inlet and nozzle
US6733116B1 (en) * 1998-10-16 2004-05-11 Silverbrook Research Pty Ltd Ink jet printer with print roll and printhead assemblies
US6435667B1 (en) * 1997-12-12 2002-08-20 Silverbrook Research Pty Ltd. Opposed ejection ports and ink inlets in an ink jet printhead chip
WO2000023279A1 (en) 1998-10-16 2000-04-27 Silverbrook Research Pty. Limited Improvements relating to inkjet printers
US6623108B2 (en) * 1998-10-16 2003-09-23 Silverbrook Research Pty Ltd Ink jet printhead having thermal bend actuator heating element electrically isolated from nozzle chamber ink
US6792754B2 (en) 1999-02-15 2004-09-21 Silverbrook Research Pty Ltd Integrated circuit device for fluid ejection
JP4732588B2 (ja) * 1999-02-15 2011-07-27 シルバーブルック リサーチ プロプライエタリイ、リミテッド 熱アクチュエータ及び機械的アクチュエータ
US6860107B2 (en) 1999-02-15 2005-03-01 Silverbrook Research Pty Ltd Integrated circuit device having electrothermal actuators
US6984023B2 (en) 1999-02-15 2006-01-10 Silverbrook Research Pty Ltd Micro-electromechanical displacement device
AUPP868699A0 (en) 1999-02-15 1999-03-11 Silverbrook Research Pty Ltd A method and apparatus(IJ46P1A)
AU775594B2 (en) * 1999-03-16 2004-08-05 Silverbrook Research Pty. Ltd. A method of manufacturing a thermal bend actuator
AUPP922399A0 (en) 1999-03-16 1999-04-15 Silverbrook Research Pty Ltd A method and apparatus (ij46p2)
AU2004201743B2 (en) * 1999-04-22 2005-05-19 Silverbrook Research Pty Ltd Thermal actuator with heat sinks
AUPP993099A0 (en) * 1999-04-22 1999-05-20 Silverbrook Research Pty Ltd A micromechancial device and method(ij46p2b)
AUPP993199A0 (en) * 1999-04-22 1999-05-20 Silverbrook Research Pty Ltd A micromechanical device and method (ij46p2a)
AU2004202252B2 (en) * 1999-04-22 2005-06-30 Silverbrook Research Pty Ltd Liquid ejection using a micro-electromechanical device
AU770756B2 (en) * 1999-04-22 2004-03-04 Memjet Technology Limited Actuator control in a micro electro-mechanical liquid ejection device
AU769819B2 (en) * 1999-04-22 2004-02-05 Memjet Technology Limited Thermal actuator shaped for more uniform temperature profile
EP1206351B1 (de) * 1999-06-30 2008-07-09 Silverbrook Research Pty. Limited Prüfung einer mikroelektromechanischen vorrichtung
AU761821B2 (en) * 1999-06-30 2003-06-12 Silverbrook Research Pty Ltd Fault detection in a micro electro-mechanical device
AUPQ130999A0 (en) 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V11)
AUPQ130899A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V12)
AUPQ131099A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V8)
US6382779B1 (en) 1999-06-30 2002-05-07 Silverbrook Research Pty Ltd Testing a micro electro- mechanical device
AU761670B2 (en) * 1999-06-30 2003-06-05 Silverbrook Research Pty Ltd Testing a micro electro-mechanical device
AU761820B2 (en) * 1999-06-30 2003-06-12 Silverbrook Research Pty Ltd Calibrating a micro electro-mechanical device
AUPQ130799A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V13)
EP1218815B1 (de) 1999-09-17 2010-11-17 Silverbrook Research Pty. Limited Verfahren und system zur instruktion eines computers
AUPQ595700A0 (en) 2000-03-02 2000-03-23 Silverbrook Research Pty Ltd Alignment module for printheads
US6439693B1 (en) * 2000-05-04 2002-08-27 Silverbrook Research Pty Ltd. Thermal bend actuator
US6526658B1 (en) 2000-05-23 2003-03-04 Silverbrook Research Pty Ltd Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator
US6412904B1 (en) * 2000-05-23 2002-07-02 Silverbrook Research Pty Ltd. Residue removal from nozzle guard for ink jet printhead
US6428133B1 (en) 2000-05-23 2002-08-06 Silverbrook Research Pty Ltd. Ink jet printhead having a moving nozzle with an externally arranged actuator
US6921153B2 (en) 2000-05-23 2005-07-26 Silverbrook Research Pty Ltd Liquid displacement assembly including a fluidic sealing structure
US6557970B2 (en) 2000-05-23 2003-05-06 Silverbrook Research Pty Ltd Nozzle guard for a printhead
IL153028A (en) 2000-05-24 2005-06-19 Silverbrook Res Pty Ltd Ink jet printhead having a moving nozzle with an externally arranged actuator
AU2000247314C1 (en) 2000-05-24 2005-10-06 Zamtec Limited Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator
US7237873B2 (en) 2002-11-23 2007-07-03 Silverbrook Research Pty Ltd Inkjet printhead having low pressure ink ejection zone
AU2000247326B2 (en) * 2000-05-24 2004-03-18 Memjet Technology Limited Fluidic seal for an ink jet nozzle assembly
CN100417523C (zh) * 2000-05-24 2008-09-10 西尔弗布鲁克研究有限公司 带有隔离的喷嘴控制器的喷墨打印头
US6364460B1 (en) 2000-06-13 2002-04-02 Chad R. Sager Liquid delivery system
AU5373900A (en) * 2000-06-30 2002-01-14 Silverbrook Res Pty Ltd Buckle resistant thermal bend actuators
EP1301346B1 (de) * 2000-06-30 2007-08-15 Silverbrook Research Pty. Limited Knickresistente, thermisch biegende betätiger
AU2006225215B2 (en) * 2000-06-30 2009-04-09 Zamtec Limited An ink ejector for an inkjet printer with an arm and paddle arrangement
US7095309B1 (en) * 2000-10-20 2006-08-22 Silverbrook Research Pty Ltd Thermoelastic actuator design
US6402301B1 (en) * 2000-10-27 2002-06-11 Lexmark International, Inc Ink jet printheads and methods therefor
US6561627B2 (en) 2000-11-30 2003-05-13 Eastman Kodak Company Thermal actuator
AUPR292301A0 (en) 2001-02-06 2001-03-01 Silverbrook Research Pty. Ltd. A method and apparatus (ART99)
GB2375185A (en) * 2001-05-04 2002-11-06 Kymata Ltd Thick wafer for MEMS fabrication
JP2003025564A (ja) * 2001-07-11 2003-01-29 Matsushita Electric Ind Co Ltd インクジェットヘッド
US7160806B2 (en) 2001-08-16 2007-01-09 Hewlett-Packard Development Company, L.P. Thermal inkjet printhead processing with silicon etching
US7364269B2 (en) 2002-04-12 2008-04-29 Silverbrook Research Pty Ltd Inkjet printhead with non-uniform width ink supply passage to nozzle
US6857728B2 (en) 2002-12-02 2005-02-22 Silverbrook Research Pty Ltd Pagewidth printhead chip having symmetrically actuated fluid ejection components
US6536874B1 (en) 2002-04-12 2003-03-25 Silverbrook Research Pty Ltd Symmetrically actuated ink ejection components for an ink jet printhead chip
US7575298B2 (en) 2002-04-12 2009-08-18 Silverbrook Research Pty Ltd Inkjet printhead with ink supply passage to nozzle etched from opposing sides of wafer
US6885083B2 (en) 2002-10-31 2005-04-26 Hewlett-Packard Development Company, L.P. Drop generator die processing
US8091984B2 (en) 2002-12-02 2012-01-10 Silverbrook Research Pty Ltd Inkjet printhead employing active and static ink ejection structures
US7377620B2 (en) 2005-05-26 2008-05-27 Hewlett-Packard Development Company, L.P. Hydrophobic nozzle exit with improved micro fluid ejection dynamics
JP2008012911A (ja) * 2006-06-07 2008-01-24 Canon Inc 液体吐出ヘッド、及び液体吐出ヘッドの製造方法
PL2089229T3 (pl) * 2006-12-04 2013-06-28 Zamtec Ltd Zespół dyszy atramentowej z termicznie zaginanym aktuatorem, którego aktywny człon stanowi indywidualną część sklepienia komory dyszy
EP2342081B1 (de) 2008-10-31 2014-03-19 Hewlett-Packard Development Company, L.P. Elektrostatischer flüssigkeitsausstossbetätigungsmechanismus
US8152337B2 (en) * 2009-05-01 2012-04-10 Billboard Video, Inc. Electronic display panel
US8079668B2 (en) 2009-08-25 2011-12-20 Silverbrook Research Pty Ltd Crack-resistant thermal bend actuator
US8281482B2 (en) 2009-08-25 2012-10-09 Zamtec Limited Method of fabricating crack-resistant thermal bend actuator
EP2490896B1 (de) * 2009-08-25 2016-05-25 Memjet Technology Limited Rissbeständiger thermischer biegeaktuator
US8444255B2 (en) 2011-05-18 2013-05-21 Hewlett-Packard Development Company, L.P. Power distribution in a thermal ink jet printhead
US10537913B2 (en) 2013-04-29 2020-01-21 Hewlett-Packard Development Company, L.P. Selective slot coating
CN106362899B (zh) * 2016-11-16 2018-10-30 吉林大学 一种仿纤毛式高精度纳米微滴喷头装置
CN110970252A (zh) * 2019-12-25 2020-04-07 深圳市博微恩科技有限公司 一种键盘底板结构及底板颜色遮盖区制作方法
CN111498983A (zh) * 2020-04-22 2020-08-07 图方便（苏州）环保科技有限公司 一种基于mbbr污水处理用过滤装置及处理方法
KR20240054867A (ko) * 2022-10-19 2024-04-26 엑스멤스 랩스 인코포레이티드 패키지 구조체, 장치 및 그 형성 방법

Family Cites Families (73)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1941001A (en) 1929-01-19 1933-12-26 Rca Corp Recorder
GB792145A (en) * 1953-05-20 1958-03-19 Technograph Printed Circuits L Improvements in and relating to devices for obtaining a mechanical movement from theaction of an electric current
US3373437A (en) 1964-03-25 1968-03-12 Richard G. Sweet Fluid droplet recorder with a plurality of jets
US3596275A (en) 1964-03-25 1971-07-27 Richard G Sweet Fluid droplet recorder
DE1648322A1 (de) * 1967-07-20 1971-03-25 Vdo Schindling Mess- oder Schaltglied aus Bimetall
US3946398A (en) 1970-06-29 1976-03-23 Silonics, Inc. Method and apparatus for recording with writing fluids and drop projection means therefor
US3683212A (en) 1970-09-09 1972-08-08 Clevite Corp Pulsed droplet ejecting system
SE349676B (de) 1971-01-11 1972-10-02 N Stemme
FR2188389B1 (de) * 1972-06-08 1975-06-13 Cibie Projecteurs
FR2231076A2 (en) * 1973-05-24 1974-12-20 Electricite De France Driving organ operated by thermal means - esp. for use in corrosive or dangerous environments formed by two metal strips
CA1127227A (en) 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
DE2905063A1 (de) * 1979-02-10 1980-08-14 Olympia Werke Ag Anordnung zur vermeidung des ansaugens von luft durch die duesen eines spritzsystems
US4459601A (en) 1981-01-30 1984-07-10 Exxon Research And Engineering Co. Ink jet method and apparatus
US4490728A (en) 1981-08-14 1984-12-25 Hewlett-Packard Company Thermal ink jet printer
JPS58112747A (ja) * 1981-12-26 1983-07-05 Fujitsu Ltd インクジエツト記録装置
JPS58116165A (ja) * 1981-12-29 1983-07-11 Canon Inc インク噴射ヘツド
DE3214791A1 (de) * 1982-04-21 1983-10-27 Siemens AG, 1000 Berlin und 8000 München Mit fluessigkeitstroepfchen arbeitendes schreibgeraet
DE3378966D1 (en) 1982-05-28 1989-02-23 Xerox Corp Pressure pulse droplet ejector and array
US4423401A (en) * 1982-07-21 1983-12-27 Tektronix, Inc. Thin-film electrothermal device
DE3245283A1 (de) * 1982-12-07 1984-06-07 Siemens AG, 1000 Berlin und 8000 München Anordnung zum ausstoss von fluessigkeitstroepfchen
US4553393A (en) * 1983-08-26 1985-11-19 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Memory metal actuator
JPS6125849A (ja) * 1984-07-17 1986-02-04 Canon Inc インクジエツト記録装置
DE3430155A1 (de) * 1984-08-16 1986-02-27 Siemens AG, 1000 Berlin und 8000 München Indirekt beheiztes bimetall
JPS61106259A (ja) * 1984-10-31 1986-05-24 Hitachi Ltd インク滴噴出装置
SE447222B (sv) * 1984-12-21 1986-11-03 Swedot System Ab Elektromagnetiskt manovrerbar ventilanordning, serskilt for alstring av droppar i en vetskestralskrivare
JPS61268453A (ja) * 1985-05-23 1986-11-27 Olympus Optical Co Ltd インクジエツトプリント用ヘツド
US5258774A (en) * 1985-11-26 1993-11-02 Dataproducts Corporation Compensation for aerodynamic influences in ink jet apparatuses having ink jet chambers utilizing a plurality of orifices
DE3716996A1 (de) * 1987-05-21 1988-12-08 Vdo Schindling Verformungselement
JPH01105746A (ja) * 1987-10-19 1989-04-24 Ricoh Co Ltd インクジェットヘッド
JPH01115639A (ja) * 1987-10-30 1989-05-08 Ricoh Co Ltd インクジェット記録ヘッド
JPH01128839A (ja) * 1987-11-13 1989-05-22 Ricoh Co Ltd インクジェット記録ヘッド
DE8802281U1 (de) * 1988-02-22 1988-05-19 Siemens AG, 1000 Berlin und 8000 München Direkt beheizter Bimetallstreifen
JPH01257058A (ja) * 1988-04-07 1989-10-13 Seiko Epson Corp インクジェットヘッド
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
JPH01306254A (ja) * 1988-06-03 1989-12-11 Seiko Epson Corp インクジェットヘッド
JPH0250841A (ja) * 1988-08-12 1990-02-20 Seiko Epson Corp インクジェットヘッド
IT1229927B (it) * 1988-10-14 1991-09-16 Cipelletti Alberto Cae Pompa a palette.
US4864824A (en) * 1988-10-31 1989-09-12 American Telephone And Telegraph Company, At&T Bell Laboratories Thin film shape memory alloy and method for producing
US5208604A (en) 1988-10-31 1993-05-04 Canon Kabushiki Kaisha Ink jet head and manufacturing method thereof, and ink jet apparatus with ink jet head
JP2697041B2 (ja) * 1988-12-10 1998-01-14 ミノルタ株式会社 インクジェットプリンタ
JPH02162049A (ja) * 1988-12-16 1990-06-21 Seiko Epson Corp プリンタヘッド
US4899181A (en) 1989-01-30 1990-02-06 Xerox Corporation Large monolithic thermal ink jet printhead
EP0398031A1 (de) * 1989-04-19 1990-11-22 Seiko Epson Corporation Tintenstrahlkopf
JPH0365348A (ja) * 1989-08-04 1991-03-20 Matsushita Electric Ind Co Ltd インクジェットヘッド
JP2746703B2 (ja) * 1989-11-09 1998-05-06 松下電器産業株式会社 インクジェットヘッド装置及びその製造法
JPH03112662A (ja) * 1989-09-27 1991-05-14 Seiko Epson Corp インクジェットプリンタ
JP2964618B2 (ja) * 1989-11-10 1999-10-18 セイコーエプソン株式会社 インクジェットプリンタ用のヘッド
JPH03180350A (ja) * 1989-12-08 1991-08-06 Seiko Epson Corp インクジェットヘッド
JPH04118241A (ja) * 1990-09-10 1992-04-20 Seiko Epson Corp インクジェットプリンタヘッド用振幅変換アクチュエーター
JPH04126255A (ja) * 1990-09-18 1992-04-27 Seiko Epson Corp インクジェットヘッド
JPH04141429A (ja) * 1990-10-03 1992-05-14 Seiko Epson Corp インクジェットヘッド
DE4031248A1 (de) * 1990-10-04 1992-04-09 Kernforschungsz Karlsruhe Mikromechanisches element
US5126755A (en) * 1991-03-26 1992-06-30 Videojet Systems International, Inc. Print head assembly for ink jet printer
US5164740A (en) * 1991-04-24 1992-11-17 Yehuda Ivri High frequency printing mechanism
JPH04368851A (ja) * 1991-06-17 1992-12-21 Seiko Epson Corp 磁場発生基板及びそれを用いたインクジェットヘッド
GB9121851D0 (en) * 1991-10-15 1991-11-27 Willett Int Ltd Device
JP3450349B2 (ja) * 1992-03-31 2003-09-22 キヤノン株式会社 カンチレバー型プローブ
JPH05318724A (ja) * 1992-05-19 1993-12-03 Seikosha Co Ltd インクジェット記録装置
GB9302170D0 (en) * 1993-02-04 1993-03-24 Domino Printing Sciences Plc Ink jet printer
IT1270861B (it) * 1993-05-31 1997-05-13 Olivetti Canon Ind Spa Testina a getto di inchiostro perfezionata per una stampante a punti
US5666141A (en) * 1993-07-13 1997-09-09 Sharp Kabushiki Kaisha Ink jet head and a method of manufacturing thereof
DE4328433A1 (de) * 1993-08-24 1995-03-02 Heidelberger Druckmasch Ag Tintenstrahl-Spritzverfahren, sowie Tintenstrahl-Spritzvorrichtung
DE19516997C2 (de) * 1994-05-10 1998-02-26 Sharp Kk Tintenstrahlkopf und Verfahren zu dessen Herstellung
JPH07314673A (ja) * 1994-05-27 1995-12-05 Sharp Corp インクジェットヘッド
JPH07314665A (ja) * 1994-05-27 1995-12-05 Canon Inc インクジェット記録ヘッド、それを用いた記録装置及び記録方法
JPH0890769A (ja) * 1994-09-27 1996-04-09 Sharp Corp ひだ付きダイアフラム型インクジェットヘッド
JPH08142323A (ja) * 1994-11-24 1996-06-04 Sharp Corp インクジェットヘッドおよびその製造方法
TW365578B (en) * 1995-04-14 1999-08-01 Canon Kk Liquid ejecting head, liquid ejecting device and liquid ejecting method
JPH08336965A (ja) * 1995-06-14 1996-12-24 Sharp Corp インクジェットヘッド
EP0750993B1 (de) * 1995-06-28 2001-12-05 Canon Kabushiki Kaisha Mikrogerät, damit ausgerüsteter Flüssigkeitsstrahlaufzeichnungskopf, Flüssigkeitsstrahlaufzeichnungsvorrichtung mit diesem Flüssigkeitsstrahlaufzeichnungskopf
US5828394A (en) * 1995-09-20 1998-10-27 The Board Of Trustees Of The Leland Stanford Junior University Fluid drop ejector and method
JPH09104109A (ja) * 1995-10-12 1997-04-22 Sharp Corp インクジェットヘッドおよびその製造方法
TW429218B (en) * 1997-06-06 2001-04-11 Canon Kk A liquid discharging method, a liquid discharge head, and a liquid discharge apparatus

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ES2302134T3 (es) 2008-07-01
ATE358019T1 (de) 2007-04-15
ATE386638T1 (de) 2008-03-15
EP1640162B1 (de) 2007-03-28
EP0999934B1 (de) 2005-10-26
EP0999934A4 (de) 2001-06-27
EP1637330B1 (de) 2007-04-18
JP2003521389A (ja) 2003-07-15
EP0999934A1 (de) 2000-05-17
EP1640162A1 (de) 2006-03-29
EP1637330A1 (de) 2006-03-22
ATE409119T1 (de) 2008-10-15
JP4160250B2 (ja) 2008-10-01
EP1650030B1 (de) 2008-09-24
WO1999003681A1 (en) 1999-01-28
EP1650031A1 (de) 2006-04-26
EP1650030A1 (de) 2006-04-26

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